Background Statement for SEMI Draft Document 5761

Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA95134-2127

Phone: 408.943.6900, Fax: 408.943.7943

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Background Statement for SEMI Draft Document 5761

NEW STANDARD: SAFETY GUIDELINE FOR USE OF ENERGETIC MATERIALS IN SEMICONDUCTOR R&D AND MANUFACTURING PROCESSES

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

The ballot results are scheduled to be reviewed and adjudicated at the meetings indicated in the table below. Check under Calendar of Events for the latest update.

Background

Many processes used in manufacturing semiconductors require reactive chemistry; some of the process chemicals used are “energetic materials”, that is, they are unstable, pyrophoric, or water reactive. Using some process chemicals (not only those just described) can produce byproducts that are energetic materials. Control mechanisms are in place to mitigate the risks of such materials. However, new and emerging materials, some with unknown properties, are continuously being introduced into research and manufacturing. As incidents involving energetic materials occur, the focus on hazards identification and control is a continuing priority.

SEMATECH formed an Energetics Working Group in 2012 to improve understanding methodsthat decrease the risk of using energetic materials in research and development and in high volume manufacturing. The working group included representatives from SEMATECH member companies, equipment suppliers, material suppliers, and industry consultants. SEMATECH published a compilation of methods in January 2013.

In early 2013, SEMATECH began meeting with representatives from the SEMI Standards EHS Technical Committee and representatives from the World Semiconductor Council, to acquaint them with this work and to receive inputs from a broader spectrum of stakeholders. These meetings resulted in second revision of the SEMATECH publication, which is currently available on the SEMATECH public website.

The SEMI MESSC and EHS Committee meetings at SEMICON West in July 2014 approved establishment of a Task Force to begin work on a SEMI Safety Guideline associated with energetic materials, based initially on the SEMATECH publication. Task Force meetings began in August 2014, and significant additional technical input was received. This has resulted in this ballot, proposing a new Safety Guideline, entitled Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes.

If you have questions or concerns you would like to discuss before submitting your ballot, please contact the Task Force Leaders:

Andy McIntyre >

Steve Trammel <>

As this is a Technical Ballot, you must submit your formal response to SEMI in the prescribed manner.

If you Reject or submit Comments on this ballot, please send a soft copy of your response to the Task Force Leaders

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1Doc. 5761 SEMI

Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA95134-2127

Phone: 408.943.6900, Fax: 408.943.7943

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Review and Adjudication Information

Task Force Review / Committee Adjudication
Group: / Energetic Materials EHS TF / NA EHS Committee
Date: / SEMICON West 2015 Meetings
Tuesday, July 14, 2015 (tentative) / SEMICON West 2015 Meetings
Thursday, July 16, 2015
Time & Timezone: / 1:00 PM to 2:00 PM (tentative)
US Pacific Time / 9:00 AM to 6:00 PM
US Pacific Time
Location: / San Francisco Marriott Marquis Hotel
780 Mission Street / San Francisco Marriott Marquis Hotel
780 Mission Street
City, State/Country: / San Francisco, California 94103 USA / San Francisco, California 94103 USA
Leader(s): / Steve Trammell (EORM)
Andy McIntyre (EORM) / Chris Evanston (Salus)
Sean Larsen (Lam Research)
Bert Planting (ASML)
Standards Staff: / Paul Trio (SEMI NA)
408.943.7041
/ Paul Trio (SEMI NA)
408.943.7041

Page 1Doc. 5761 SEMI

Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA95134-2127

Phone: 408.943.6900, Fax: 408.943.7943

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Safety Checklist for SEMI Draft Document #5761

Title: New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Developing/Revising Body

Name/Type: / Energetic Materials EHS Task Force
Technical Committee: / EHS
Region: / NA

Leadership

Position / Last / First / Affiliation
Leader / McIntyre / Andy / EORM
Leader / Trammell / Steve / SEMATECH
Author/Editor* / Sklar / Eric / Safety Guru
Checklist Author* / Sklar / Eric / Safety Guru

* Only necessary if different from leaders

Documents, Conflicts, and Consideration

Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee

# and Title / Manner of Consideration

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline

# and Title / Inconsistency with This Safety Guideline

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical

# and Title / Nature of Conflict with This Safety Guideline

Participants and Contributors

Last / First / Affiliation
Barsky / Joe / TUV Rheinland
Belk / Bill / DECON Environmental Services
Bishline / Lacy / TI
Breder / Paul / ESTEC Solutions
Brody / Steven / Product EHS Consulting
Brown / Amy / Factory Mutual
Bunseokae / Eunseok / SK Hynix
Choi / Joyce / Nordson
Connor / Paul / Dow
Crane / Lauren / KLA Tencor
Cuthbert / Andrew / Western Digital
D’Agostino / Mark / Applied Materials
Evanston / Chris / Salus Engineering
Fessler / Mark / TEL
Filipp / Nick / EORM

