STANDARD OPERATING PROCEDURES (SOP)
DC Sputter Coater

You may not use this machine without documented training on record with the Lab Manager.

V5.15.2016 Lee Farina

Safety glasses must be worn at all times in work areas.
/ Nitrile gloves must be worn while operating this machine

V5.15.2016 Lee Farina

POTENTIAL HAZARDS

Compressed Gases – Compressed gases present a physical hazard if cylinder ruptures or gas released uncontrollably. In addition, the particular gas may have additional associated hazards.
Electrical Hazards – Hazardous Voltages, Non Ionizing Radiation and Arc Hazards are present during operation do not bypass any safety features or remove any equipment covers
Hazardous Product Residues – Small quantities of hazardous products may remain on surfaces in vacuum chamber, wear gloves and use tweezers when handling substrate or touching surfaces inside the vacuum chamber.
Toxic Materials –Coating compounds, including but not limited to; copper, chrome gold and titanium, present a toxic hazard if handled improperly.
OPERATIONAL SAFETY RULES
1.  Only trained authorized users can operate this equipment.
2.  Never modify any system parameters.
3.  Never leave the room when the DC Sputter Coater is running.
4.  Wear nitrile gloves when handling samples or chamber interior.
5.  Only use previously approved gas combinations and recipes.
PROCEDURE
*****Log your usage****
1.  Turn on the Argon gas by turning the valve at the cylinder all the way open, then back off ¼ turn. Be sure not to touch the regulator valve, the pressure should be at 10-15psi.
2.  Pull out and twist the EMO button.
3.  Turn on the power.
4.  Open the Chamber door and check all shutters are closed.
5.  Place substrate and close door using the thumbscrew, but do not tighten thumbscrew.
6.  Turn on the Roughing pump while holding the chamber door tight. Release the door when the pump quiets down.
7.  Turn on the Turbo pump once the Foreline Vacuum displays below 700mTorr.
8.  After the Chamber Vacuum is below 5.00mTorr, turn on the Argon gas for a while and then turn it off. Do this several times to purge the ambient air inside the chamber.
9.  Turn on the Chiller.
10. Choose DC power. 200 watts should be used under normal circumstances.
11. Set the timer and power, using the figures found in preparation step for the run.
12. Turn on the stage rotator.
13. Turn on gas and adjust flow rate to be 20ccm
14. Wait for the Chamber Vacuum pressure to drop between 3 and 40mTorr (recommended 20mTorr)
15. Use “Timer Reset” switch to start the sputter.
-Pre-Sputtering is only necessary for those targets that oxidize such as Copper, Chromium, or Aluminium. In these cases, start the timer and run the shutter over the target for 15-30 seconds.
16. Move the shutter to expose sample.
17. If the plasma does not light and the timer is counting down, inform instructor.
18. Run the sample through.
19. Turn off shutter. (Use a flashlight if you cannot see through the window)
20. Turn off gas.
21. Turn off rotation.
Running second layer:
22. After timer has expired, switch power to RF. Make sure RF power supply is off.
23. Switch power cord to second gun.
24. Switch power back to DC.
25. Update settings for new run.
26. Repeat Steps 10-21 for DC Sputtering.
End of Run
1.  Turn off turntable and make sure all shutters are closed.
2.  Turn off gas with the switch first. Then turn off the gas at the cylinder.
3.  Turn off turbo.
4.  Turn off chiller.
5.  Wait for turbo to spin down (wait at least 10 minute, you can tell by the sound) and turn off roughing pump.
6.  Turn off main power (EMO button)
7.  Wait for vacuum to clear until opening chamber to remove substrates.
8.  Remember to log your activity.
Cleaning Procedure
1.  Retrieve a new garbage bag.
2.  Make sure the machine is completely off.
3.  While wearing nitrile gloves, remove the aluminium foil on the inner walls of the vacuum. Avoid bumping the guns and shutters.
4.  Immediately dispose foil into garbage bag. Seal bag and dispose in lab trash bin.
5.  Wipe down the inside of the vacuum with an isopropyl alcohol wipe.
6.  Line inner surface of vacuum with new Aluminium foil using kapton tape.

V5.15.2016 Lee Farina