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Background Statement for SEMI Draft DOCUMENT 4414

REVISION TO SEMI E54.9-0706, SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATION FOR MODBUS/TCP OVER TCP/IP

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Note: Additions are indicated by underline and deletions are indicated by strikethrough.

PLEASE NOTE: This ballot contains a proposal for a revision to an existing standard.

What is the problem being solved?

Line Item #1 adds and corrects the mapping of network-visible specific device model attributes and services specified in the SEMI Document E54.18-1106, Specification For Sensor/Actuator Network Specific Device Model For Vacuum Pump Device to the E54.9-0706 SEMI Document, Specification For Sensor/Actuator Network Communication Specification For Modbus/TCP over TCP/IP.

What is the history of this issue and ballot?

This is the first time this ballot is being addressed as a SEMI Draft YELLOW Ballot 4414.

Who will this affect?

This line item will affect equipment manufactures who implement the SEMI E54.9-0706 standard to interface Vacuum Pump devices to the Modbus/TCP over TCP/IPSensor/Actuator Network Communication Standard.

Is this a change to and existing solution, or, is it a new activity?

Line Item #1 is a new activity proposing to update network support for additional SEMI standards currently proposed by SEMI Document E54.18-1106, Specification For Sensor/Actuator Network Specific Device Model For Vacuum Pump Device.

This ballot includes the following line item:

  • Line Item – SEMI E54.9-0706 – Add support for mapping additional specific network attributes and services for SEMI Document E54.18-1106, Specification For Sensor/Actuator Network Specific Device Model For Vacuum Pump Device.

The ballot begins on the next page.

The results of this ballot will be discussed at the next I&C committee meeting on April 10, 2008 in conjunction with the NA Spring 2008 Standards Meetings in Dallas, Texas.

SEMI Draft Document 4414

REVISION TO SEMI E54.9-0706, SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATION FOR MODBUS/TCP OVER TCP/IP

1 Line Item – E54.9-0706 – Add Support For Mapping Specific Network Attributes And Services For Vacuum Pump Device.

Background:

Currently the standard E54.9-0706 assigns network specific mappings for Specific Device Models which are SEMI standards. This Line Item #1 is proposing revising the network mappings for attributes and services specified for the Vacuum Pump Device as specified by SEMI Document E54.18-1106, Specification For Sensor/Actuator Network Specific Device Model For Vacuum Pump Device.

Proposal:

E54.9-0706 – Revise subsection 9.5 and Table 51 mapping for Specific Device Model For Vacuum Pump Device to update existing network mappings and add additional network mappings for attributes and services as specified in SEMI Document E54.18-1106, Specification For Sensor/Actuator Network Specific Device Model For Vacuum Pump Device.

9.5Specific Device Model For Vacuum Pump Device— These sections detail the network mapping required to support the Specific Device Model for Vacuum Pump Device (see reference SEMI Document E54.18-0306, § 8.2.1.1E54.18-1106 section 8.2). Table 51 summarizes the Vacuum Pump Device object types. Subsequent Tables 52–6252–64 detail the attributes and services associated with each Vacuum Pump Device object type.

Table 51 Basic Vacuum Pump Device Object Types

SDM Object Identifier / Object Name / Modbus
Class ID
VPD2 (DM) / Device Manager / 1
VPD1 (SAC) / Sensor/Actuator/Controller / 2
VPD3 / Actuator-VP / 156
VPD4 / Sensor-AI-VP-SPEED / 157
VPD5 / Sensor-AI-VP-PRES
Sensor-AI-VP-EXHAUST-PRES / 158
VPD6 / Sensor-AI-VP-TEMP
Sensor-AI-VP-CASE-TEMP / 159
VPD7 / Sensor-VP-CURRENT / 160
VPD8 / Sensor-AI-VP-POWER / 161
VPD9 / Sensor-AI-VP-COOLANT-FLOW / 162
VPD10 / Sensor-AI-VP-PURGE-GAS-FLOW / 163
VPD11 / Assembly-VP#1 / 164
VPD12 / Sensor-AI-VP-INLET-PRES / 165
VPD13 / Assembly-VP#2 / 166

9.5.1Device Manager— The presentation of the extended VPD2 Device Manager (DM) object instance attributes and services is indicated in Table 52.

