Background Statement for SEMI Draft Document 4625A
Line Item Revisions to SEMI S2-0706, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment(Revisions Related to Ventilation)
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Since the publication of SEMI S02-0706, SEMI S06-93 and SEMI F15 have been replaced by SEMI S06-0308. A previous Line Item ballot approved several changes to SEMI S02, related to SEMI S06, that were clerical in nature.
The S06 Revision TF, however, believes that it is appropriate to make several other revisions to SEMI S02 to reflect changes in the content of SEMI S06 and the current industry understandings and practices of ventilation, as discussed during the SEMI S06 rewrite effort. This Line Item ballot proposes such changes.
This ballot has not been prepared in Delayed Revisions format. Any changes to SEMI S02 that are approved on this ballot cycle will have the same effectivity with or without being Delayed Revisions, as the earliest possible publication cycle is 0709. Please review the technical substance of each Line Item and include, in your Reject vote, any negative argument about the technical substance that you consider grounds for rejection.
Several of the Line Items consist of more than one part. The parts within each such line item are identified by letters, in the order in which the parts occur in the ballot.
At the Fall 2008 meeting of the NA EHS Committee, all six Line Items were found to have failed Technical Ballot. This ballot has been prepared by the Task Force Leaders, based on the consensus of the participants in the discussions, at those meetings, of the 4625 ballot.
This ballot consists of six Line Items. Please vote on each Line Item. Parts of the document that are not shown as parts of Line Items are not subject to this ballot.
Line Item 1 (parts a through j): Conversion of Appendix 2 to a Related Information to SEMI S02.
Appendix 2 is, structurally, a normative part of SEMI S02, i.e., conformance to Appendix 2 is a criterion for conformance with SEMI S02 overall. However, Appendix 2 is written as being a "starting point of reference" (¶A2-1.2) and "is not intended to limit hazard or test evaluation methods or control strategies" (¶A2-1.3). Furthermore, Appendix 2 is rarely, if at all, included among the conformance criteria against which equipment is compared in SEMI S02 conformance assessments. The proposed change will make the text that now appears as Appendix 2 a Related Information section, to be published as part of SEMI S02. References to it within the body of the document would also need to be changed to reflect the change in status.
If this Line Item is approved, other portions of the document will be renumbered prior to publication. For clarity, that renumbering has not been shown in this ballot.
Line Item 2(parts a through d): Changes to the list of information to be provided by equipment manufacturers.
These changes comprise the removal of several items that have been mandated by SEMI S02, but for which the S06 rewrite task force members feel there is no need. Also, two definitions are proposed to be deleted from §5, as they are used only in the text that is proposed to be deleted.
Line Item 3: Incorporation by reference of SEMI S6's documentation criteria.
Line Item 4 (parts a and b): Incorporation by reference of SEMI S6's design and testing criteria.
Line Item 5 (parts a and b): Corrections to 22.4.
Currently, ¶22.4 states that "exhaust flow interlocks" should be provided under certain circumstances, then proceed to state that "flow or static pressure switches are the preferred sensing methods.". To address this inconsistency, removal from the first phrase of the word "flow" is proposed.
The same paragraph calls for "exhaust flow interlocks" in cases "where loss of exhaust may create a hazard". This is a poor description of the foreseen situations, as the hazard (for example, silane passing through a mass flow controller) is present whether or not exhaust is functioning properly. What may happen if the exhaust fails is that the risk presented by the hazard is increased, because the exhaust ventilation no longer reduces the risk.
Line Item 6: Changes to 22.4.1
22.4.1 currently refers to exhaust falling "below" a "set point" However, it is appropriate in many cases to ensure that the exhaust flow or pressure remain within a specified range, that is, to ensure that the measured characteristic is neither too low or too high.
Please note that there appears to be a conflict between LI 1, part b and LI 2, part a, because they both affect 5.2.9. However, it is possible to implement either or both of the Line Items, so they are not in conflict.
Throughout this ballot, text to be deleted is shown struckthrough. Text to be added is shown underlined.
In the interest of brevity, numerous portions of SEMI S02 that are not affected by these proposed line items have been deleted from the ballot. If you need any of those portions to respond to this ballot, please contact Ian McLeod at .
This ballot will be discussed at the SEMI NA Spring 2009 Standards Meetings, in the meetings of the S6 Revision Task Force. The ballot will be adjudicated in the meeting of the NA EHS Committee (scheduled to be 0800-2200 PDT, Thursday, 02 April 2009 in Milpitas, California). Depending on ballot responses received, teleconferences prior to these meetings may also be scheduled.
If you need further assistance, or have questions, please contact Eric Sklar, Task Force Leader by e-mail at .
As this is a Technical Ballot, you must submit your formal response to SEMI in the prescribed manner. If you Reject or submit Comments on this ballot, please send a soft copy of your response to the Task Force Leader.
