Entering the Facility (Shoe Covers, Tacky Mats, Computer Login, Pre-Gown)

Practical cleanroom advice and recommendations: #G-003d

Entering the Facility (Shoe covers, tacky mats, computer login, pre-gown)

Gowning Procedure (safety glasses, no paper suits, no big clothes underneath, no jewelry, no contacts, proper fit hoods, hanging up, no floor, label damaged/heavily soiled parts)

Gloves (pinholes, dry rot, nitrile)

Material transport (no wood, cardboard, pencils, cell phones, keys)

Glass plate scribing (clean area, no blowing, no excessive pressure, safety glasses)

Washing hands upon entry and before critical processes (‘sterile’ approach)

Ultrasonic cleaner (lid, dripping, heat, gloves new versus worn for awhile, dirty, foreign objects)

Top rinser (time in, effectiveness, wet bench DI hose crimp)

IPA rinse (systematic)

Drying oven (do not change Temp, lift door, no turbulent flow, no storage)

Resist reagent (5:1, other?, bottle type)

Spinning resist (clean bowls, foil, steel burrs, shaft bearing, minimal material use, hovering, walking nearby, utilities for safety and functionality, filtration, syringe loading, suit is not a shield, no warm substrates, no reagent sucked down vac line)

Hot plate (no wipers, turn off when done)

Glove changes (outside, do not continue with resist covered gloves)

UV (warm up time, UV glasses, protect your work and others: resists, adhesives)

Develop (wash hands, clean trays, keep hood shield down unless you are right there, timers, wet hands, dry hand, suit is not a shield)

Cascade rinser (do not leave on when not in use, DI tank alarm)

Etch (always test first, watch arm when placing in tank, no acid work outside of hoods EVER!, suit is not a shield)

Rinse (immediately)

Test points (test mask, exposure, develop, etch, strip, shorts)

Strip (acetone, KOH, flood expose, must be complete)

Chemical disposal (resist (check reservoir), developer, etchant, stripper, solvents)

Material disposal (needles, razors, glass (broken or unbroken), clean first, no nonsharps in sharps boxes)

Top coating (spinners, no hovering or walking nearby, be careful with acetone when cleaning up, no cold chemicals, no warm substrates, cooling before oven removal, oven notes, check before turning on)

Chairs (careful when sitting, do not spin or zoom)

Utilities (on and off, tagged out, open line ports, leaks or breaches, DI water loop)

Rubbing (PI specific cloth, mark back of plates to remember rub directions)

Asymtek (no cold adhesives, viscosity vs T, practice piece, only with spacers, Global dispense height, height maintained, be careful if setting up on something lower than actual piece, no marker, no tape, syringe loading)

UV curing lamp (warmup, UV glasses, protect your work and others, no marking, wiping or tape on ceramic chucks)

Scribing glass cells (VPI, no tape, no air blowing, be patient for reset, safety glasses)

Steel tables (no marker, no adhesives, no metal trays, no acid, no razors, no storage, Class 100 tables, new tables on the way)

Facility hours (no staying late, out by 4:30pm, 4:00 on Fridays for cleaning)

Contract work (some stock will be developed)

Chemical stock levels (alert to low stock, low level of coating vials)
Proper storage (nothing in hoods, process chemicals, flammables, corrosives, pens, supplies, etc.)

Training (done by staff only, process and equipment specific, refresh when too much time has passed)

Respect for other workers and IPP’s. (don’t work nearby, don’t ask questions, don’t go through materials in fridge etc.)

Safety response (react to problem as if you were NOT in a cleanroom, do what needs to be done to get the problem resolved, the cleanroom and parts in process can be sacrificed for proper safety response, university safety class)

Forum check in

Safety

Gowning, glasses, gloves

Glass, needles, razors

Chemicals

Safety response, 911