Multi-target Sputterer – Instructions for use

  • Changing targets (as needed)
  • Bring load lock and main chamber up to atmospheric pressure
  • Close valve to mechanical pump (must be done whenever coupling the two chambers to prevent oil from being sucked into cryopump)
  • Open isolation valve (turbo pump must be at 100% to do this)
  • Turn off turbo pump (must be off to vent chamber)
  • Open hand-operated N2 valve (behind load lock) to bring chambers up to atmosphere (computer regulated so you can’t break anything)
  • Raise main chamber lid using lift. Pivot to one side
  • Remove shield, collar #1 and collar #2 – note the height setting on second collar
  • Replace target and reassemble in reverse order
  • Loading sample
  • Ensure isolation valve is closed, turbo is off, and valve to mech. pump is closed.
  • Open N2 valve to bring load lock to atmospheric pressure while preserving vacuum in main chamber
  • Load sample tray (so sample is at the bottom, face-down).
  • Align mark with shiny spot on loading fork
  • Push on right side of tray and make sure it doesn’t bind on the fork
  • Close N2 valve and close lid to load lock
  • Pump load lock down to equalize pressure with main chamber
  • Turn on and open valve to mechanical pump.
  • Turn on turbo pump and allow rpm to come up to 100%
  • Close valve to mechanical pump
  • Alternate – if chambers were both at ATM, isolation valve should be open during pumping process so both chambers are pumped down
  • Move sample tray into main chamber
  • Ensure sample table is set at red line for loading, valve to mech pump is closed.
  • Open isolation valve and SMOOTHLY crank arm into the chamber
  • Once fully extended, raise table to blue line with top crank.
  • SMOOTHLY crank arm out of chamber and close isolation valve.
  • Continue raising table until ~2mm from top.
  • Deposition
  • Ensure sample is raised to the top of the worm gear atop the chamber.
  • Open valve on Argon tank (against window)
  • Set Argon flow rates in computer (7sccm for Cr)
  • Turn on flow (three buttons, bottom-to-top, use #4)
  • Hit THRough setting on Cryopump and use CAP MAN to monitor Ar flow rate).
  • Turn on appropriate target gun (targets are on magnetized tags and, from top-to-bottom, are #4, #1, #2, #3).
  • Open viewing glass to ensure plasma is being generated
  • Open shutter for desired period of time
  • Close shutter
  • Turn off gun
  • Hit ‘open’ on the Cryopump
  • Turn off Ar flow (three buttons, top-to-bottom)
  • On ‘vacuum’ page, turn off the CAP MAN, which monitors Ar flow rate