Review and Adjudication Information for SEMI Draft Doc. #4625A
Task Force Review (Unofficial) / Committee Adjudication (Official)Group: / S6 Revision Task Force / NA EHS Committee
Date: / Monday 30 March 2009 / Thursday, April 2, 2009
Time & Timezone: / 1030-1200, PDT / 0800-2200 PDT
Location: / Sheraton San Jose / Sheraton San Jose
City, State/Country: / Milpitas, CA / Milpitas, CA
Leader(s): / Eric Sklar (Safety Guru, LLC)
Bob Desrosiers (IBM)
/ James Beasley (ISMI)
Chris Evanston (Earth Tech | AECOM)
Sean Larsen (AMEC)
Eric Sklar (Safety Guru, LLC)
Standards Staff: / Ian McLeod (SEMI NA)
408.943.6996
/ Ian McLeod (SEMI NA)
408.943.6996
Meeting Type(s): / X / Face-to-Face / X / Face-to-Face
X / Telephone / Telephone
X / Web / Web
Meeting Notes: / This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contactStandards staff.
Safety Checklist for SEMI Draft Document #4625A
Title: Line Item Revisions to SEMI S2-0706,Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions Related to Ventilation)
Developing/Revising Body
Name/Type: / S6 Rewrite TFTechnical Committee: / EHS
Region: / NA
Leadership
Position / Last / First / AffiliationLeader / Desrosiers / Bob / IBM
Leader / Sklar / Eric / Safety Guru, LLC
Documents, Conflicts, and Consideration
Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee
# and Title / Manner of ConsiderationSEMI S2 / Familiarity of task force members with document
SEMI S6 / The changes proposed in 4625 result from development work on S6
Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline
# and Title / Inconsistency with This Safety GuidelineNone
Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical
# and Title / Nature of Conflict with This Safety GuidelineNone
Participants and Contributors
Last / First / AffiliationBarcik / Steve / HTDS
Crane / Lauren / Applied Materials
DeBoer / Dave / ASML
Desrosiers / Bob / IBM
Fessler / Mark / TEL`
Funk / Rowland / Earth Tech
Giles / Andrew / GS3
Greenberg / Cliff / Nikon
Guild / Ed / IBM
Hamilton / Jeff / Applied Materials
Hayford / James / Semitool
Hom / Jeffrey / Underwriters Laboratory
Ibuka / Shigehito / Tokyo Electron
Kelly / Paul / GS3
Kiley / Andrew / Varian
Krov / Alan / Tokyo Electron America
Larsen / Sean / AMEC
Macklin / Ron
Mashiro / Supika / Canon Anelva
Mills / Ken / GS3
Nogawa / Kaoru / Safe Techno
O’Hehir / John / Applied Materials
Peterson / Susan / Earth Tech
Planting / Bert / ASML
Quizon / George / UL
Rehder / Alan / UL
Sawyer / Debbie / Semitool
Sinor / Russel / IBM
Sklar / Eric / Safety Guru, LLC
Trainor / Rich / TUV
Visty / John / EarthTech
Wright / Jim / Axcelis
Wyman / Matt / Koetter Fire Protection
Yakimow / Byron / Cymer
The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees.
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
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SEMI Draft Document 4625A
Line Item Revisions to SEMI S2-0706,Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (RevisionsRelated to Ventilation)
NOTICE: Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the safety guideline.
NOTICE: This document contains material that has been balloted and approved by the SEMI Environmental, Health, and Safety Committee but is not immediately effective. This material and the date on which it becomes effective are included in Delayed Revisions Sections1,2 and 3. The provisions of this information are not an authoritative part of the document until their effective dates. The main body of SEMI S2-0706 remains the authoritative version. Some or all of the provisions not yet in effect may be optionally applied prior to the effective date, providing that they do not conflict with provisions of the authoritative version other than those that are to be revised or replaced as part of the deferred change, and are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a NOTICE indicating its status.
1 Purpose
1.1 This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.
2 Scope
2.1 Applicability — This guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.
2.2 Contents — This document contains the following sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards and Documents
5. Terminology
6. Safety Philosophy
7. General Provisions
8. Evaluation Process
9. Documents Provided to User
10. Hazard Warning Labels
11. Safety Interlock Systems
12. Emergency Shutdown
13. Electrical Design
14. Fire Protection
15. Heated Chemical Baths
16. Ergonomics and Human Factors
17. Hazardous Energy Isolation
18. Mechanical Design
19. Seismic Protection
20. Automated Material Handlers
21. Environmental Considerations
22. Exhaust Ventilation
23. Chemicals
24. Ionizing Radiation
25. Non-Ionizing Radiation and Fields
26. Lasers
27. Sound Pressure Level
28. Related Documents
Appendix 1 — Enclosure Openings
Line Item 1, part a:
Appendix 2 — Design Principles and Test Methods for Evaluating Equipment Exhaust Ventilation
Appendix 3 — Design Guidelines for Equipment Using Liquid Chemicals
Appendix 4 — Ionizing Radiation Test Validation
Appendix 5 — Non-Ionizing Radiation (Other than Laser) and Fields Test Validation
Appendix 6 — Fire Protection: Flowchart for Selecting Materials of Construction
Appendix 7 — Laser Data Sheet – SEMI S2
2.3 Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This guideline is intended for use by supplier and user as a reference for EHS considerations. It is not intended to be used to verify compliance with local regulatory requirements.