Table 52 Extended Device Manager Object Instance Network Variables and Services

Device Manager Object (VPD2-DM)
Class ID = 01, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
129 / Idle Mode Capable / DmA33
130 / Pump Access Mode Status / DmA34
131 / Coordinated Mode Status / DmA35
Services
ID / Service Name / SDM Tag
33 / Set Pump Access Mode / DmS33
34 / Set Coordinated Mode / DmS34

9.5.2Sensor Actuator Controller— The presentation of the extended VPD1 Sensor Actuator Controller (SAC) object instance attributes and services is indicated in Table 53.

Table 53 Extended SAC Object Instance Network Variables and Services

Sensor Actuator Controller (VPD1-SAC)
Class ID = 02, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
139 / Hours To Next Routine Maintenance / SacA65
140 / Hours To Next Overhaul / SacA66
141 / Process Gas Flow
Process Gas Flowing / SacA67
142 / Process Cycles To Next Routine Maintenance / SacA68
143 / Process Cycles To Next Overhaul / SacA69
144 / Process Gas Flow Composition / SacA70
Services
ID / Service Name / SDM Tag
33 / Process Cycle Completed / SacS33

9.5.3Actuator-VP— The presentation of the Actuator Vacuum Pump (Actuator-VP) object instance attributes and services is indicated in Table 54.

Table 54 Actuator-VP Object Instance Network Variables and Services

Actuator-VP
Class ID = 156, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Setting (PumpState) / ActA16
129 / Normal Operation / ActVPA1
130 / Run Hours / ActVPA2
131 / Idle Hours / ActVPA3
Services
ID / Service Name / SDM Tag
33 / Pump On / ActVPS1
34 / Pump Off
Pump Stop / ActVPS2
35 / Pump Idle / ActVPS3

9.5.4Sensor-AI-VP-SPEED— The presentation of the Sensor Analog Input Vacuum Pump Speed Sensor (Sensor-AI-VP-SPEED) object instance attributes and services is indicated in Table 55.

Table 55 Sensor-AI-VP-SPEED Object Instance Network Variables and Services

Sensor-AI-VP-SPEED
Class ID = 157, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Speed Actual) / ActA16
129 / Speed Target / SaiVPSpdA1
130 / Speed Scale Factor / SaiVPSpdA2
131 / Over Speed Warning Limit / SaiVPSpdA3
132 / Over speed Alarm Limit / SaiVPSpdA4
133 / Under Speed Warning Limit / SaiVPSpdA5
134 / Under Speed Alarm Limit / SaiVPSpdA6
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.5Sensor-AI-VP-EXHAUST-PRES— The presentation of the Sensor Analog Input Vacuum Pump Pressure Sensor (Sensor-AI-VP-EXHAUST-PRES) object instance attributes and services is indicated in Table 56.

Table 56 Sensor-AI-VP-EXHAUST-PRES Object Instance Network Variables and Services

Sensor-AI-VP-EXHAUST-PRES
Class ID = 158, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Exhaust Pressure) / SaiA16
129 / Exhaust Pressure Units / SaiVPPresA1
130 / Exhaust Pressure Scale Factor / SaiVPPresA2
131 / Exhaust Pressure Warning Limit / SaiVPPresA3
132 / Exhaust Pressure Alarm Limit / SaiVPPresA4
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.6Sensor-AI-VP-CASE-TEMP— The presentation of the Sensor Analog Input Vacuum Pump Case Temperature Sensor (Sensor-AI-VP-CASE-TEMP) object instance attributes and services is indicated in Table 57.

Table 57 Sensor-AI-VP-CASE-TEMP Object Instance Network Variables and Services

Sensor-AI-VP-CASE-TEMP
Class ID = 159, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Case Temperature) / SaiA16
129 / Case Temperature Target / SaiVPTempA1
130 / Case Temperature Scale Factor / SaiVPTempA2
131 / Case Temperature Warning Limit / SaiVPTempA3
132 / Case Temperature Alarm Limit / SaiVPTempA4
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.7Sensor-AI-VP-CURRENT— The presentation of the Sensor Analog Input Vacuum Pump Current Sensor (Sensor-AI-VP-CURRENT) object instance attributes and services is indicated in Table 58.

