ECG 450L- Solid State Characterization Laboratory
CATALOG DATA:
Capacitance-Voltage Measurement, Hall mobility and carrier concentration, oxidation and etching, silicon dioxide processing. Prerequisite : ECG 320, MAT429 Corequisite ECG450
TEXTBOOK:
Instructor prepared Laboratory Manual
COORDINATOR:
Rama Venkat, Professor of electrical and computer engineering
COURSE OBJECTIVES:
· To provide students with hands-on experience in materials and device characterization techniques such Hall mobility, thickness measurement using surface profiler, capacitance-voltage measurement, xray diffraction, scanning electron microscopy and semiconductor parameter analyzer.
· To provide students with hands-on experience with growing and etching silicon dioxide and aluminum metal deposition.
· To provide students with hands-on experience with simulation tools such as ATLAS (process modeling) and ATHENA (device modeling).
PREREQUISITE BY TOPIC:
· An understanding of Solid State construction.
· An understanding of metric parameters.
· An understanding of simple Software simulation techniques.
TOPICS:
1. C-V characteristics of diodes and MOS-C Keithley C-V meter
2. Hall Mobility Keithley Hall mobility tester
3. Oxide Growth Tempress Diffusion Furnace
4. Metal Film Deposition Denton High Vacuum Evaporator, Dektak II profiler
5. X-ray Diffraction Rigaku Xray diffraction system
6. Semiconductor Device Parameters HP4155B Parametric Semiconductor Analyzer
7. Semiconductor Processing ALTAS & ATHENA software
COURSE OUTCOMES:
Students should be able to:
1. Experimentally obtain material and device parameters such as mobility, carrier concentration, crystal structure, lattice constant, I-V and C-V characteristics
2. Operate a oxidation furnace to oxidize Si in a controlled fashion
3. Deposit thin aluminum films and measure its dimensions and resistance
4. Use Keithley C-V meter, Hall system, HP 4155B and Surface profiler for measurements
5. Operate a SEM to study microstructure and composition of materials
6. To use process and device simulation software solid state problems
7. Design experiments for the simulation software and HP4155B
COMPUTER USAGE:
Student will use ATLAS and ATHENA
DESIGN CONTENT:
10% of Design. Students design 2 experiments using the simulation software and HP4155B.
CLASS SCHEDULE:
Lecture 3 hours per week
PROFESSIONAL CONTRIBUTION:
Engineering Science: 2 2/3 credits or 90%.
Engineering Design: 1/3 cerdit or 10%
RELATIONSHIP BETWEEN COURSE AND PROGRAM OUTCOMES:
These course outcomes fulfill the following program objectives:
a. Knowledge of scientific principles that are fundamental to the following application areas: Circuits, Communications, Computers, Controls, Digital Signal Processing, Electronics, Electromagnetics, Power and Solid State.
b. An ability to design and conduct experiments, analyze and interpret data, design a system, component, or process using the techniques, skills, and modern engineering tools, incorporating the use of design standards and realistic constraints that include most of the following considerations: economic, environmental, sustainability, manufacturability, ethical, health and safety, social and political.
d. An ability to identify, formulate and solve engineering problems
e. An ability to communicate effectively and possess knowledge of contemporary issues and a commitment to continue developing knowledge and skills after graduation
COURSE PREPARER AND DATE OF PREPARATION:
Rama Venkat, 28 October, 2002 (version 1)