Start-up Operating Instructions for the Sirion SEM
Warnings
Always adjust your specimen height before closing chamber door to make sure your specimen will not hit the bottom of the lens; see instructions.
Do not tilt your sample beyond ±3º without explicit permission or authorization from the trainers/lab managers.
Do not put magnetic samples into the microscope without the same explicit authorization.
Failure to follow these warnings could result in serious damage to the lower lens with a $70,000 replacement cost
The SEM is normally left with the vacuum system on, the field emission gun (FEG) on, the high voltage or tension (HT) hardware button on, but the kV "off" in the software: on the hardware panel under scope: "stby", "off", "HT", "vac" buttons are all lit.
Start-up
1. The SEM is normally left with the vacuum system on, the field emission gun (FEG) on, the high voltage or tension (HT) hardware button on, but the kV "off" in the software.
Check the hardware panel under the scope: "stby", "off", "HT", "vac" buttons are all lit.
2) Log into Badger; enable the Sirion SEM.
3) The right monitor should be powered up now; check the CCD camera is showing a live image of the interior of the chamber.
4) Load the sample: in right hand vacuum window choose "vent", then venting "OK". Venting takes about 2 minutes until the front door of the microscope can be opened.
5) When inserting the sample:
a) wear gloves
b) adjust sample height to 5 mm from the lens using only the manual knob – clockwise to raise (use eucentric height adjuster, a.k.a. “elephant ear”, to measure).
c) REMOVE THE ELEPHANT EAR FROM THE CHAMBER!
d) Turn on the “Videoscope” by clicking icon on upper left of screen.
e) Close the chamber door slowly and carefully while watching the CCD camera. The sample will likely be a fair bit below the upper dashed line at this time; close the door fully provided this is the case.
f) Adjust the z knob to bring the highest point on the mount to the top dashed line.
g) Do not change z anymore – not with manual control, nor with computer control, without EXPLICIT permission from a trainer.
6) While applying gently pressure to the pull bar, click “pump" in the RH vacuum window. Wait for a slow 3-count, then check that the door is sealed by tugging on the pull bar gently. Wait until "Vac OK" message appears directly under "pump" command, about 2 min. The chamber should be at or below 1.2x10-4 mbar.
7) Click on "x kV" button in RH Beam window to turn on the high voltage.
IMPORTANT: The "Microscope Confirm focus" pop-up window opens on the image screen - do not click "OK" on this window until you obtain an image and focus as instructed (see following). This tells the computer how far your sample is from the lens.
8) Choose “SE detector” in the "Detectors" menu. Choose TV scan rate if it is not already there. Focus on whatever is in front of you. Go up to 5,000x to 8,000x mag and focus again. Click "OK" on the pop-up window to calibrate Z to WD.
If you do not see an image, check to ensure the beam blanker is not on (“eclipse” button is not lit), then click "ACB" (automatic contrast and brightness).
9) Proceed with your sample. Typical imaging parameters are 5 kV, spot size 3, and working distance around 5 mm.
10) To obtain a good image you must stigmate and focus the image well. If the image moves noticeably when changing focus, then the lens alignment should also be performed (see a trainer if you don’t know what this means).
Shutdown
1) Make sure you are not in UHR or EDX mode. Reduce the magnification in HR mode to minimum.
2) Make sure your tilt is at 0º.
3) Re-center your specimen holder (set x and y to 0).
4) Clear the stage position table, the databar legend, and reset anything else you may have changed back to default.
5) Turn off high voltage by clicking on "kV" command in the RH Beam window.
6) Choose "CCD" detector.
7) Vent the chamber and remove your sample.
8) Pump chamber down again; make sure you obtain "vac OK" status before leaving.
9) Clean up the area.
10) Log out of Badger.
SEM Startup Checklist
Enable via Badger / Log in at the beginning of the sessionCCD Camera / Make sure it is on
Vent chamber / 2 to 3 minutes to reach atmosphere
Gently open door / Use push handle only
Insert sample into specimen mount / Gloves must be on with chamber door open
Check height with elephant ear / Adjust z knob appropriately such that the highest point is at or below 5 mm
REMOVE ELEPHANT EAR
Turn on Videoscope
Close door gently; check height / Use push handle only. Check that the tallest portion is at or below the top dashed line
Pump down chamber, applying pressure to ensure complete seal / Check after a couple seconds by gently tugging on the door. It should stabilize below 1.2x10-4 mbar
At ‘Vac OK’, turn on beam / Get a live image with the SE detector; Microscope Confirm Focus dialog box appears
Focus at 5,000X to 8,000X
Click ‘OK’ to confirm focus / Check that Z has been linked to WD
REMINDERS:
NO Z-height adjustment after the chamber is at vacuum…
NO bulk magnetic samples…
NO carbon sticky tabs…
NO tilting beyond ±3º…
…without explicit permission from a trainer