Osamu Nakagawara1, Eiji Kusano2 and Akira Kinbara3

Instructiontosubmitmanuscriptfor on-site proceedings

Osamu Nakagawara1, Eiji Kusano2 and Akira Kinbara3

1Murata Manufacturing Co., Ltd., Yasu, Shiga, 5202393, Japan,

2Advanced Materials Science Research and Development Center, Kanazawa Institute of Technology, Matto, Ishikawa, 9240838, Japan,

3The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo, 1538304, Japan,

If you wish to describe abstract of your manuscript, please type the text here. Accepted manuscript will be published as the on-site proceedings of ISSP2017.

Submit your PDF formatted manuscript to the committee via website until May 12, 2017.If you can not convert your manuscript to PDF file, please contact to ISSP 2017office. Please note that the copyright form is attached to your manuscript for the on-site proceedings.

1. Instruction for manuscript preparation

1.1 General

You should submit a PDF FORMATTED MANUSCRIPT. Read the following guidelines carefully: Papers must be written in English.The manuscript must fit within an area of 16.5 cm (6-1/2 in.) width by 25.4 cm (10 in.) height on A4 size (21.0 cm x 29.7 cm)or letter size sheets.

The numbers of pages permitted are 4 pages for each presentation (6 pages manuscript is permitted for invited presentation).

If authors need further pages, please contact ISSP2017 committee.

Clear font style and size, such as 10.5 point Times New Roman, is recommended so that all the letters in the text andin the figuresare not smaller than0.33cm (1/8 in.). 9-12 point Times New Roman is permitted if you don't have 10.5 point type. Either typewriter or word-processingtype is permitted as long as type is clear and high contrasts.

Papers must be laid out double column and typed in single space with appropriate spacing between paragraphs, sections,chapters and so on. Type the title in bold letters, Single-spaced. On a new line, type the author's names and their affiliations and addresses including e-mailaddress.

After the first page, remaining texts must start at the top of the second page.

1.2 Figures, tables and photographs

All figures and photographs should be sized and placed in the paper. DON'T put figures and photographs at the end of yourmanuscript. They should be clear and high contrast originals. Since the on-site proceedings will be provided via USB-memory, use of color photographs and figures is recommended.

Lines should be bold, and figures, symbols, letters should be large (9-12 point type is recommended) and well spaced for reading easily.

Roman numerals should be used for tables andArabic numerals for figures. Table captions should be centered above the tables. Figurecaptions should be centered below the figures.

1.3 Corrections

Authors should check their own manuscript carefully for typographical errors and small changes. The ISSP committee will NOT correctyour manuscript. If your native language is not English, it is recommended to ask natives to check the manuscript.

Papers received by the ISSP committee are considered to be in the final form as a camera ready manuscript.ISSP committee will make no correction for your manuscript. It should be noted that manuscript that does not meet the above requirements may not be included in the on-site proceedings.

After publication, original manuscript materials will NOT be returned to the authors. Authors are advised to prepare extra copies of themanuscript and figures for their own purposes in advance of submitting the paper for review and publication.

1.4 References

References to other papers should be consecutively numbered and listed at the end of the paper.

*ISSP References style

Journal articles

[1] H. Yukawa: Jpn. J. Appl. Phys. 28 (1989) 102.

[2] R. H. Bruce: Solid State Technol. 20 (1983) No. 10, 64.

Journal articles in without English

[3] T. Haseda: Oyo Buturi (58) 111 [ in Japanese ].

[4] V. I. Kozub: Fiz. Tekh. Poluprovodn. 9 (1984) 2284 translation: Sov. Phys. Semicond. 9 (1985) 1097.

Book references

[5] E. Podolsky and G. Boman: Plasama Acceleration,ed. S. W. Kash (Stanford Univ., Stanford, 1960), 2nd ed., Vol.1, Chap.3, p.12.

Proceedings

[6]G. P. Vella-Coleiro: Proc. Int. Conf. Plasma Chemistry,New York, 1992 (ABC Press, Pittsburgh, 1992) p. 351.

[7]H. Kitahara: Proc. 2nd Int. Symp. Sputtering & PlasmaProcesses, Tokyo, 1993 (ISSP'93 Committee, Tokyo, 1993) p. 201.

[8]M. Kitagawa: Proc. 18th Int. Conf. Plasma Physics, Kyoto, 1987, Jpn. J. Appl. Phys. 26 (1987) Suppl. 26-3, Pt. 1, p. 21.

Unpublished work citation

[9] R.T. Smith, presented at the 1994 MRS Fall Meeting, Boston, MA, 1994 (unpublished).

[10] B.W. Wilson: (private communication).

[11] Y. Kobayashi: PhD thesis, OsakaUniversity, Osaka, 1985.

[12] K. S. Jones: submit to Jpn. J. Appl. Phys.

[13] T. Hata: in preparation for publication.

