Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
4400A
Background Statement for SEMI Draft Document #4400C
Revision to SEMI S18-1102: Environmental, Health and Safety Guideline for Silane Family Gases Handling with title change to “Environmental, Health and Safety Guideline for Flammable Silicon Compounds”
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background Statement:
This is the fourth technical ballot for revision to SEMI S18-1102.
After an attempt to pass S18 with minimal editorial revision failed, discussions on how we should revise the document to make the document useful and up-to-date for not only semiconductor manufacturing related use but also other electronics manufacturing (for example, FPD, PV) were held a couple of times in various venues.
It was also intensely discussed how the Safety Guideline should address quite different chemical and physical properties of so called “Silane Family Gases” in current SEMI S18.
As the result of above discussions the document was intensively rewritten to cover safety criteria needed to be observed for each class of flammable silicon compounds covered by the new scope. Although the second ballot, 4400A, received many negatives, it seemed that new scope and structure of the document were generally accepted by the global EH&S committee.
There were still number of technically persuasive negatives and comments on the third ballot, 4400B, and it was failed as TF recommended.
In the following ballot, TF tries to incorporate all the TF’s responses to negatives and comments on 4400B while keeping direction of revising S18 same as the previous ballot.
Because of the extent of the changes from S18-1102, the changes are not identified within this ballot. You are to vote to Accept or Reject replacing the currently-published SEMI S18 with what is in this ballot.
The voting result of Doc.4400C will be reviewed by the S18 Revision Task Force (date is TBD). The formal adjudication of this ballot is scheduled for the EHS Committee meeting, September 26, 2011 at SEMI Japan. Anyone wishing to participate in the discussions should advise Supika Mashiro, Moray Crawford (TF co-leaders), Eric Sklar (NA Support TF leader) or SEMI Staff responsible for EH&S, so that the leaders can ensure that the individual is added to the TF Roster and advised of the teleconference access information and the availability of drafts for review.
If you have any questions, please contact the following TF leaders or SEMI staff:
S18 Revision TF co-leaders:
Supika Mashiro (TOKYO ELECTRON LTD.); e-mail: ,
Moray Crawford (Hatsuta Seisakusho); e-mail:
S18 Revision NA Support TF leader:
Eric Sklar (Safety Guru); e-mail:
SEMI staff:
Akiko Yamamoto (SEMI Japan); e-mail:
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 2 Doc. 4400Cã SEMIâ
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
4400A
Safety Checklist for SEMI Draft Document #4400C
Revision to SEMI S18-1102: Environmental, Health and Safety Guideline for Silane Family Gases Handling with title change to “Environmental, Health and Safety Guideline for Flammable Silicon Compounds”
Developing/Revising Body
Name/Type: / S18 Revision Task ForceTechnical Committee: / EHS
Region: / Japan
Leadership
Position / Last / First / AffiliationLeader / Mashiro / Supika / TOKYO ELECTRON LTD.
Leader / Crawford / Moray / Hatsuta Seisakusho
Author/Editor* / Sklar / Eric / Safety Guru, LLC
Checklist Author*
* Only necessary if different from leaders
Documents, Conflicts, and Consideration
Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee
# and Title / Manner of ConsiderationSEMI F1 / Referenced applicable criteria.
SEMI F6 / Referenced applicable criteria.
SEMI F5 / Referenced applicable criteria.
SEMI S1 / Referenced applicable criteria.
SEMI S2 / Referenced applicable criteria.
SEMI S4 / Referenced applicable criteria.
SEMI S5 / Referenced applicable criteria.
SEMI S6 / Referenced applicable criteria.
SEMI S10 / Referenced applicable criteria.
SEMI S13 / Referenced applicable criteria.
SEMI S14 / Referenced applicable criteria.
ASME B31.3 / Referenced applicable criteria.
ASTM Manual, MNL33 “Manual on Chlorosilane Emergency Response Guidelines” / Referenced applicable criteria.
ISO 10156 / Referenced applicable criteria.
ISO 10298 / Referenced applicable criteria.
