EE 432/532
Field oxide – CyMOS process
Jan. 25, 2016
Group 1
Yogi Bear
Boo-Boo Bear
Fred Flintstone
Barney Rubble
Lab instructor – Robert Noyce
1. Overview
Write an overview or synopsis of the goal of this lab and the work done to grow the field oxide. (Should be more than two sentences but shorter than one page.)
2. Starting wafers
List the number, type, resistivity, doping level of the wafers used (It is not necessary to describe the details of four-probe technique. We will learn about the technique later in the class and you can include a brief description in the final report.)
3. Standard Clean
Explain the purpose of the standard clean and summarize the basic procedure.
4. Wet Oxidation
Summarize the basic steps of the wet oxide growth process.
5. Results
Summarize the operation of the Filmetrics system. List your measured oxide thicknesses, including the wafer map. Describe any problems encountered in the lab.
6. Appendix
Put the calculation details here. Also, attach a copy of the completed field oxidation page of the process traveler.
Comments
1. Use the template to structure your report, if you’d like. However, if you prefer a different format, you can certainly use that.
2. You can steal figures from the lab notes and class notes to use in your report – you have my permission. For example, you might want to include some of the little pictures from the process traveler page at each step in the process to help show what it happening.
3. Put some effort into the esthetics of the report.
a. Number the pages.
b. Use your best English. (Usually one person does the initial draft and everyone else helps edit.)
c. Write succinctly.
d. Be consistent with fonts and headings and adjust the margins and spacings so that things are neatly arranged.
e. Learn how to do superscripts and subscripts in your word processor.
f. It is not necessary to typeset the equations, but it certainly looks nicer if you do.
g. If you use tables, adjust the cell size and align the rows and columns so that the table looks “nice”.
h. When making graphs, label the axes (include units!) and size the graph to fit in with the rest of the report.
i. Tables and graphs should always have titles (Table x, Figure y) and captions.
4. Grading
a. 50 point scale.
b. 30 points for technical content.
c. 20 points for quality of presentation.
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