References to patent

[14] M. Inoue and E. Setoyama: Japan Patent 663921 (1978)

Citation within the paper should be bracketed, e.g. [12]. There is no need to position reference number as a superscript (above the text line). However, if your word processor or typesetter can produce small numbers to designate references, these may be printed assuperscripts, e.g. 12). Book titles can be italicized instead of underlined.

ISSP committee recommends ISSP reference style. Other reference styles of JJAP, AIP, IEEE, and MRS journals are permitted in ISSPproceedings.

1.5 Address for submission and inquiries

You should submit PDF formatted file via web-form in ISSP web-site ( Recommended size of PDF file is less than 4M-byte. Please DO NOT forget to embed the fonts to the PDF file.
If you cannot convert your manuscript to PDF file, please contact to ISSP2017 office.

E-MAIL:

2. Guide for presentation

2.1 General

All presentation should be given by English. Every oral presentation is presented again as poster presentation in the day. Therefore, speakers of oral session are requested to prepare poster presentation, too.

2.2 Style of presentations

*Invited Presentation (Oral and Poster)

Invited speakers present both oral and poster presentation. Oral presentation: 40 minutes for presentation including 5 minutes discussion,and Poster presentation: Evening session (based on the oral presentation).

*Presentation A & Manufacturer's Presentation (Oral and Poster)

The authors present both oral and poster presentation. Oral presentation: 20 minutes for presentation including 5 minutes discussion,and Poster presentation: Evening session (based on the oral presentation)

*Presentation B (Poster)

The authors present only poster presentation.

Poster presentation: Evening session

2.3 Equipment for presentation

2.3.1 Oral presentation

An LCD projector is prepared as equipment for presentations.Please test your laptop PC during the break time before your session. Bring the copy of your file for presentation saved in CD-R, CD-RW or USB memory for any possible trouble on your PC. Substitutive PC, in which Microsoft PowerPoint and Adobe Reader are installed, is prepared in the meeting place.

2.3.2 Poster presentation

A poster board of 1.8m width x 0.9m height is prepared for poster presentation. The presenting authors should prepare posters that are written in bigger font (over 24 points) for poster session. The presenting authors in the oral sessions also should present posters in the poster sessions for discussion based on their oral presentations. The copies of slides used in the oral session are permitted for the poster presentation.

Copyright Form

This form must be properly completed and signed by an authorized person and accompany your manuscript submitted for publication by the committee of the International Symposium on Sputtering & Plasma Processes (hereafter ISSP committee) in the Proceedings of ISSP2017-The 13th International Symposium on Sputtering & Plasma Processes.

Title of Paper:

Author(s):

Part A - Copyright transfer

(Note: Company or other forms may not be substituted for this form. U.S. Government employees whose work is not subjected to copyright may so certify by signing Pert B below.)

The undersigned, desiring to publish the above paper in the Proceedings of ISSP2017, hereby transfer their copyrights on the above paper to the ISSP committee.

Returned Rights: In return for these rights, the ISSP committee hereby grant to the above authors, and the employers for whom the work was performed, royalty-free permission to:

1. Retain all proprietary rights other than copyright, such as patent right.

2. Reuse all or portions of the above paper in other works.

3. Reproduce, or have reproduced, the above paper for the author’s personal use or for company use provided that (a) the source and copyright of the ISSP committee are indicated, (b) the copies are not used in a way that implies the ISSP committee endorsement of a product or service of an employer, and (c) the copies per se are not offered for sale.

4. Make limited distribution of all or portions of the above paper prior to publication.

5. In the case of work performed under U.S. government contract, the ISSP committee grants the U.S. government royalty free permission to reproduce all or portions of the above paper, and to authorize others to do so, for U.S. Government purpose.

ISSP committee Obligations: In exercising its rights under copyright, the ISSP committee will make all reasonable efforts to act in the interests of the authors and employers as well as in their own interests. In particular, the ISSP committee requires that:

1. The consent of the first-named author be sought as a condition in granting republication permission to others.

2. The consent of the undersigned employer be obtained as a condition in granting permission to others to reuse all or portions of the paper for promotion or marketing purposes.

▲Authorized Signature

▲Name (please print) ▲DATE

▲Title if not author

▲If work was Made for Hire, name of employer (company/Institution) for whom work was performed (please print)

Part B –U.S. Government Employee Certification

(Note: If your work was performed under Government contract but you are not a Government employee, sign transfer form Part A above and see item 5 under Returned Rights.)

This will certify that all authors of the above paper are employees of the U.S. government and performed this work as part of their employment, and that the paper is therefore not subjected to U.S.copyright protection.

▲Authorized Signature

▲Name (please print) ▲DATE

▲Employer for Whom Work was Performed

▲Title If not Author

If you can not combine the Copyright form with your manuscript, please return this form to:

ISSP2017 Office

Advanced Materials Science Center, Kanazawa Institute of Technology

3-1, Yatsukaho, Hakusan, Ishikawa 924-0838, Japan

Phone: +81-76-274-9250 / Fax: +81-76-274-9251

E-mail: