Full tank disposalmanual

Eric, VDEC, Mita Lab, 2013/03/28

  • To take care of disposal of waste chemicals, you need the certificate from the ESC (EnvironmentScienceCenter). To get this certificate, you need to follow the ESC safety course and the ESC tour.
  • When the liquid is at less than 1cm of the limit level, the tank should be changed. Never let the level get higher then the dangerous line (危). The following notes describe the procedure to change the tank.
  • When you are not sure about how to complete a manifest slip, you can refer to previously completed slips stored in the files at B1.

1Categories of tanks used in the clean room

1.1Categorie C

Green 10L small tank (HF=hydrofluoric acid=フッ酸, H3PO4=phosphoric acid=リン酸)

1.2Category D

Red 10L small tank (H2SO4=sulfuric acid=硫酸)

1.3Category H

White 10L small tank (ZMD-B=VDEC's MIBK/IPA developer, combustible organics=可燃有機)

1.4Category K VDEC

White 18L large tank (VDEC's chrome etchant)

1.5Category K for outside

The contents of the following tanks must be transferred to a tank labeled " outside B1F"

White 18L large tank (alkaline (TMAH), non combustible organics=難燃有機)

2Common procedures

2.1Print the list of the content of the tank

2.1.1Bring the thank with its protection case near the computer at the entrance of the clean room

2.1.2On the entrance computer, open Microsoft Explorer

2.1.3On the default page click "Waste tank contents print"

2.1.4Enter the bar code of the tank

2.1.5Enter the volume of the tank (10L for the small tanks, 18L for the large tanks)

2.1.6Print the page

2.1.7Proceed (排出処理実行) (ignore the error message)

2.1.8Go back (戻る)

2.2Fill out the manifest slip

  • In the entrance room n˚2, near the PC, there are some manifest slips (5 sheets). It must be filled out with the contents of the tank (those slips can be found also at B1). The percentage of each components has to be calculated.
  • In case of combustible organic tank, the total should be 100% because there is no water. If it is less then 100%, let's increase the quantity of ethanol arbitrary in order to reach 100%. This corresponds to the evaporation losses. Moreover, if the solution is very colored, add the following line: フォトレジスト 0.1％以下
  • For some products, you need to write not the product directly, but its components. You can find the components of the products on a sheet, near the computer or in the annex of this document.
  • Fill out the sheet according to the following model :

2.3Complete and print the PRTR form

PRTR =Pollutant Release and Transfer Register

2.3.1On the PC of entrance room n˚2, open internet Explorer.

2.3.2On the default page there is a form to complete as follow:

部局名(department name): 工学部

排出者氏名: your name as written on the certificate delivered by ESC

排出日 : the date of the next Wednesday

伝票番号 : the manifest slip number

分類 (classification) : C (small green), D (small red), H (small white), or K(big white) 分類

Add a line for each PRTR substances :

政令番号: nothing to fill out here (it will be filled out automatically)

物質名 : choose the name of the substance

数量 : quantity according to the tank volume and percentage of the substance

Press "リストに追加" (add to list).

Click 登録 (registration)

Check the list. Click 送信 (sending) if OK or 修正 (correction) to modify.

2.3.3Click 印刷用PDFダウンロードDownload PDF, open it and print it.

2.3.4Cut the printed sheet in two parts, put the upper part in the blue file

3Disposal of smalltanks: cat. C, cat. D and cat. H

!!! Refer to §5 for photomask developer tank !!!

3.1Print the list of the content of the tank according to §2.1

3.2Move to the dressing room with the tank in its case and the printed form

3.3Open the tank case and bring the tank to the entrance room n˚2 (where there is a computer with a printer)

3.4Fill out the manifest slip according to §2.2

3.5Fill out and print the PRTR form according to §0

3.6Take the lower part of printed PRTR and the manifest slip and go to B1 with the tank

3.7Paste the first sheet of the manifest slip on the side of the tank

3.8Put the last sheet (5th) in the file 工学系研究科

3.9Put the 3 other sheets + PRTR form on the tank (slipped under the handle)

3.10Put the tank in the Takeda cabinet

3.11Take a new empty tank (same kind of tank). Be careful of the label: some are labeled ドラフト other are labeled VDEC. Take the good one. If a manifest sheet is still pasted on the side of the tank, take it off and throw it away

3.12Go back to the dressing room, clean the tank with DI water and put it back into the protection case

3.13At the entrance of the clean room, paste any barcode on the tank. (in the box near the computer)

3.14Bring back the tank to its original position.

4Disposal of largetanks (TMAH or non combustible organics)

4.1Print the list of the content of the tank according to §2.1

4.2Move to the dressing room with the tank in its case and the printed form

4.3In the dressing room, open the tank case

4.4For TMAH tank, no PRTR is needed, you can go directly to §4.9

4.5Bring the tank to the entrance room n˚2 (where there is a computer with a printer)

4.6Fill out the manifest slip according to §2.2

4.7If needed, fill out and print the PRTR form according to §0

4.8Take the lower part of printed PRTR and go to B1 with the tank

4.9Take a large white tank labeled "outside B1F" and transfer the content of the full tank to this empty tank.

