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Background Statement for SEMI Draft Document 5193
REVISION TO SEMI C46-0306, GUIDELINE 25% TETRAMETHYLAMMONIUM HYDROXIDE
with title change to: GUIDELINE FOR 25% TETRAMETHYLAMMONIUM HYDROXIDE
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background
SEMI C46 is due for 5-year review. As a result of the review process, this ballot proposes minor changes for consistency with other SEMI Standards on liquid chemicals. These changes are marked by strikethrough for deletions and underlines for additions.
Review and Adjudication Information
Task Force Review / Committee AdjudicationGroup: / Analytical Methods TF / NA Liquid Chemicals Committee
Date: / Tuesday, April 3, 2012 / Tuesday, April 3, 2012
Time & Timezone: / 10:00 AM to 12:00 Noon, Pacific Time / 1:00 PM to 4:00 PM, Pacific Time
Location: / SEMI Headquarters / SEMI Headquarters
City, State/Country: / San Jose, California / San Jose, California
Leader(s): / Frank Parker (ICL) / Frank Flowers (FMC)
Frank Parker (ICL)
Standards Staff: / Michael Tran (SEMI NA)
408.943.7019
/ Michael Tran (SEMI NA)
408.943.7019
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.
SEMI Draft Document 5193
REVISION TO SEMI C46-0306, GUIDELINE 25% TETRAMETHYLAMMONIUM HYDROXIDE
with title change to: GUIDELINE FOR 25% TETRAMETHYLAMMONIUM HYDROXIDE
1 Purpose
1.1 The purpose of this document is to providea guidelines for a grades of 25% tetramethylammonium hydroxide for which a need has been identified.
2 Scope
2.1 The scope of this document lists the proposed impurity limits of 25% tetramethylammonium hydroxide used in the semiconductor industry.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards and Documents
4.1 SEMI StandardsNone
SEMI C1 — Guide for the Analysis of Liquid Chemical.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 None.
6 Physical Propertiesy(for information only)
6.1 Not applicable
Table 1Properties for 25% Tetramethylammonium Hydroxide
Chemical Formula / (CH3)4-N-OHCAS number / 75-59-2
Molecular weight / 91.15
7 RequirementsSuggested Values
7.1 The suggested valuesrequirements for 25% tetramethylammonium hydroxide for Tier A are listed in Table 12.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 Tier A Procedures
13.1 Standardized test methods are being developed for all parameters at the purity levels indicated. Until standardized test methods are published, test methodology shall be determined by user and producer. The Liquid Chemicals Committee considers a test method to be valid only if there is a documented recovery study showing a recovery of 75125%. Recovery is for a known sample spike at 50% of the specified level.
14 Tier B Procedures
14.1 This section does not apply to this chemical.
15 Tier C Procedures
15.1 This section does not apply to this chemical.
16 Tier D Procedures
16.1 This section does not apply to this chemical.
Table 2Suggested values Impurity Limits and Other Requirements for 25% Tetramethylammonium HydroxidePrevious SEMI Reference # / C7.14-91
Tier A
(Guideline)
Assay (wt %) / 25.0 ± 0.1
Carbonate (as CO3−2) / 300 ppb max
Total Halides (as Cl−1) / 5 ppb max
Color (APHA) / 10 max
Aluminum (Al) / 10 ppb max
Antimony (Sb) / 10 ppb max
Arsenic (As) / 10 ppb max
Barium (Ba) / 10 ppb max
Boron (B) / 10 ppb max
Cadmium (Cd) / 10 ppb max
Calcium (Ca) / 10 ppb max
Chromium (Cr) / 10 ppb max
Copper (Cu) / 10 ppb max
Iron (Fe) / 5 ppb max
Lead (Pb) / 10 ppb max
Lithium (Li) / 10 ppb max
Magnesium (Mg) / 10 ppb max
Manganese (Mn) / 10 ppb max
Nickel (Ni) / 10 ppb max
Potassium (K) / 10 ppb max
Sodium (Na) / 10 ppb max
Tin (Sn) / 10 ppb max
Titanium (Ti) / 10 ppb max
Vanadium / 10 ppb max
Zinc (Zn) / 10 ppb max
Particles in bottles:
size, #/mL / #1
#1 Due to the limitations of current particle counters, particle size and number are to be agreed upon between supplier and user. See SEMI C1, ‘Calibration and Measurement Method for Particles in Liquids’.
NOTICE:Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.
By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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