EE 432/532

PMOS lithography and diffusion – CyMOS process

March 7, 2016

Group 1

Clark Kent

Peter Parker

Natasha Romanoff

Bruce Wayne

Lab instructor – Jack Kilby

  1. Overview
    Write an overview or synopsis of the goals of this lab and the work done to form the PMOS source & drain regions. (Should be more than two sentences but shorter than one page.)
  2. Photolithography
    Summarize the steps for patterning and etching using the second mask.
  3. Boron deposition and drive
  4. Describe briefly the purpose and the process for the standard clean of the wafers, which was done before each of the deposition and drive steps.
  5. Describe briefly the boron deposition process. (Use the manufacturer data sheets to provide some of the background information about performing boron depositions using the solid-source wafers.) The results of your diffusion calculations should be included here. (You should note that the deposition step was done for your group by the lab instructors.)
  6. Describe in detail the boron drive process, including the LTO. (Use the manufacturer data sheets to provide some of the background information that helps explain the purpose of each step.)
  7. Results
    Include the photographs taken during the photolithography. List the expected dose, junction depth, surface concentration, etc. from your diffusion calculations. You can include a graph of the expected boron profile. (PMOS diffusion sheet resistance will be measured later.) Discuss any problems that you may have encountered during the processing.
  8. Appendix
    Put the calculation details here. Also, attach a copy of the completed PMOS lithography and PMOS diffusion pages of the process traveler.

Comments

1.Use the template to structure your report, if you’d like. However, if you can use a different format, if you prefer.

2.You can steal figures from the lab notes and class notes to use in your report – you have my permission. For example, you might want to include some of the little pictures from the process traveler page at each step in the process to help show what it happening or doping profiles from the diffusion calculator spreadsheet.

3.Put some effort into the esthetics of the report.

a.Number the pages.

b.Use your best English. (Usually one person does the initial draft and everyone else helps edit.)

c.Write succinctly.

d.Be consistent with fonts and headings and adjust the margins and spacings so that things are neatly arranged.

e.Learn how to do superscripts and subscripts in your word processor.

f.It is not necessary to typeset the equations, but it certainly looks nicer if you do.

g.If you use tables, adjust the cell size and align the rows and columns so that the table looks “nice”.

h.When making graphs, label the axes (include units!) and size the graph to fit in with the rest of the report.

i.Tables and graphs should always have titles (Table x, Figure y) and captions.

4.Grading

a.50 point scale

b.35 points for technical content (Have all results and discussion been included? Are explanations / calculations correct?)

c.15 points for quality of presentation.

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