INSTITUTE OF MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) ENGINEERING

TEL: 886-6-275-7575 EXT.31390

FAX: 886-6-274-5885

E-MAIL:

Head of the Institute: Hsiao, Fei-Bin

BRIEF INTRODUCTION

The MEMS institute was founded in 2001. The purpose is to support the development and researches in micro-electro-mechanical-system (MEMS). The Institute also offers advanced curricula and training for students as well as industrial personnel who are interested in MEMS and MEMS-related technologies. Since MEMS is highly inter-disciplinary, the Institute is also responsible in strengthening the link between individual professors from different departments and institutes in NCKU. Researches are focused on Bio-MEMS, Optical MEMS, RF-MEMS, and Nano-technology and science.

The Institute now provides M.S. programs and is filing for Ph.D. program currently. In 2001, 7 master's degrees graduate students were enrolled through the entrance examination. A year later, another 22 graduate students jointed in 2002. The Institute is located in the Technology and Science Building in Tzu-Chiang campus of NCKU. The department office is on the floor. The same building also hosts the Common Laboratories of Micro/Nano Research Center, NCKU..

FACULTY

Professors:

Fei-Bin Hsiao / (Ph.D., University of Southern California, USA)
Fluid mechanics, Aerodynamics, Unmanned Aerial Vehicle (UAV) Design and Applications, System of Aerospace, MEMS
Yan-Kuin Su / (Ph.D., National Cheng Kung University)
Opto-electronic Devices, Microware devices, Integrated Optics, Electromagnetic, Electromagnetic Ware
Hsien-Chang Chang / (Ph.D. Electrochemistry Engineering, National Tohoku University of National Tohoku, Japan)
Electrochemistry, Biochemistry, Analysis chemistry, Biomaterial engineering, Tissue Engineering Biomechanics,
Shoou-Jinn Chang / (Ph.D., UCLA, U. S. A.)
Semiconductor Physics , Optoelectronic device
Ching-Hsing Luo / (Ph.D., BME, Case Western Reserve University, USA.)
Biomedical Instrumentation, Instrumentation System Design, Athletic Training Instrumentation, Scientific Aided Devices Implementation for the Disabled, GPS Wireless Communication Monitoring Navigation System
Jen-Fin Lin / (Ph.D., Columbia University )
Tribological Technology, Precision Mechanics, Heat Transfer, Semiconductor Process
Ming-Shaung Ju / (Ph.D., Case Western Reserve University, USA)
Medical Engineering, Control of Nervous and Muscle System, Bio-MEMS, Biomechanics
Min-Hsiung Hon / (Ph.D., North Carolina State University, U.S.A.)
Diffusion, Ceramics, Surface Engineering, Casting.
Chi-Chuan Hwang / (Ph.D. ,Mechanical Engineering, National Cheng Kung University)
Nonlinear Chaos Theory ,Quantum Control ,Semiconductor Fabrication ,Micromechanics ,Knowledge-Based Economy, Bionanotechnology, Bioinformatics, Neuro Science, Optoelectronic Engineering, Thin Film Engineering, Biomedical Engineering, Quantum Information ,Extreme Technology
Shu-Hui Chen / (Ph.D., Michigan State University, USA.)
Chemical Separations, Analytical Chemistry, Capillary Electrophoresis, Bio-Medical Technology, Biochip
Chau-Nan Hong / (Ph.D., Northwestern University)
Chemical Engineering, Electro-Optical Engineering, Metal and Ceramics Material Engineering, Micro-Electric Engineering
Jung-Chun Huang / (Ph.D. University of Illinois-Urbana Champaign)
Solid Experimental Physics, MBE, Surface Science, Thin-Film Magnetism, Nano-Fabrication Technology
Wei-Min Zhang / (Ph.D. Drexel University)
Particle Physics, Condensed Matter Physics, Quantum Information

Associate Professors:

Sheng-Yuan Chu / (Ph.D., The Pennsylvania State University, U.S.A.)
Electronic & Ceramic Materials / Devices, Surface-Acoustic-wave Devices, Nano-optoelectric Materials & Display Devices, Nano-imprinting Technology, Organic Light-Emitting Devices.
Kuo-Shen Chen / (Ph.D., Massachusetts Institute of Technology, U.S.A.)
MEMS, Mechanical Property, Experimental Mechanics, Engine Structure, Precision Design, Structure Control
Yung-Chun Lee / (Ph.D., Northwestern University, U.S.A.)
Experimental Stress Analysis, Nondestructive Evaluation, Ultrasonic Engineering and Application, Excimer laser Micromaching and LIGA Process, Surface Acoustic Device and Sensor, Ultrafast Laser and Ultrasonic for Optical Measurement
Jyh-Ming Ting / (Ph.D., University of Cincinnati, U.S.A.) Thin Film Materials, Nano Carbon Tube, Ultra-high Thermal Conductivity Materials, Materials for MEMS
Jiunn-Der Liao / (Ph.D., Ecole Nationale Superieure Des Mines)
Biomaterial Mechanics, Plasma Chemistry and Process, Application of High-Resolution Synchrotron Radiation, Technology of Molecular Biosensing
Gwo-Bin Lee / (Ph.D., University of California, Los Angeles, UCLA, U.S.A.)
MEMS, Micro Sensors, Micro Actuators, Microfludics, Micro-optics, Nanobiotehchnology
Yu-Cheng Lin / (Ph.D., University of Illinois, U.S.A.)
MEMS, Automation Manufacturing Technology, Biomedical Engineering

Assistant Professor:

Ling-Sheng Jang / (Ph.D., Mechanical Engineering at University of Washington, USA)
LifeChip, Nanobiotechnology, MEMS
Chen-Kuei Chung / (Ph.D., National Tsing Hua University)
MEMS Technology, Microfabrication Technology and Integration, Micro/Nanostructure Material and Process, Semiconductor Engineering, Ink-Jet Printer Technology, Vacuum Technology, Material Analysis
Tzong-Shyng Leu / (Ph.D., University of California, Los Angeles, UCLA, U.S.A.)
MEMS; Microsystem Imaging, Microfluidics, Flow Control
Chuan-Pu Liu / (Ph.D., Cambridge University, England)
Semiconductor Thin Film, Ceramic Thin Film, Electron Microscopic Analysis, IC Processing.
Huei-Sheng Huang / (Ph.D. National Cheng Kung University)
Molecular Pharmacology, Toxicology, Medical Technology

CREDITS REQUIRED FOR GRADUATION

Master Program:

Minimum credits required for graduation: 34

No. of Credits for the Thesis: 6

No. of Credits for Seminar: 4

No. of Credits for the Specialized Courses: no less than 24

Curricula

1.  Introduction to MEMS (3 credits)

2.  MEMS Design (3 credits)

3.  Solid Mechanics and Structure Design in MEMS (3 credits)

4.  System Dynamic Analysis and Control in MEMS and Smart System (3 credits)

5.  Micromechanics (3 credits)

6.  Micro Sensor Design (3 credits)

7.  Materials for MEMS (3 credits)

8.  Excimer laser Micromachining (3 credits)

9.  Bio-MEMS (3 credits)

10. Microscopic Transport Phenomena (3 credits)

11. Molecular Dynamics (3 credits)

12. Micro Tribology (3 credits)

13. Micro Device Fabrication: Experiment (3 credits)

14. MEMS Technology (3 credits)

15. Microfluidics (3 credits)

16. MEMS Packaging (3 credits)

17. Introduction to Nanotechnology (3 credits)

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