NARASARAOPETA ENGINEERING COLLEGE

NARASARAOPET - 522601, GUNTUR - Dist.

DEPARTMENT OF ELECTRICAL AND ELECTRONICS ENGINEERING

ACADEMIC YEAR : 2016- 2017 BRANCH: MECHANICAL

YEAR : IV B.TECH – A & B SEM : I

SUBJECT : MICRO ELECTRO MECHANICAL SYSTEMS

SON PLAN

S.NO / No. of Hrs / Topic / Reference Book / Teaching Methodology
UNIT – I: INTRODUCTION&MECHANICAL SENSORS AND ACTUATORS:
1 / 1 / MEMS history and development, Definition / MEMS,Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk, PPT
2 / 1 / Micro machining, Structural and sacrificial materials / Chalk & Talk
3 / 2 / Lithography principles &methods / Chalk & Talk, PPT
4 / 1 / Thin film deposition / Chalk & Talk
5 / 1 / Impurity doping / Chalk & Talk
6 / 1 / Etching / Chalk & Talk
7 / 1 / Surface micro machining / PPT,VIDEO
8 / 1 / Wafer bonding, LIGA / Chalk & Talk,PPT
9 / 1 / Revision of first unit / Chalk & Talk
10 / 1 / Mechanical sensors and actuators Introduction / MEMS ,Nitaigour Premchand Mahalik,TMH Publishing co.. / Chalk & Talk
11 / 1 / Principle of sensing and actuation :beam and cantilever / Chalk & Talk, PPT
12 / 1 / Capacitive effects, Piezo electric materials / Chalk & Talk
13 / 1 / Strain measurement, Flow measurement / Chalk & Talk
14 / 1 / Pressure measurement by using microphone / Chalk & Talk
15 / 1 / MEMS gyroscopes / Chalk & Talk
16 / 1 / Gripping piezo actuator, Inchworm technology / Chalk & Talk, PPT
17 / 1 / Revision of second unit / Chalk & Talk
UNIT – II: THERMAL SENSORS AND ACTUATORS
18 / 1 / Thermal sensors and actuators Introduction / MEMS ,Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk
19 / 1 / Thermal energy basics and heat transfer process / Chalk & Talk
20 / 1 / Thermistors, thermo devices, Thermocouple / Chalk & Talk
21 / 1 / micro machined thermocouple probe / Chalk & Talk
22 / 1 / Peltier effect heat pumps / Chalk & Talk
23 / 1 / Thermal flow sensors, micro hot plate gas sensor / Chalk & Talk
24 / 2 / MEMS thermo vessels, pyroelectricity / Chalk & Talk
25 / 1 / Shape memory alloys(SMA), Electro thermal actuator / Chalk & Talk, PPT
26 / 1 / Thermally activated MEMS relay / Chalk & Talk, PPT
27 / 1 / Micro spring thermal actuator, Data storage cantiliver / Chalk & Talk, PPT
28 / 1 / Revision of Third unit / Chalk & Talk
UNIT – III: MICRO-OPTO-ELECTRO MECHANICAL SYSTEMS
29 / 1 / Micro-Opto-Electro Mechanical Systems Principle / MEMS, Nitaigour Premchand Mahalik,TMH Publishing co.
MEMS and Micro Systems: Design and Manufacture, Tai-RanHsu,TMH / Chalk & Talk
30 / 1 / Properties of light, light modulators / Chalk & Talk, PPT
31 / 1 / Beam splitter, micro lens / Chalk & Talk
32 / 1 / Micro mirrors, digital micro mirror device(DMD) / Chalk & Talk, PPT
33 / 1 / Grating light valve(GLV) / Chalk & Talk, PPT
34 / 1 / Optical switch, light detectors / Chalk & Talk
35 / 1 / Wave guide and tuning, shear stress measurement / Chalk & Talk
36 / 1 / Revision of Fourth unit / Chalk & Talk
UNIT – IV: MAGNETIC SENSORS AND ACTUATORS
37 / 1 / Magnetic sensors and actuators introduction / MEMS, Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk
38 / 1 / Magnetic materials for MEMS and properties / Chalk & Talk
39 / 1 / Magnetic sensing and detection, Pressure sensor utilizing MOKE / Chalk & Talk, PPT
40 / 1 / Magneto diodes, magneto transistors / Chalk & Talk
41 / 1 / MEMS magneto sensor / Chalk & Talk
42 / 1 / Magnetic MEMS actuator, Bidirectional micro actuator / Chalk & Talk
43 / 1 / Revision of Fifth unit / Chalk & Talk
UNIT – V: MICRO FLUIDIC SYSTEMS&RADIO FREQUENCY (RF) MEMS
44 / 1 / Micro fluidic system introduction / MEMS ,Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk
45 / 1 / Applications, considerations on micro scale fluid / Chalk & Talk
46 / 1 / Fluid actuation methods, dielectro phoesis(DEP), Electro wetting, electro thermal flow / Chalk & Talk
47 / 1 / Opto electro wetting(OEM) / Chalk & Talk
48 / 1 / Tuning using micro fluids, typical micro fluidic channel, micro fluidic dispenser / Chalk & Talk
49 / 1 / Revision of Seven unit / Chalk & Talk
50 / 1 / Radio frequency(RF) MEMS introduction / MEMS, Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk
51 / 1 / RF based communication systems / Chalk & Talk
52 / 1 / RFMEMS, RF inductors / Chalk & Talk
53 / 1 / Varactors, Tuner/filter / Chalk & Talk
54 / 1 / Resonator, Clarification of tuner, filter, resonator / Chalk & Talk
55 / 1 / Revision of Six unit / Chalk & Talk
UNIT-VI: CHEMICAL AND BIO MEDICAL MICRO SYSTEMS:
56 / 1 / Chemical and bio medical micro systems introduction / MEMS ,Nitaigour Premchand Mahalik,TMH Publishing co. / Chalk & Talk
57 / 1 / Membrane –transducer material, chem-lab-on-a-chip(CLOC), chemo resistors / Chalk & Talk
58 / 1 / Chemo capacitors, chemo transistors, Mass sensitive chemo sensors / Chalk & Talk
59 / 1 / Electronic nose(E-nose), florescence detection , Calorimetric spectroscopy Calorimetric spectroscopy / BioMEMS(Micro Systems), Gerald Urban, Springer / Chalk & Talk
60 / 1 / Revision of Eight Unit / Chalk & Talk

Total Number of Classes: 60