Vacuum System Research Student Handout

1.  Function List: A) Generate a list of functions of a generic vacuum system. B)Generate a list of functions of our vacuum system (whole class together with instructor)

Pump down / Vent / Measure pressure / Maintain pressure at set-point
ELL / ? / ? / ? / ?
Process Chamber / ? / ? / ? / ?

2.  Component research: Physically examine one subsystem of the vacuum system—ELL, XLL, or the process chamber (no need to do ELL if XLL is done). (Do not reference any schematics in the manuals. Just inspect by eye.) By doing so, identify the components of the subsystem, their locations, and their purposes. Study one subsystem at a time but complete study of one load lock and the process chamber at the end. While studying the components, map them out on a diagram, indicating the various pumps, gauges, chamber, valves, pipes, fittings and so on and how they are connected together.

3.  Function Research: Based on results from component research, put together the functions of the individual components to answer the question “How does this subsystem achieve the functions listed in function list.

4.  Safety: De-energize your tool before crawling under the tool to do research. Lock-out and Tag-out. Only use an energized tool when you want to observe how certain functions are performed by the tool. (for example, how the etcher vent the ELL).

5.  Divide students into groups. Each group work on an etcher.

6.  Report:

1)  Individual written test.

2)  Individual oral reporting and line tracing: One group to come to the instructor at a time. Come with your diagram showing the various pumps, gauges, chamber, valves, pipes, fitting and so on and how they are connected together. Student can use the diagram while reporting. One student to report to the instructor at a time. Instructor will pick one subsystem out of the three, for example the ELL. Each student will be responsible for answering questions about one part of the subsystem. The group together will complete reporting on one subsystem. Instructor will ask students the following questions concerning system components: While pointing to a component on the etcher, ask “What is this component?” (This is a valve) “What does this component do? (It isolates the ELL from the vacuum pump.) Or the instructor may choose to point to a symbol on the diagram and ask “Where is this component?” Instructor should also ask students questions concerning the functions of the subsystem listed in Functions research part 1: “How do these components we just went over together accomplish the functions of this subsystem?” For example, “How does the ELL pump down?” (It utilizes this hole in the ELL chamber to connect to the pump. The hole is connected to this pipe down here. It is then connected with this valve which isolates the ELL from the pump, etc. And this how the ELL can be pumped down.) Your instructor will go over the answer with the whole class.

3)  Group report: Include your answer to what functions each chamber can perform in this table.

Pump down
(Y/N) / Vent
(Y/N) / Measure pressure
(Y/N) / Maintain pressure at user set-point
(Y/N)
ELL
Process Chamber

Also include a diagram specified above for each system you studied.