Page 1Doc. 5761 SEMI

Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA95134-2127

Phone: 408.943.6900, Fax: 408.943.7943

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Francis / Terry / Consultant
Faust / Bruce / TUV SUD America
Gardiner / Robin / Matheson
Gordon / Mike / Edwards
Graves / Rene / TI
Greenberg / Cliff / Nikon Precision
Hambleton / Scott / Applied Materials
Hamilton / Jeff / TEL
Jeong / Yeyoung / Samsung
Jumper / Steve / Applied Materials
Karl / Edward / Applied Materials
Kozlowski / Paul / IBM Yorktown
Kwong / Hsi-An / SEMATECH
Larsen / Sean / Lam Research
Madhavan / Bindu / Air Products
Martin / Kevin / Intel
McDaid / Raymond / GLOBALFOUNDRIES
McIntyre / Andy / EORM
McNair / Andrea / TEL
Miller / Phil / Dow Chemical
Mills / Ken / ESTEC Solutions
Moody / Doug / Wafertech
Nambu / Mitsuju / Tokyo Electron
Ngai / Eugene / Chemically Speaking LLC
Olander / Karl / Entegris
Pearlstein / Ronald / Air Products
Planting / Bert / ASML
Pochon / Stephan / TUV Rheinland NA
Powell / Doug / Independent
Rao / Madhukar / Air Products
Rivera / Kalysha / TEL
Schwab / Paul / Texas Instruments
Sharfstein / Susan / CNSE
Sleiman / Samir / Brooks Automation
Steidl / Thomas / Air Products
Suydan / Thom / KFPI
Swydam / Thom / Koetter Fire Protection
Tieckelmann / Robert / SEMATECH
Timlin / Ernie / IBM
Trammell / Steve / EORM
Trio / Paul / SEMI
Visty / John / Salus Engineering
Wilders / Mike / Edwards
Wyman / Matt / Koetter Fire Protection
Zhang / Shasha / CNSE

The content requirements of this checklist are documented in Section 15.2 of the Regulations Governing SEMI Standards Committees.

SEMI Draft Document 5761

NEW STANDARD: SAFETY GUIDELINE FOR USE OF ENERGETIC MATERIALS IN SEMICONDUCTOR R&D AND MANUFACTURING PROCESSES

Contents

1 Purpose

2 Scope

3 Limitations

4 Referenced Standards and Documents

5 Terminology

6 Safety Philosophy

7 General Provisions

8 Integrated Hazard Analysis

9 Process Material Information to be provided by Energetic Material Suppliers

10 Liquid and Vapor Delivery Containers - Supplier Criteria

11 Facility Receiving, Inspection, Storage, Transport and Emergency Response for Remote and On-Equipment Delivery Containers – User Criteria

12 Remote Liquid and Vapor Delivery Systems – Supplier Criteria

13 Remote Liquid and Vapor Delivery Systems - User Criteria

14 Container Delivery Systems within Equipment– Equipment Supplier Criteria

15 Gas Box and Process Chamber – Equipment Supplier Criteria

16 Post Process Chamber Through Vacuum Pump / Abatement System Design and Operational Criteria

17 Equipment/Parts Cleaning and Waste Generation Criteria

18 Control of Hazardous Energy

19 Related Documents

APPENDIX 1 Example Procedure for Opening Systems Downstream of Process Chambers

APPENDIX 2 Energetic Materials Characterization Form

Figures

Figure 1 Examples of Containers

Figure 2 Determination whether a byproduct is energetic

Figure 3 Determination whether a process chemical is energetic

Figure 4 Determination whether a substance is pyrophoric

Figure 5 Determination whether a substance is unstable

Figure 6 Determination whether a substance is water reactive

Figure 7 Example Vacuum Pump System Designed for Energetic Process (See Table 1 for the key)

1 Purpose

1.1 This environmental, safety and health (ESH) guideline is intended as a minimum set of ESH criteria for the procurement, storage, handling, and use of energetic materials in semiconductor R&D and manufacturing processes in all phases of use, from chemical supply through abatement.

1.2 This Guideline is intended to be industry best practices as of its publication date. All or portions of this document may be referenced by users as expectations or specifications, as part of the equipment and materials procurement process.

2 Scope

2.1 The scope of this document isenergetic materials, as defined in ¶5.2.10 .

2.2 This Safety Guideline covers the handling, shipping and disposal of waste energetic materials and process byproducts as well as equipment and components containing residual energetic materials or process byproducts.

2.3 This Safety Guideline also describes the minimum characterization data to be provided at the time the energetic material is to be tested in research and development, pilot line or high volume semiconductor manufacturing equipment.

2.4 This Safety Guideline provides ESH design criteria for chemical supply, process, and post-process equipment for semiconductor processes using energetic materials.

2.5 This Safety Guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.

NOTICE:SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This Safety Guideline is intended for use by suppliers and users as a reference for EHS considerations. It is not intended to be used to verify compliance with local regulatory requirements.