3.2 It is not the philosophy of this guideline to provide all of the detailed EHS design criteria that may be applied to semiconductor manufacturing equipment. This guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.
3.3 Existing models and subsystems should continue to meet the provisions of SEMI S2-93A. Models with redesigns that significantly affect the EHS aspects of the equipment should conform to the latest version of SEMI S2. This guideline is not intended to be applied retroactively.
3.4 In many cases, references to standards have been incorporated into this guideline. These references do not imply applicability of the entire standards, but only of the sections referenced.
4 Referenced Standards and Documents
4.1 SEMIStandards and Safety Guidelines
SEMI E6 —Guide for Semiconductor Equipment Installation Documentation
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 — Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating System
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Guidelines for Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
4.2 ANSIStandards[1]
ANSI/IEEE C95.1—Standard for Safety Levels with Respect to Human Exposure to Radio Frequency Electromagnetic Fields, 3 kHz to 300 GHz
ANSI/RIA R15.06 — Industrial Robots and Robot Systems – Safety Requirements
ANSI/ISA S84.01 — Application of Safety Instrumented Systems for the Process Industry
4.3 CEN/CENELEC Standards[2]
EN 775 — Manipulating industrial robots – Safety
EN 1050 — Safety of Machinery – Risk Assessment
EN 1127-1 — Explosive atmospheres – Explosion prevention and protection – Part 1: Basic concepts and methodology
4.4 DINStandards[3]
DIN V VDE 0801 — Principle for Computers in Safety-Related Systems
4.5 IECStandards[4]
IEC 60825-1 — Safety of Laser Products, Part 1: Equipment Classification, Requirements, and User’s Guide
IEC 61010-1 — Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Equipment, Part 1: General Requirements
IEC 61508 — Functional Safety of Electrical/Electronic/Programmable Electronic Safety-Related Systems
4.6 ISOStandards[5]
ISO 10218 — Manipulating industrial robots–Safety
ISO 13849-1 (EN 954-10) –Safety of Machinery –Safety-Related Parts of Control Systems
4.7 NFPAStandards[6]
NFPA 12 — Standard on Carbon Dioxide Extinguishing Systems
NFPA 13 — Standard for Installation of Sprinkler Systems
NFPA 72 — National Fire Alarm Code
NFPA 497 — Recommended Practice for the Classification of Flammable Liquids, Gases, or Vapors and of Hazardous (Classified) Locations for Electrical Installations in Chemical Process Areas
NFPA 704 — Identification of the Fire Hazards of Materials
NFPA 2001 — Standard on Clean Agent Fire Extinguishing Systems
4.8 Underwriters LaboratoriesStandard[7]
UL 508A — Industrial Control Panel
4.9 US Code of Federal Regulations[8]
21CFR Parts 1000-1050 — Food and Drug Administration/Center for Devices and Radiological Health (FDA/CDRH), Performance Standards for Electronic Products, Title 21 Code of Federal Regulations, Parts 1000-1050
4.10 Other Standards and Documents
ACGIH, Industrial Ventilation Manual[9]
ASHRAE Standard 110 — Method of Testing Performance of Laboratory Fume Hoods[10]
Burton, D.J., Semiconductor Exhaust Ventilation Guidebook[11]
UniformBuilding Code™ (UBC)[12]
Uniform Fire Code™[13]
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 ACGIH®—American Conference of Governmental Industrial Hygienists (ACGIH is a registered trademark of the American Conference of Governmental Industrial Hygienists.)
5.1.2 ASHRAE —American Society of Heating, Refrigeration, and Air Conditioning Engineers
5.1.3 MPE — Maximum Permissible Exposure
5.1.4 NOHD — Nominal Ocular Hazard Distance
5.2 Definitions
NOTE 1: Composite reports using portions of reports based upon earlier versions of SEMI S2 and SEMI S10 may require understanding of the SEMI S2-0703 or SEMI S10-1296 definitions for the terms hazard, likelihood, mishap, severity, and risk.
5.2.1 abort switch — a switch that, when activated, interrupts the activation sequence of a fire detection or fire suppression system.
5.2.2 accredited testing laboratory — an independent organization dedicated to the testing of components, devices, or systems; competent to perform evaluations based on established safety standards; and recognized by a governmental or regulatory body.