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Background Statement for SEMI Draft Document 6157

Reapproval of SEMI G23-0996 (Reapproved 0811)

TEST METHOD FOR INDUCTANCE OF INTERNAL TRACES OF SEMICONDUCTOR PACKAGES

NOTICE: This Background Statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this ballot.

NOTICE: For each Reject Vote, the Voter shall provide text or other supportive material indicating the reason(s) for disapproval (i.e., Negative[s]), referenced to the applicable section(s) and/or paragraph(s), to accompany the vote.

NOTICE: Recipients of this ballot are invited to submit, with their Comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, ‘patented technology’ is defined as technology for which a patent has been issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

SEMI G23-0996 (Reapproved 0811) is due for 5 Year Review, being proposed for reapproval because they are currently used widely. This process is required by the SEMI Regulations to ensure that this standard is still valid.

The ballot results will be reviewed and adjudicated at the meetings indicated in the table below. Check Standards Calendar for the latest update.

Review and Adjudication Information

Task Force Review / Committee Adjudication
Group: / 5 Year Review TF / Assembly & Packaging JapanTC Chapter
Date: / TBD / Monday, July 24, 2017
Time & Time zone: / TBD / 14:00–17:00 [JST]
Location: / TBD / SEMI Japan office
City, State/Country: / TBD / Tokyo, Japan
Leader(s): / Kazunori Kato (AiT)
Masahiro Tsuriya (iNEMI) / Kazunori Kato (AiT)
Masahiro Tsuriya (iNEMI)
Standards Staff: / Chie Yanagisawa (SEMI Japan)
81.3.3222.5863 / / Chie Yanagisawa (SEMI Japan)
81.3.3222.5863 /

This TF meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone:408.943.6900

hb khghgh1000A6157

SEMI Draft Document 6157

Reapproval of SEMI G23-0996 (Reapproved 0811)

TEST METHOD FOR INDUCTANCE OF INTERNAL TRACES OF SEMICONDUCTOR PACKAGES

According to the SEMI StandardsProcedure Manual, a reapproval Letter Ballot should include the Purpose, Scope, Limitations, and Terminology sections, along with the full text of any paragraph in which editorial updates are being made.

Voter requests for access to the full Standard or Safety Guideline must be made at least three business days before the voting deadline. Late requests may not be honored.

1 Purpose

1.1 This Test Method describes the measurement method for the inductance of internal traces of semiconductor packages.

2 Scope

2.1 This Test Method is applicable for the measurement of package inductance that is greater than 0.5nH.

2.2 This Document describes the measurement of a pin grid array, one of the package types, as a sample.

2.3 This Test Method is also applicable to other types of packages.

2.4 The inductance in this Document is limited to that of internal traces only and does not contain the portions contributed by the exposed areas such as pins and wires.

2.5 This Document uses SI units.

NOTICE:SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 It is not practical to apply this Test Method for fine-pitch packages where traces or pads (point A of Figure1) cannot be connected to with two probes.

4 Referenced Standards and Documents

4.1 None.

5 Terminology

5.1 Definitions

5.1.1 internal inductance (of packages)—inductance of the circuit that comprises the signal path starts from the shoulder or in the center of the outside lead (point A of Figure1) and ends at the end of the lead on the cavity side of the lead (point B of Figure1). The return path is made by tying all other traces (except for the target trace in the same electric potential) together. The target trace is tied to the return path at the bonding finger (see Figure2).

Figure 1
Internal Inductance Measurement

Figure 2
Concept of Internal Inductance

5.2 four-point probe—the probe consists of four coaxial measuring terminals, Hc (current high), Hp (potential high), Lc (current low) and Lp (potential low), to measure impedance. Independent coaxial cables are used between the package being measured and the measurement instrument to minimize the effect caused by mutual inductance (between terminals) and/or interferences from the measured signals (see Figures3 and 6).

NOTICE:SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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