NATIONAL INSTITUTE OF TECHNOLOGY, ARUNACHAL PRADESH
(Established by Ministry of Human Resources Development, Govt. Of India)
Yupia, District Papum Pare, Arunachal Pradesh – 791112
Fax: 0360 – 2284927, E-mail:Course Plan for B. tech (Electronics & Communication Engineering)
Exercises Proposed for teaching in (Jan – May, 2016 Semester)
1. Name of the Teacher : Santanu Maity
2. Department : ECE
3. Course Title : RF & MEMS
4. Course code : MCC 924
1. Course Hands out (in reference to framed & approved syllabus) (maximum 500 words)
Sl. No. / Contents / Hour1 / Introduction: Micro sensors and MEMS, Evolution of Micro sensors & MEMS, Micro sensors & MEMS applications, Bulk Micromachining: wet etch-based, dissolved wafer process, SOI MEMS, Scream, Hexsil MEMS, sealed cavity deep RIE, Process Integration: interleaved, MEMS-first, MEMS-last, bonded integration, wafer-to-wafer transfer, fluidic assembly. / 10
2 / Mechanics of Materials for MEMS: stress, strain, material properties, measurement & characterization of mechanical parameter. Microstructural Elements: bending moment and strain, flexural rigidity, residual stress, boundary conditions, spring combinations. / 10
3 / Energy Methods I: application to clamped-clamped beam under axial load. Energy Methods II: resonance frequency determination, free-free beam, disk, ring, lumped-element mechanical equivalent circuits / 8
4 / Phase-locked loops, low voltage frequency synthesizers, printed circuit board design for RF applications. Antennas and signal propagation, design of an on-chip antenna.RF filters, oversampling (Sigma Delta) A/D converters, impact of substrate noise and other mixed-signal IC issues.RF/Analog integrated circuit design based on high frequency BiCMOS technology. / 12
2. Books/Literature to be followed:
(a) Books (Min. 2 texts + 3 references)
(i) Title MEMS and Microsystems: design and Manufacture
Author Tai-ran Su
Publisher Tata McGraw Hill
Edition 3rd
(ii) Title Micromachined Transducers Sourcebook
Author Gregory T. A. Kovacs
Publisher WGB/McGraw-Hill,2000
Edition 2nd
(iii) Title Fundamentals of Microfabrication
Author M. Madou
Publisher CRC Press, 2002
Edition 3rd
(iv) Title Silicon micromachining
Author M. Elwenspoek & H. Jansen
Publisher Cambridge, 1998
Edition 2nd
(v) Title Microsystem Design
Author S. Senturia
Publisher Kluwer Academic Publishers, 2001
Edition 2nd
(b) Magazines/Journals (Minimum 5)
1. IEEE Magazine for Consumer Electronics
2. I-Micronews
3. Magazine on Solid state Technology
4. MEMS‘ Trends: Magazine on MEMS technology and Markets
5. CMM internationals
(C) JOURNALS:
1. IEEE journal of Micro-electromechanical Systems.
2. Journal of Micro / Nanolithography, MEMS and MOEMS
3. Journal of Microlithography, Microfabrication, and Microsystems
4. Microsystems Technology
5. Microfluidics and Nanofluidics, Springer
6. IEEE International Conference on Solid State Sensors and Actuators Transducers
7. Mode of Teaching: J.C Bose/S. N. Bose (please tick).
8. If the course is of practices, list the experiments to be offered.
Are the manuals ready for the experiments to be conducted?
Yes/No (please tick)
If “No”, the reasons there of and fixing responsibility
______
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Remarks/ Endorsement by the HoDWith his /her signature with date / Name of the Teacher: Santanu Maity
Designation: Assistant Professor (ECE)
Signature with Date: