FAB FCCB WHITE PAPER (Rev 7.3)

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PRELIMINARY [ ] /
APPROVED [ ]
PILOT [ ] / REJECTED [ ]
FINAL [ ] / KEY LEARNING [ ]
1. / WHITE PAPER NUMBER: / Preliminary/Pilot:
Final:
1A. / REFERENCE WHITE PAPERS[k1]:
White Paper Title / White Paper Number
2. / TITLE[k2]:
3A. / CHANGE CLASSIFICATION[k3]: (III, IV, or V)

To view change degree matrix click here

3B. / FACILITIES WP / [ ]
EQUIPMENT INSTALLATION WP / [ ]
BLOCK CHANGE WP[k4] / [ ]
4. / DATE: / 5. REV:
6. / ORIGINATOR / PHONE # / ORGANIZATION / TITLE / POSITION
7. / SPONSORS[k5] / ORGANIZATION / TITLE / POSITION
8A. / PROCESSES
AFFECTED: / LOCATION SPECIFIC
(No POR change) / NEW INSTALLS
(POR change) / RETROFIT
(Modify existing installations)
803 / [ ] / [ ] / [ ]
804 / [ ] / [ ] / [ ]
805 / [ ] / [ ] / [ ]
806 / [ ] / [ ] / [ ]
854 / [ ] / [ ] / [ ]
856 / [ ] / [ ] / [ ]
858 / [ ] / [ ] / [ ]
859 / [ ] / [ ] / [ ]
860 / [ ] / [ ] / [ ]
861 / [ ] / [ ] / [ ]
874 / [ ] / [ ] / [ ]
875 / [ ] / [ ] / [ ]
884 / [ ] / [ ] / [ ]
1213 / [ ] / [ ] / [ ]
1262 / [ ] / [ ] / [ ]
1263 / [ ] / [ ] / [ ]
1264 / [ ] / [ ] / [ ]
1265 / [ ] / [ ] / [ ]
1266 / [ ] / [ ] / [ ]
8B. / SYNERGY SUMMARY [k6]
9. / FACTORIES AFFECTED[k7]:
10. / EQPT. TYPE OR FACTORY UTILITIES AFFECTED:
11. / REVIEW FORUMS
[k8] / DATE OF APPROVAL[k9]
12. / DESCRIPTION OF CHANGE
Item # / Change item / Present Condition / Proposed Condition / POR [cb10] (IMDS, IMCS,
MDP or Ref. Fab
(if not incl. above)
13. / REASON FOR CHANGE
Item # / Change item / Reasons for Change (also, if not moving to POR, explain why) / Change
Class
1.
2.
3.
Fab FCCB White Paper / INTEL CONFIDENTIAL / Page 1 of 8
REV 7.3 Effective 05/25/05 / Expiration Date 05/25/06
14. / ADDITIONAL IMPACTS[k11]:
FINANCIAL[k12][r13][r14]
A. / Capital Cost Savings/Incurred:
B. / Annual Expense Cost Savings/Incurred:
C. / Net Present Cost Savings/Incurred*[k15]:
C.1 / Key Financial Assumptions:
ENVIRONMENTAL
Does this change[cb16]… / Yes*, No, N/A
D. / Require a new chemical, gas, or water use be introduced to the process step or facility equipment?
E. / Increase or decrease the POR for chemicals, gases, and/or water being used? Specify peak or average flows.
F. / Result in a waste product being sent to a different waste system or change any effluent/emissions flow rate?
G. / Result in a change of the composition and/or concentration of constituents in the exhaust(s), liquid waste(s), or waste by-products?
H. / Does this affect Pollution Tax Credit?
*If “YES” was answered for 14D-J, then (1) summarize the environmental impact in 14I; (2) see for information on required EHS review forums, and (3) define/update Work Breakdown Structure (WBS) data elements in Section 14V.
* If “YES” was answered for 14D-J, and this IS a POR change, then (1) add a CSC PE sponsor (or CS sustaining engineer owner for EMEA) from each affected factory; also (2) add an SFTD system-owner sponsor to the White Paper.
*If “YES” was answered for 14D-Jand this is NOT a POR change, then add a CSC PE sponsor (or CS sustaining engineer owner for EMEA) from the site(s) affected to the White Paper.
* If “YES” was answered for 14H please contact “Mail to:” for further investigation.
I. / Environmental impact summary:
SAFETY
Does this change… / Yes*,No,N/A
J. / Result in a potential ergonomic issue[k17]?
K / Require a change to the way materials, chemicals, or gases are stored, handled, or delivered?
L. / Involve potential exposure to lasers, radiation, RF, UV, electrical power, or other hazardous energies?
M. / Require changes to safety controls/interlocks, guarding, ventilation, PM methods, PPE, or methods for heating process materials?
* If “YES” was answered for 14J then (1) an ergonomist sponsor is required, and (2) pre-review and approval by the Ergonomics JET at email address “Ergo JET” is required.
* If “YES” was answered for 14J, 14K or14L then (1) an appropriate EHS sponsor is required, and (2) pre-review and approval by the EHS Equipment JET at email “EHS Equipment ” is required.
NEW FACILITIES EQUIPMENT
Does this change introduce new equipment to Intel that can be characterized by one of the following? / Yes*,No,N/A
N. / 1)inherently hazardous due to operating conditions (e.g. high pressure,
high temperature, etc); 2) conveys hazardous materials which pose a risk to employees or the environment in the event of a release, 3) failure could impact production or cause a permit violation. 4) has the potential for creating a hazardous condition because of conflicts between Intel requested control inputs/safety interlocks and internal circuit logic.
* If “YES is answered to 14N then a Hazard and/or Failure Analysis may be required before the equipment is approved. A consensus between your EHS and SFTD sponsors will determine this requirement. Include the results as an appendix to this white paper if required. Also, define/update WBS data elements in Section 14W.
CODE COMPLIANCE
Does the proposed change require review for code compliance… / Yes*,No,N/A
O. / Building Code (applicable national or local code)?
P. / Electrical Code (applicable national or local code)?
Q. / Fire Code (applicable national or local code)?
* If “YES” was answered to 14O, 14P, or 14Q thenpre-review and approval by the local code expert is required. List this person as a “Sponsor” on the WP.
ce (Conformité Europeéne) MARKING[k18] / Yes*,No,N/A
R. / Does this change result in a lack of compliance with the EU Directives for ce Marking?
S. / Does this change modify the equipment such that wire color, safety labeling, lockout/tagout, access, pinch points, signage, moving parts, etc. are different?
* If “YES” was answered for14R-S thenpre-review and approval by SFTD CE Mark Experts is required. See the FCCB Web Page for ce Mark information and contacts.
INCOMING MATERIALS MODEL OF RECORD (MOR) / Yes*,No,N/A
T. / Does this change result in a change to Supplier name or plant location, Intel part number, spec parameters, package, or usage rate ( 10% change from Materials MOR value) for any of the following materials:
Chems/gases used in wafer processing CMP Slurries, pads, or brushes
Photoresists, polyamides, rinses, developers Silicon wafers (including test wfrs) Quartz/silicon carbide parts Wafer carriers, FOUPs, or FOSBs Metal sputtering targets or anodes Micro contamination consumables
Or, does this change result in a new monitor being implemented, or a change in the way a current monitor is applied (equipment, control limits, dispo limits, etc.) to incoming material?
* If “YES” was answered for14T then an FMO sponsor is required to determine if this WP needs FMCCB review. See FCCB web site for FMO sponsors/information.
UTILITY CONSUMPTION / Yes*,No,N/A
U. / Does this change result in a change to utility connections or consumption (peak or average flow) not already identified in Section 14 D thru G above?
* If “YES” was answered to 14U and this IS a POR change,then(1) add a CSC PE sponsor (or CS sustaining engineer owner for EMEA) from each affected factory; also (2) add an SFTD system-owner sponsor to the White Paper. If “YES” was answered for14Uand this IS NOT a POR change, then (1) add a CSC PE sponsor (or CS sustaining engineer owner for EMEA) from the site(s) affected to the White Paper.
V. EQUIPMENT CONTROLS
Does this facility/equipment install change… / Yes*,No,N/A
Result in a new Sequence of Operation (SOO)?
Result in changes to existing equipment programming and controls?
Result in new or changes to instrumentation?
Result in the addition/changes of LSS points (HPM, Fire, Gas Detection, Liquid Leak)?
Result in a change in the Gas Detection method or setpoints?
* If “YES” was answered to 14V then pre-review and approval by the I&C/LSS CSET is required. See the I&C/LSS CSET site for more information
W. Work Breakdown Structure (WBS)
Does this facility/equipment install change affect… / Yes*, No, N/A
Any of the following items/attributes:
System Title/Name / System Labeling Standard / Referenced Sections
System Number / Intel MasterFormatTitle/Name / NFPA
System Asset Life / IMF Number / FCCB System Level
System Unit Process Number (UPN) / IMF Comments / MSDS Reference
System Identification Code (UPI acronym) / IMF Tax Life
If “YES” was answered for14W then pre-review and approval by the WBS CCB is required. Refer to the WBS Webpage ( for more information.
OTHER
X. / Manufacturing Impact:
Y. / Additional Benefits:
Z. / Block Change Impact: *
* If “YES” was answered for 14Z then pre-review and approval by the BJIT is required; (2) the BCCB chair is a required sponsor; and (3) fill out Equipment Block Excel spreadsheetbefore-and-after in Section 22.
15. / CONCERNS/CONSIDERATIONS[k19]:
Item # / Concern / Considerations/Resolution / Status
1.
2.
3.
16. / QUALIFICATION PLAN[k20]:
Item # / Response
(parameter, units) / Experiment type
(e.g., SEQ, GRC, Process matching) / Sampling Plan
(#samples, freq, duration) / Success Criteria
17. / RECOVERY PLAN IF APPROACH FAILS[k21]:
18. / SPECS, CONTROLLED DOCUMENTS, DRAWINGS AFFECTED[k22]:
Equipment Installation
(see comments at right)[k23] / Spec# / Dwg # / Owner / Due Date
Master Design Pkg change MDP
BCCB Block change
Standard Installation Detail(SID) change
Location Specific Pkg. LSP
Factory / Utility Change
Master POR Change[k24]
Intel Master Design Standard
(IMDS/MDP/FADS/PID/FAT) / -
Intel Master Construction Spec (IMCS)
Change to Project[k25]
Project Design
Project Construction Spec
Other Documents Affected
Site PM Specs
Supplier Specs
EDB/VFC Changes
Utility Database Change Required
(see comments at right)[k26]
EHS Tool Install Design Guidelines
(note other document titles here)
19. / DATA SUMMARY[k27]:
Parameter
(Include Units) / POR
(Avg ± 1;
Sample Size) / New
(Avg ± 1;
Sample Size) / Outliers? / Decision / Data Date[k28]
20. / IMPLEMENTATION PLAN: Items listed here will be tracked by automated system
Item / Owner / Implementation Date
Preliminary/Pilot WPs: Include an AR for the next FCCB review. WP Author can add any additional ARs that the author/sponsors/pre-review forums require to be tracked before WP goes final.
Final WP’s: Add ARs that should be tracked to ensure CE! Is followed through by WW with site owner(s) listed. Separate ARs are to be assigned if the same action is to occur at multiple sites (each site gets their own AR to track)
21. / FOLLOW UP OR POST IMPLEMENTATION REVIEW*:
* WP’s that have significant impact on cost, POR, etc., may be required to be brought back to the FCCB after implementation to update the FCCB on their success. Determination will be made by the FCCB.
Item / Owner / Due Date
1.
2.
22. / SUPPLEMENTAL INFORMATION[k29]:
APPENDIX A: FCCB WP INFORMATION AND HELPFUL HINTS

The FCCB WEB page at an excellent resource for information and key contacts for the FCCB process.

  • White Paper rejection criteria summary: The table below is used by the FCCB to categorize failed White Papers. It highlights the most common reasons for White Paper rejection. White Paper authors can use this as a checklist to ensure that they have properly completed the White Paper.

Reason for Rejection / WP sections / Comments/Examples
[ ] / technical / 12,13,14,15,16,
17,19 / Technically unsound, lacking financial analysis, no recovery plan, no compelling reason to change, etc.
[ ] / synergy/strategic issues / 8,9,20,21 / lack of buyoff from the virtual factory, implementation plan does not include affected factories
[ ] / lacks required pre-approval / 7,9,11 / affected JETs and/or CSETs have not bought into the change, stakeholders not listed or have not actively approved , process engineering stakeholders not identified and/or engaged
[ ] / WP incomplete / any / one or more required sections left blank
[ ] / Other / any section not covered above

Block Change Excel Spreadsheet (required for all block changes)

Fab FCCB White Paper / INTEL CONFIDENTIAL / Page 1 of 8
REV 7.3 Effective 05/25/05 / Expiration Date 05/25/06

[k1]List all applicable WP numbers and titles including “Me Too” WP’s; include the IMDS title, number and revision.

[k2]A good title is concise, explains the change, and identifies the affected process tool {include 3 letter Tool code or system abbreviation, i.e., UPW, PCW, etc.}. If this is a matching paper, specify the reference site in the title

[k3]Overall class of the WP using the FCCB matrix

[k4] If this section is checked, see specific requirements in section 14Z and 18.