4.10If not done yet, fill out the manifest slip according to §2.2

For TMAH tanks, if the pH is not measured, lets fill out 12 and check "その他の産業廃棄物"

4.11Paste the first sheet of the manifest slip on the side of the tank

4.12Put the last sheet (5th) in the file 工学系研究科

4.13Put the 3 other sheets + PRTR form if applicable on the tank (slipped under the handle)

4.14Put the tank in the Takeda cabinet

4.15Take back the empty tank to the dressing room, clean it with DI water and put it back in the protection case

4.16At the entrance of the clean room, throw away the old bar code and paste a new barcode on the tank. (in the box near the computer)

4.17Bring back the tank to its original position.

5Disposal of photomask developer tanks

There is no need to print out the list of the contents, but a PRTR sheet must be filled.

5.1Move to the dressing room with the tank in its protection case

5.2Take the tank out of the protection case and bring it to the entrance room n˚2

5.3In the entrance room n˚2, fill out the manifest slip following §2.2 instructions and according to this model :

5.4Fill out and print the PRTR form according to §0 except for the following entries:

  • 部局名 (department name): 大規模集積システム設計教育研究センター
  • 物質名 (name of the substance) : メチルイソブチルケトン：4-メチル-2-ペンタノン
  • Cut the printed sheet in two parts, put the upper part in the blue file
  • Take the lower part and the manifest slip and go to B1 with the tank
  • Paste the first sheet of the manifest slip on the side of the tank
  • Put the last sheet (5th) in the file VDEC
  • Put the 3 other sheets + PRTR form on the tank (slipped under the handle)
  • Put the tank in the VDEC cabinet (right one)
  • Take a new tank with label VDEC
  • In the dressing room, clean the tank with DI water and put it back into the protection case
  • In the CR, paste any barcode on the tank. (in the box near the computer)
  • Bring back the tank close to it's original place

6Disposal of Chromium etch tanks

There is no need to print out the list of the contents, and not PRTR form is needed.

6.1There is a "temporary" tank almost empty near the waste tank. It is used to put temporarily the evacuation tube that is coming from the machine and going into the waste tank. Open this "temporary" tank and put the tube in it

6.2Close the waste tank. Bring it to the dressing room, still in its protection case

6.3In the dressing room, take the tank out of its case and bring it to B1

6.4Fill out the manifest slip following instruction of§2.2 and according to this model:

6.5Paste the first sheet of the manifest slip on the side of the tank

6.6Put the last sheet (5th) in the file VDEC

6.7Put the 3 other sheets + PRTR form on the tank (slipped under the handle)

6.8Put the tank in the VDEC cabinet (right one)

6.9Take a new empty big white tank, written VDEC, with a label "クロム" (Chromium)

6.10In the dressing room, clean the tank with DI water, put it back in the protection case

6.11Bring back the new tank to the Chromium etching equipment.

6.12Put back the tube in the new tank and close the "temporary" tank.

Annex: List of products and chemicals

The contents of some products used in the clean room are listed here. The chemical names must be filled out in Japanese on the manifest slip. The chemicals needing PRTR document are colored in yellow and the percentage above which PRTR is needed is indicated.

Product name / Chemical name (Japanese) / Chemical Name (English) / Ratio (%) / PRTR
ZED-N50 / N－アミルアセテート / n-Amyl Acetate / 100 / No
ZMD-B / メチルイソブチルケトン / MIBK, methyl isobutyl keton / 89 / Yes(>1%)
イソプロパノール / IPA, isopropanol, 2-propanol, etc / 11 / Yes(>1%)
ZED-500 / 3-ペンタノン / 3-pentanone / 50 / No
マロン酸ジエチル / Diethyl malonate / 50 / No
混酸アルミ液 / リン酸 / phosphoric acid / 75 / No
酢酸 / acetic acid / 15 / No
硫酸 / sulfuric acid / 5 / Yes(>10%)
水 / water / 5 / No
ハクリ104 / ジメチルスルホキシド / dimethyl sulfoxide / 60 / No
N－メチル－2－ピロリドン / N-methylpyrrolidone, NMP / 40 / No
AZリムーバー / N－メチル－2－ピロリドン / N-methylpyrrolidone, NMP / 90％以上 / No
HMDS (OAP) / ヘキサメチルジシラザン / Hexamethyldisilazane / 100 / No
NMD-3 / テトラメチルアンモニウムヒドロキシド / TetraMethylAmmoniumHydroxide / 2.38 / No
エタノール / エタノール / Ethanol / 100 / No
アセトン / アセトン / Aceton / 100 / Yes(>1%)
フッ酸 / フッ酸 / HF, Hydrofluoridric Acid / 100 / Yes(>1%)
塩酸 / 塩酸 / HCｌ, Hydrochloric Acid / 100 / Yes(>10%)
硝酸 / 硝酸 / HNO3, Nitric Acid / 100 / Yes(>10%)

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