Table 58 Sensor-AI-VP-CURRENT Object Instance Network Variables and Services

Sensor-AI-VP-CURRENT
Class ID = 160, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Current) / SaiA16
129 / Current Scale Factor / SaiVPCurrentA1
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.8Sensor-AI-VP-POWER— The presentation of the Sensor Analog Input Vacuum Pump Power Sensor (Sensor-AI-VP-POWER) object instance attributes is indicated in Table 59.

Table 59 Sensor-AI-VP-POWER Object Instance Network Variables and Services

Sensor-AI-VP-POWER
Class ID = 161, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Power) / SaiA16
129 / Power Scale Factor / SaiVPPowerA1
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.9Sensor-AI-VP-COOLANT-FLOW— The presentation of the Sensor Analog Input Vacuum Pump Coolant Flow Sensor (Sensor-AI-VP-COOLANT-FLOW) object instance attributes and services is indicated in Table 60.

Table 60 Sensor-AI-VP-COOLANT-FLOW Object Instance Network Variables and Services

Sensor-AI-VP-COOLANT-FLOW
Class ID = 162, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Coolant Flow) / ActA16
129 / Coolant FlowTarget / SaiVPFlowA1
130 / Coolant Flow Units / SaiVPFlowA2
131 / Coolant Flow Scale Factor / SaiVPFlowA3
132 / Coolant Flow Warning Limit / SaiVPFlowA4
133 / Coolant Flow Alarm Limit / SaiVPFlowA5
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.10Sensor-AI-VP-PURGE-GAS-FLOW— The presentation of the Sensor Analog Input Vacuum Pump Purge Gas Flow Sensor (Sensor-AI-VP-PURGE-GAS-FLOW) object instance attributes and services is indicated in Table 61.

Table 61 Sensor-AI-VP-PURGE-GAS-FLOW Object Instance Network Variables and Services

Sensor-AI-VP-PURGE-GAS-FLOW
Class ID = 163, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Purge Gas Flow) / ActA16
129 / Purge Gas Flow Target / SaiVPPurgeGasFlowA1
130 / Purge Gas Flow Units / SaiVPPurgeGasFlowA2
131 / Purge Gas Flow Scale Factor / SaiVPPurgeGasFlowA3
132 / Purge Gas Flow Warning Limit / SaiVPPurgeGasFlowA4
133 / Purge Gas Flow Alarm Limit / SaiVPPurgeGasFlowA5
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.11Assembly-VP#1— The presentation of the Assembly #1 Vacuum Pump Device (Assembly-VP#1) object instance attributes and services is indicated in Table 62.

Table 62 Assembly-VPD#1 Object Instance Network Variables and Services

Assembly-VP#1
Class ID = 164, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
1 / Data / A1
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.12Assembly-VP#2— The presentation of the Assembly #2 Vacuum Pump Device (Assembly-VP#2) object instance attributes and services is indicated in Table 63.

Table 63 Assembly-VPD#2 Object Instance Network Variables and Services

Assembly-VP#2
Class ID = 166, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
1 / Data / A1
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

9.5.13Sensor-AI-VP-INLET-PRES— The presentation of the Sensor Analog Input Vacuum Pump Pressure Sensor (Sensor-AI-VP-INLET-PRES) object instance attributes and services is indicated in Table 64.

Table 64 Sensor-AI-VP-INLET-PRES Object Instance Network Variables and Services

Sensor-AI-VP-INLET-PRES
Class ID = 165, Instance ID = 01
Attributes
ID / Attribute Name / SDM Tag
128 / Value (Inlet Pressure) / SaiA16
129 / Inlet Pressure Units / SaiVPPresInletA1
130 / Inlet Pressure Scale Factor / SaiVPPresInletA2
Services
ID / Service Name / SDM Tag
-- / No additional services defined / --

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