SHINE ATE Regional Center – NSF DUE# 1204279
Number:_____06______
WORK INSTRUCTION BREAKDOWN SHEET
Operation:Profilometer Operations
Instrument:BrukerDektakXTProfilometer
A logical segment of the operation when something happens to advance the work. / [1]Anything in a step that might—
- Make or break the job
- Injure the worker
- Be a Cultural Consideration
- Make the work easier to do, i.e. “knack”, “trick”, special timing, bit of special information
2D Scans
Click on the “Measurement Setup” tab if it is not already selected. /
For 2D scans, the “Standard Scan” option should be selected under the scan type. /
The range height should be selected from the four different options available. /
Under profile, three options are available: Hills, Valleys, and Hills & Valleys.
/
- The Hills setting assumes that our starting position is the lowest point on the sample, and every point afterwards will be assumed to be higher than the starting point.
- The Valley setting assumes that the starting point is the highest point on the sample, and every point afterwards will be lower than the starting point.
- The Hills & Valleys setting will record areas that are both higher and lower than the initial starting point.
- NOTE: The Hills and Valleys setting should almost always be selected first, as it is often difficult and time consuming to ascertain the comparative height of an initial starting point.
Ensure stylus type 2 is selected. / The stylus type should remain unchanged unless a new tip size is installed.
The stylus force should normally remain unchanged at 5mg. / Per the service representative, forces of 10mg should not harm most samples.
/ Prior to service, interference in the joint that moved the stylus was sticking, and would not correctly register what force was applied to the stylus. This caused the tower down button to have to be pressed multiple times before the stylus would touch the surface, and larger than usual forces were needed.
Ensure speed is set to Medium in the Instrument Control section. / Features of interest should be aligned parallelly to the stylus arm. For ease of use, the speed sitting should initially be set to the medium speed, and later changed to theslow speed to speed up movement.
Note that changes to the angle of the sample will also require a change in location to maintain the original starting point.
Change speed per desired accuracy or level of control.
The sample should be aligned so that the profilometer runs perpendicular to the desired step height locations. / / If the sample is crooked, or slightly off of perpendicular from the stylus run direction (up and down), then the operator would not have straight or accurate step height values in the analysis review.
Adjust the duration of the scan. / The profilometer is a rastering scan method that takes data one line at a time.
/ This is done in order to maintain a quality resolution in a reasonable time.
Click the wand button under the measurement options. / / This is done, when the Operator is ready to specify the desired scan area.
Use the instrument control to move the tip to the bottom right corner of the scan, and select the next button. / Note that the start location is the center of the red crosshairs, and not the shadow of the stylus tip. /
Use the instrument control to move the tip to the top left corner of the scan, and select the done button. /
The Operator can perform scans in two modes. Perform ONE of the following two steps:
To make one pass over the features of interest, select the “Single Acquisition” button on top. Enter “1” in the Advanced drop down menu. /
For multiple passes over each line (and to obtain an average of the results) choose the choose the number of desired passes under Advanced options. Click the “Measurement” button. / The default measurement number is “10”. /
After the scan is completed, click the “Data Analysis” tab to review the results of the scan. /
2D Data Review
The Operator will often have data that is not perfectly level; although usually not as bad as the sample on the right. This sample was taken before the calibration; the Operator should not have to adjust the stage leveling pins unless recalibrating the machine. /
To level sample (only if necessary), move the M and R bars over to different level areas. Expand the width of the M and R bars to include a larger area than just one point as shown at the right. Within the Data Analyzer, click “Terms Removal (F-Operator)”. When ready, right click, and select the “Level – Two Point Linear” option. /
The Operator can also set the “R” cursor area to represent the zero axis by right clicking to select the “Zero Height at R Cursor” option. /
Analyze step height using the bottom of the data analysis tab. / This is done by clicking on, holding and dragging the R and M cursors to the top and bottom of a step; the difference (Δ) is displayed in Angstroms (Å). See image below. / R and M can be switched which will just give a negative number, but the same overall difference in step height. Again, it is best to include a range of R and M values as there is often variation among the levels.
The dataset can be saved to be opened in Vision 64 later under the save Dataset option. /
Right clicking on the graph allows the data points to be exported into an excel file (CSV). Select “Export Data”. /
The image of the graph can be saved by clicking “Copy to Clipboard” and saved as a bitmap option. /
To load a new sample, or to remove the existing sample, click on the measurement setup tab, and select either load or unload sample. /
3D Scans
To run a 3D scan, select the “Map Scan” option from the scan type option. /
In the Advanced Options Dropdown, change the number of measurements. It is best to set this number to 1. 3D scans can take much longer than 2D scans, and so having more than one measurement can greatly increase the time taken.
Under the 3D map option, click on the wand icon to set the left and right bounds on the scan. Select the wand under the measurement options tab; make sure that the stylus does not run off the sample. (Remember Warning above for more information about how to avoid tip damage. /
Move the stylus to the bottom right edge of the scan and click Next. /
Move the stylus to the top left edge of the scan, and click Done. /
Under the 3D map option, the Operator can adjust the map resolution to adjust the number of traces and time of scanning. See image below. / The scan duration under measurement options should also be changed depending on the length of traces. / A good way to estimate the total scan time is to multiply thenumber of traces by the scan duration.
Click Measurement button to start the scan.
3D Map Review
3D images can be viewed under the Data Analysis Tab. /
Data can be saved using the same save features as the 2D scan.
Adapted from Graupp, P. & Wrona, R. (2006) The TWI Workbook: Essential Skills for Supervisors. New York, NY. Productivity Press.