Technical Specification for Thermal And Electron-Beam Evaporator System
02.11. 2016
This document lists the properties and the specifications of the E-Beam and Thermal Evaporator System that will be purchased by the Abant Izzet Baysal University (AIBU-NÜRDAM). The E-Beam and Thermal Evaporator System must satisfy all of the requirements and specifications given in this document without any exception.
- General System Requirements
Vacuum chamber
-Vacuum chamber dimension must beφ900×1050mm
-Vacuum chamber cooling must be outer wall water-cooled
-At least one observation window must be exist and it must be located on the front door with baffle plate
-The vacuum chember pressure must be reach at least ≤6.6×10-5Pa
-Vacuum chember pressure must be reach 5×10-3Pa in maximum 30 minutes
-Vacuum valve, vacuum pipe and chember must be made in stainless steel
-The vacuum system must be consisted of vacuum pump,vacuum pipelines,vacuum valves and vacuum measurers
-Vacuum measurers must be electronic cold cathode gauge
-Workingspace frame must contains three disc surface planets,and its capacity must be 3 pieces of 8inch wafers
-Workpiece rotation speed must be adjustable electronically and speed range at least must be from 3 rpm to 30rpm
-The workpiece must be not only revolution but also can turn round by themselves
-It must have Molecular pump at least 1200 L/S and also Dry pump with 3600 m3/H.
Gas Connections
Required gas connections, CDA and Cooling water pipes shold be installed from gas room to the place shown by buyer. All SS electropolished pipes and connectors should be supplied by seller.
Heating System
-Heating elements must be sheathed heating
-Temperature must be at least 300℃ and adjusted from room temperature (Temperature uniformity must be 300 +-5 0 degree Celsius.
-Temperature uniformity must be better than %3
-Deposition uniformity must be better than %-+2.2
E-Beam sources
-E-Beam source must be consists of one set of electron gun ,one set of power supply,6 sources (6 crucibles) and shutters
-E-gun power supply must be minimum 10KW,and must be adjust from atleast 0- 10KW
-Deflection angle must be at least 270°,High voltage from -2~ -10KV
-Each Crucibles (6 sets) must be have water cooling
-Crucibles must change position through handheld controller operation ,It has position show on display
-Filamentary Cathode must be Tungsten filament
-E-gun stability must be better than ±1.5%
-Filamentary Cathode Current must be Maximum 60A 50/60Hz
-Scan position must be in X-axis and Y-axis, optional position.
-E-Gun maximum outlet current must be around ±2.5ADC
-Deposition uniformity must be better than %-+2.2
Quartz Crystal Thickness Monitor
-INFICON (USA) model SQM160 single probe mmust be used.
-Thickness Monitor must be control beam line
-Film thickness display range must be controlled from 0.000 to 999.9 kÅ
Gas panels
-Two way process gases must be used as N2 ,O2
-MFC controllers must be USA product
-Accuracy of gas flow rate must be better than ±5%FS By MFC
-Flow rate must be set on the touch screen of the computer, with teal time display of the set value and detection value
-The automatic opening and closing of the gas circuit must be controlled by the computer via pneumatic valve
Safeties ,Alarm& interlock
-To ensure a safe operation and rapid fault diagnosis,the equipment must be provided with multiple security interlocking devices and fault alarm function
-Automatic alarm &break off when no cooling water low pressure of cooling water and overheat;
Control system
-The E-Beam system adopts must be imported intelligent controllers for automatic control
-Human interface must be using Advantech pc with touch screen for convenience operation
-Temperature controller must be using imported unit , with isolated units for temperature alarm and automatic break off
-Omron and Schneider electrical elements must be using for digital control
2.2 DELIVERY
The system shall be delivered to the address given by Abant Izzet Baysal University without any missing part. Custom expenses and delivery to NÜRDAM costs should be paid by Seller.
2.3 COMMISSIONING AND START-UP
-All expenses to start-up belong the seller.
-The Seller provides the AİBÜ with the required drawings and specifications pertaining to the equipment interfacing, connections and construction requirements.
-The System delivery includes the installation instructions, maintenance instructions and safety instructions.
-The Seller shall provide 3 hard copies of user manual and 1 soft copy via CD free
of charge.
2.4 ACCEPTANCE
-Acceptance for the shipping of the complete system: the first acceptance runs have beenperformed successfully at the Seller’s location
-Acceptance of the complete system: the second following acceptance runs must be performedsuccessfully at theAbant Izzet Baysal University for completed acceptance
- 550 nm thick ZnO, SiO2, TiO2 thin film must be deposited with %-+2 sensitivity by e-beam evaporation
- 550 nm thick Al, Au, Pt, Ti, Ge, Ni, and Cr layers must be deposited with %-+2 sensitivity by thermally evaporation
2.6 INSTALLATION CONDITIONS AND OPERATOR TRAINING
-All electric, carrier gas, exhaust connections at the Buyer’s site to be specified by the AIBU.
-Operator training for the basic use and maintenance of the System at the AIBU’s site is provided by the Seller without requiring any extra expenses. The training lasts for 2-4 working days.
-1 set of hard copies of user manual and a soft copy via CD/DVD is provided free of
charge.
2.7Warranty Requirements
Periods of the said warranty for each and every part or parts of the System commence on the date of acceptance and expire twelve (24) months thereafter. Warranty of the System must include parts, labor and the travel and living expenses of the engineer/technician responsible for repair. If it turns out to be necessary to send some of the items to the supplier for repair, the shipping and insurance costs of these items will be paid by the supplier during the warranty period. The updates to the System’s software must be provided to AIBU charge free during the warranty period.
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