3.2 It is not the philosophy of this Safety Guideline to provide all of the detailed EHS design criteria that may be applied to semiconductor manufacturing equipment.

3.3 This Safety Guideline was developed as a supplement, primarily addressing energetic reaction hazards, to other SEMI Standards documents. The reader should consult those documents, including SEMI S2 and S6, for guidance for managing the health and other hazards associated with energetic materials.

3.4 In some cases, references to standards have been incorporated into this Safety Guideline. These references do not imply applicability of the entire standards, but only of the sections referenced.

3.5 This Safety Guideline is not intended to apply to facilities or operations of energetic material manufacturers or distributors.

3.6 Materials that are within the Scope of SEMI S18 are not subject to this document, regardless of whether they conform to the definition of “energetic materials”.

4 Referenced Standards and Documents

4.1 SEMI Standards and Safety Guidelines

SEMI F6 —Guide for Secondary Containment of Hazardous Gas Piping Systems

SEMI F96 — Specification for Port Configuration on Canisters to Contain Liquid CVD Precursors

SEMI F107 — Guide for Process Equipment Adapter Plates

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S3 — Safety Guideline for Process Liquid Heating Systems

SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets

SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S18 — Environmental, Health, and Safety Guideline for Silane Flammable Silicon Compounds

SEMI S21 — Safety Guideline for Worker Protection

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

SEMI S24 — Safety Guideline for Multi-Employer Work Areas

SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

SEMI S28 — Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment

SEMI S29 — Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction

4.2 ASTM[1]

ASTM Standard F739 — Standard Test Method for Permeation of Liquids and Gasses through Protective Clothing Materials under Conditions of Continuous Contact

ASTM F2302-08 — Standard Performance Specification for Heat and Flame Resistant Clothing

4.3 Factory Mutual[2]

FM Global Property Loss Prevention Sheet 7-59 — Inerting and Purging of Tanks, Process Vessels, and Equipment

Factory Mutual Data Sheet 7-59, Inerting and Purging of Tanks, Process Vessels, and Equipment

4.4 International Code Council[3]

International Fire Code

4.5 NFPA[4]

NFPA 704 — Standard System for the Identification of the Hazards of Materials for Emergency Response

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 ATL — accredited testing laboratory [SEMI S2]

5.1.2 GHS — Globally Harmonized System of Classification and Labelling of Chemicals

5.1.3 HPM — hazardous production material

5.1.4 SDS — safety data sheet

5.2 Definitions

5.2.1 abatement system — a system used to modify the effluent from a process in order to reduce emissions of hazardous materials to levels that do not present unacceptable risk. [SEMI S18]

5.2.2 accredited testing laboratory — a an independent organization dedicated to the testing of components, devices or systems; that is recognized by a governmental or regulatory body as competent to perform evaluations based on established safety standards. [SEMI S2]

5.2.3 baseline —operating conditions, including process chemistry, for which the equipment was designed and manufactured. [SEMI S2, S23, S29]

5.2.4 byproduct — a substance, other than the one the process is intended to produce, that is formed during a process.

5.2.5 cleanroom — a room in which the concentration of airborne particles is controlled to specific limits. [SEMI S2, S26]

5.2.6 combustible material —a combustible material is any material that does propagate flame (beyond the ignition zone with or without the continued application of the ignition source) and does not meet the definition in this section for non-combustible material. See also the definition for non-combustible material. [SEMI S2, S26]

5.2.7 container — an assembly consisting of at least:

a vessel in which a material is stored and may be transported and from which it may be transferred to another container or to equipment,
fittings for fluid connections, and
one or more valves permitting isolation of each of its connections.

A container may include additional valves, means of purging, or sensors. There are many configurations that conform to this definition; Figure 1 contains examples of containers.

Figure 1
Examples of Containers

NOTE 1:Containers are also called: “canisters’, “cylinders”, “drums”, “tanks”, and ‘ampoules’. ‘Ampoule’ is traditionally used to refer to containers inside process equipment.

NOTE 2:For some of the containers within the scope of this Safety Guideline, SEMI F96 specifies the connectors and port locations, and SEMI F66 specifies the port marking,

5.2.8 control of hazardous energy — the practice by which personnel are protected from unexpected starting and release of hazardous energy during maintenance and service. It consists of three steps: isolation, removal of residual energy, and verification.

5.2.9 energetic byproduct — a byproduct found, by evaluation in accordance with Figure 3, to be “energetic”.

Figure 2
Determination whether a byproduct is energetic

5.2.10 energetic material —a substance that is either an energetic process chemical or an energetic byproduct.

5.2.11 energetic material supplier — party who provides energetic materials to and communicates directly with the user. An energetic material supplier may be a manufacturer, a distributor, or a representative.

5.2.12 energetic process chemical — a process chemical found, by evaluation in accordance with Figure 3, to be “energetic”.