Press RELEASE
Active control of IBS processes
in the near future
Highly precise and stable surface coatings are utterly necessary for many applications, whether for eyeglasses, or for optics for lasers or telescopes. The project PluTO created a basic understanding of plasma-based coatings. The aim of the project PluTO+ is now to transfer these to industrial applications. For this, the Laser Zentrum Hannover e.V. (LZH) is working on controlling ion beam sputtering (IBS).
Up to now, IBS processes, in comparison to magnetron processes for example, could only be guided by using set parameters, but without online control. Fundamental knowledge of the influence of plasma parameters was missing. For this reason, the Process Development Group of the LZH investigated how exactly IBS coating processes work, within the framework of the joint project PluTO (Plasma and optical technologies). For example, they were able to quantify the ions of sputteredmaterials separately from the background plasma. Furthermore, they could analyze in detail the reactive processes on the target surface. With this knowledge, they were able to develop new strategies to decisively improve the quality, reproducibility and exploitation of IBS processes.
Simulation of the process beforehand
Additionally, the scientists developed a new, versatile tool for describing layer condensation. This tool can be used to simulate processes on an atomic level, so that in the future it is possible to adapt the parameters to the demands of deposition processes, for example for the stoichiometry, thickness or roughness of the layers.
In the recently started follow-up project PluTO+, information from the project PluTOareto be transferred into industry. For this, the LZH has developed control sequences for the IBS process. In combination with innovative plasma diagnostics, it would be possible to follow the course of a process online, to make predictions, and accordingly intervene in these processes. This would make the coating processes more precise, more stable and faster andthus less expensive.
In the collaborative project PluTO, five research organizations in the fields of plasma technology and optical thin-film coating technology have worked on gaining basic knowledge on plasma supported coating processes. The PluTO+ network consists of four research institutes and eight industrial partners under leadership of the BühlerAlzenau GmbH. Both PluTO and PluTO+ have been funded by the German Federal Ministry of Education and Research.
There are three figures for this press release.
Caption figure 1: IBS coating equipment with process controls. Photo: LZH
Caption figure 2: IBS process with two ion sources in use. Photo: LZH
Caption figure 3: IBS coating unit with process analyses. Photo: LZH
Laser Zentrum Hannover e.V. (LZH)
As an independent, non-profit research institute, the Laser Zentrum Hannover e.V. (LZH) stands for innovative research, development and consulting. The LZH is supported by the Lower Saxony Ministry for Economics, Labour and Transport and is dedicated to the selfless promotion of applied research in the field of photonics and laser technology. Founded in 1986, over 170 employeesare now working for the LZH.
The focus of the LZH lies on the fields of optical components and systems, optical production technologies, and biomedical photonics. Interdisciplinary cooperation between natural scientists and mechanical engineers makes innovative approaches to challenges from the most different areas possible: from the development of components for specific laser systems to process developments for the most diverse laser applications, for example for medical technology or lightweight construction in the automotive sector. Seventeen spin off companies have emerged from the LZH up to now. Thus, the LZH has created a strong transfer between fundamental science, application oriented research, and industry.
Editing:
Dipl.-Biol. Lena Bennefeld| Marketing & Communications | +49 511 2788-238 |
Laser Zentrum Hannover e.V. | Hollerithallee 8 | 30419 Hannover, Germany |+49 511 2788-0 |