NFPA 1 / Referenced applicable criteria.
NFPA 70 — National Electrical Code (NEC) / Referenced applicable criteria.
NFPA318 / Referenced applicable criteria.
CGA G13 / Referenced applicable criteria.
CGA P20 / Referenced applicable criteria.
CGA P23 / Referenced applicable criteria.
29CFR 1900.1200 / Referenced applicable criteria.
Pressure Equipment Directive 97/23/EC / Referenced applicable criteria.
High Pressure Gas Safety Law / Referenced applicable criteria.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 2 Doc. 4400Cã SEMIâ
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
4400A
KHK Application Guide for the High Pressure Gas Safety Law / Referenced applicable criteria.NIOSH Pocket Guide / Referenced applicable criteria.
FM Global Property Loss Prevention Sheets 7-7R “SEMICONDUCTOR FABRICATION FACILITIES” / Referenced applicable criteria.
Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline
# and Title / Inconsistency with This Safety GuidelineHigh Pressure Gas Safety Law / Definition of “highly toxic”, “toxic”, “high pressure gas”
Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical
# and Title / Nature of Conflict with This Safety GuidelineParticipants and Contributors
Last / First / AffiliationSakura / Hidetoshi / Intel
Sugihara / Kenichi / Taiyo Nissan
Ibuka / Shigehito / TEL
Yamauchi / Yasuhiro / Mitsubishi Heavy Industries
Fessler / Mark / TEL
Ngai / Eugene / Chemically Speaking LLC
Funk / Rowland / Salus
Desrosiers / Robert / IBM
Sexton / David / TUV RNA
Nogawa / Kaoru / Safe Techno
Larson / Sean / LAM
Clane / Lauren / AMAT
Yakimow / Byron / Cymer
The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees.
SEMI Draft Document #4400C
Revision to SEMI S18-1102: Environmental, Health and Safety Guideline for Silane Family Gases Handling with title change to “Environmental, Health and Safety Guideline for Flammable Silicon Compounds”
1 Purpose
1.1 This Safety Guideline is intended as a minimum set of safety and health criteria for storage, handling, and use of flammable silicon compounds from supply to abatement.
1.2 This guideline is also intended as a minimum set of safety and health design criteria for semiconductor, FPD, PV manufacturing equipment and other equipment that uses flammable silicon compounds for processing.
2 Scope
2.1 Flammable silicon compounds that are within the scope of this Safety Guideline are shown in Table 1.
Table 1 Chemicals Within the Scope of This Safety Guideline
Compressed Gas / Liquefied Gas / LiquidNot Corrosive / monosilane / disilane
monomethylsilane
dimethylsilane
trimethylsilane / trisilane
tetramethylsilane
Corrosive / monochlorosilane
dichlorosilane / trichlorosilane methylchlorosilane
methyldichlorosilane dimethyldichlorosilane
methyltrichlorosilane
NOTE 1: The term “chemicals” includes liquids and gases.
NOTE 2: “Silane” without modifiers usually means silicon tetrahydride. The synonym “monosilane” is also used for clarification.
2.2 Flammable mixtures containing flammable silicon compounds included in the Table 1 are also within the scope of this Safety Guideline.
NOTE 3: Silane is often mixed with highly toxic flammable gas such as phosphine. In such case additional requirements apply.