[k5]All sponsors MUST “actively” support the current revision of the WP with confirmation to the author

  • Sponsors need to also include those “Owners” listed in Sections 18, 20 and 21 to ensure commitment to document updates, implementation and follow-up.
  • If the white paper includes statistical analysis, include a statistician as a sponsor
  • SFTD/FIS Sponsors: If the WP is a “POR” change and it will change any utility/facility consumption, click on this SFTD/FIS link to obtain the appropriate SFTD/FIS sponsor for your WP.

[k6]Explain how this change will affect synergy and/or retrofit capability in the virtual factory. Ensure that changes that DO NOT result in inter-process synergy are fully explained and justified. Outline the steps and timetable that will be taken to achieve VF synergy, if applicable. If the retrofit column in item 8A is not marked but the change can be used (or implemented) in case of repair - indicate so and explain.

[k7]List all Fabs that will implement this change. See FCCB web site at for Fabs and processes.

[k8]Past and planned. Ensure that all FCCB pre-review forums have approved the WP prior to FCCB review. See FCCB WEB page for the list of pre-FCCB forums.

[k9]Leave blank until approval is obtained. When the date is listed, that implies approval.

[cb10]Identify which Document POR is currently defined. If not documented yet (i.e. in Reference Factory), identify what is in Reference Factory as defined POR.

[k11]List information for all that apply. Do not leave these sections blank. If the question does not apply, put “N/A” in the box.

[k12]Include total savings {positive number} or incurred cost {negative number} that will result from the proposed change.

[r13]A Finance rep should review this section and be added as a Sponsor

[r14]VF Cost Impacts due to POR changes must include the total cost to install/convert an existing factory that may/may not be running other technologies as well. The WP author(s) and Sponsors are accountable for significant differences between this information and what is actually requested on factory implementation CPAs.

[k15]FCCB NPC Excel spreadsheet: If used, paste it into the White Paper as an appendix.

[cb16]Answer questions D-G with respect to POR, not the current site conditions.

[k17]Are tool clearances changed? Does the change require technicians to use new/awkward body positions to perform maintenance?

[k18] All equipment used across the Intel VF is required to be CE Marked, unless previously exempted and documented by SFTD CE mark content expert.

[k19]All known and potential effects and interactions should be listed. The purpose of this section is to anticipate all questions and concerns that will come up during the WP review. A thorough list of items/issues typically demonstrates a well thought out change. Resolution typically is via Qual Plan; in some cases resolutions other than the Qual Plan may apply.

[k20]All concerns & considerations must be addressed in the qual plan, point by point. Ifstatistical analysis is used, list the parameters required (sample size, duration of test, sensitivity, etc.)

[k21]Explain how you would “back out” of this change if the change is unsuccessful

[k22]Include only the documents that will be CHANGED as a result of this White Paper. Contact FCCB FAB Admin for assistance in identifying spec/dwg owners. Ensure that the document change AR owner is clearly identified

[k23]If a tool Master Design Pkg (MDP) is changed, include a Tool Install Design (TID) Design Lead (DL) and the appropriate TID Discipline Engineer as sponsors. Additionally, the Redlines or other pertinent documents are required for Tool Install Design to make the correct changes. If a tool SID is changed, include the appropriate TID discipline engineer as a sponsor. If a BCCB Block change is required, pre-review and approval by the BJIT is required and the BCCB chair should sponsor the WP.

[k24]For VF POR changes, fill in all documents that need to be updated as a result of this WP.

[k25]For changes that DO NOT change the site or VF POR but are specific for this project ONLY – list all documents that need to be updated.

[k26]A CEDR (Capital Equipment Data Repository) database change will happen if there is a POR change made to the installation design schematics or facility service data tables included with the affected CE! reference tool design or MDP.

A USM (Utility Systems Manager) database change will happen if there is any change made to the installation design schematics or facility service data tables included with the affected LSP.

[k27]Summarize qual plan data as well as other data that is available. The table below may be used but is not required. Additional data may be attached to the end of the White Paper if required.

[k28]Parameter: What are we measuring/monitoring to determine the effect of the change?

POR: Value from Specification or Data from existing facility/item if not specified.

New: Data from new facility or new item

Outliers? Usually a yes or no answer. This information flags any possible changes that may not show up in the data summary.

Decision: The change is … better, worse, or no change

Data Date: Lets the FCCB know that the data is not 2 years old for example

[k29]Use this section to add additional detail from any of the above sections or to capture items that fall outside the scope of the previous sections. Include data analysis details and plots that support section 19. For Equipment Block changes, insert the “before” and “after” BCCB blocks in this section and include the block change excel spreadsheet which can be found in the appendix. Additionally, this section can be used to list/explain changes that were considered but were rejected [explain reason why they were rejected]