2.3 This Safety Guideline includes the following sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards and Documents
5. Terminology
6. General Principles
7. Evaluation
8. Education and Training
9. Emergency Response
10. Offline Storage Facilities
11. Supply from Outdoor Storage/Dispensing Facilities
12. Supply from Indoor Storage/Dispensing Facilities
13. Indoor Distribution System
14. Equipment Using Flammable Silicon Compounds
15 Exhaust Ventilation, Flammable Silicon Compound Effluent, and Abatement Systems
Appendix 1 ― System Configurations – Cylinder sources
Appendix 2 ― System Configuration – Bulk Sources
Appendix 3 ― Piping and Flow Components
Appendix 4 ― Pressurization Testing and Leak Testing
Appendix 5 ― Gas Monitoring
Appendix 6 ― Fire Detection, Suppression, and Alarm Systems
NOTE 4: This Safety Guideline contains the following Related Information sections:
· Related Information 1 ― Physical and Chemical Properties of Flammable Silicon Compounds Commonly Used in Semiconductor, FPD, and PV Manufacturing
· Related Information 2 ― Silane Safety Control Systems
2.4 In some sections of this Safety Guideline, as well as in some of the included supplementary materials, the columns to the right of the text designate to which flammable silicon compounds the text applies. In the headers of those columns: “CG” designates “compressed gas”, “LG” designates “liquefied compressed gas”, and “L” designates “liquid”. Where there are no such columns, the material applies to all of the flammable silicon compounds included in the Scope of this document.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document is not intended to apply to facilities of gas manufacturers or distribution companies or to operations in those facilities.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets
SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S10 ¾ Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 ¾ Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 ¾ Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
4.2 ASME Standard[1]
ASME B31.3 ¾ Standards for Pressure Piping ¾ Process Piping
4.3 Compressed Gas Association[2]
CGA G-13 ¾ Storage and Handling of Silane and Silane Mixtures
CGA P-20 — Standard for the Classification of Toxic Gas Mixtures
CGA P-23 ¾ Standard for Categorizing Gas Mixtures Containing Flammable and Nonflammable Components
4.4 ISO Standards[3]
ISO 10156 ¾ Gases and gas mixtures -- Determination of fire potential and oxidizing ability for the selection of cylinder valve outlets
ISO 10298 — Determination of toxicity of a gas or gas mixture
4.5 National Fire Protection Association (NFPA) Standards[4]
NFPA 1 — Fire Code
NFPA 70 — National Electrical Code (NEC)
NFPA 318 ¾ Standard for the Protection of Semiconductor Fabrication Facilities
4.6 US Code of Federal Regulations
29CFR 1910.1200[5] ¾ Hazard Communication (OSHA)
4.7 EU Directive
Pressure Equipment Directive 97/23/EC
4.8 Other Documents
ASTM Manual, MNL33 “Manual on Chlorosilane Emergency Response Guidelines”
FM Global Property Loss Prevention Sheets 7-7R “SEMICONDUCTOR FABRICATION FACILITIES”[6]
High Pressure Gas Safety Law[7]
The High Pressure Gas Safety Institute of Japan (KHK), Application Guide for the High Pressure Gas Safety Law[8]
NIOSH Pocket Guide[9]
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Refer to the Terminology defined in SEMI S2 except for terms specified below.
5.2 Abbreviations and Acronyms
5.2.1 ESOV ¾ Emergency Shut Off Valve
5.2.2 IDLH ¾ Immediately Dangerous to Life and Health
5.2.3 MAWP ¾ Maximum Allowable Working Pressure
5.2.4 MOP ¾ Maximum Operating Pressure
5.2.5 MSDS ¾ Material Safety Data Sheet
5.2.6 PTFE ¾ Polytetrafluoroethylene
5.2.7 TLV® ¾ Threshold Limit Value for a chemical substances in the work environment adopted by ACGIH® (TLV® is a registered trademark of the American Conference of Governmental Industrial Hygienists.) [SEMI F6]
5.2.8 TWA — Time Weighted Average
5.2.9 VMB — Valve Manifold Box
5.3 Definitions
5.3.1 abatement system — a system used to modify the effluent from a process in order to reduce emissions of hazardous materials to levels that do not present unacceptable risk.
5.3.2 bulk ¾ able to contain 454L (volume of 0.5 US tons of water) or more.
NOTE 2: The volume is of the container, not the volume of gas or liquid.
5.3.3 carriage ¾ a hand cart for carrying one or two gas cylinders.
5.3.4 chlorosilane ¾ any substance designated in Table 1 as being corrosive.
5.3.5 compressed gas— a gas that exerts a gauge pressure of 200 kPa (29.0 psig/43.8 psia) or greater at 20 °C (68 °F).