Background Statement for SEMI Draft Document 4605D
Line Item Revisions to SEMI S22-1110, SAFETY GUIDELINE FOR THE ELECTRICAL DESIGN OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Delayed Revisions on Multiple Topics
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background Statement
This ballot consists of 4 line items. Each line item is shown as a separate delayed revisions section.
Line item 1 -- Clarification of creepage and clearance material
Line item 2 -- Adding electrical burn concern to § 10 title to align with previously approved change to S22.
Line item 3 -- Clarification of Transformer Impedance Method
Line item 4 -- Clarification of Ampacity tables
Please forward a courtesy copy of any comments or negatives against the ballot to Chris Evanston at , Ed Guild at , and Sean Larsen at .
As this is a technical ballot, all votes of reject must be accompanied by reasons (negatives) and also be sent to SEMI staff before the balloting deadline or they will be considered abstention votes. If you have any comments on the ballot (suggestions or questions that you do not believe are technical negatives) please clearly indicate them as COMMENTS to assist us with reducing the administrative overhead in handling them during the task force and committee meetings.
Review and Adjudication Information
Task Force Review / Committee AdjudicationGroup: / Electrical Safety / S22 TF / NA EHS Committee
Date: / Monday, March 28 (tentative) / 31 March 2011,
Time & Timezone: / 1600-1800 PDT (tentative) / 0900-1800 PDT
Location: / Applied Materials
3050 Bowers Ave
Applied GlobalUniversity (tentative) / Applied Materials
3050 Bowers Ave
Applied GlobalUniversity (tentative)
City, State/Country: / Santa Clara, CA, USA (tentative) / Santa Clara, CA, USA (tentative)
Leader(s): / Chris Evanston (Salus)
Ed Guild (IBM)
Sean Larsen (Cymer) / Chris Evanston (Salus)
Sean Larsen (Cymer)
Eric Sklar (Safety Guru, LLC)
James Beasley (ISMI)
Standards Staff: / Ian McLeod (SEMI NA)
408.943.6996
/ Ian McLeod (SEMI NA)
408.943.6996
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.
Safety Checklist for SEMI Draft Document #4605D
Title: Line Item Revisions to SEMI S22-1110, SAFETY GUIDELINE FOR THE ELECTRICAL DESIGN OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Developing/Revising Body
Name/Type: / S22 Task ForceTechnical Committee: / Environmental Health and Safety
Region: / North America
Leadership
Position / Last / First / AffiliationLeader / Evanston / Chris / Salus Engineering International
Leader / Guild / Ed / International Business Machines (IBM)
Leader / Larsen / Sean / Cymer
* Only necessary if different from leaders
Documents, Conflicts, and Consideration
Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee
# and Title / Manner of ConsiderationSEMI S2 – Environmental Health and Safety Guideline for Semiconductor Manufacturing Equipment / Aligning and improving support of S2 requirements and callout for using a valid electrical safety standard.
IEC 60204-33 – Safety of machinery – Electrical equipment of machines – Part 33: Requirements for semiconductor fabrication equipment / Aligning and looking to guide future revisions.
NFPA 79 – Electrical standard for industrial machinery / Reviewing to avoid direct conflicts unless intentional.
ANSI/IEC 60950-1 – Information technology equipment - Safety - Part 1: General requirements / Reviewed to determine appropriate criteria to reference
ANSI/IEC 61010-1 – Safety requirements for electrical equipment for measurement, control, and laboratory use – Part 1: General requirements / Reviewed to determine appropriate criteria to reference
Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline
# and Title / Inconsistency with This Safety GuidelineIEC 60204-33 – Safety of machinery – Electrical equipment of machines – Part 33: Requirements for semiconductor fabrication equipment / The purpose of S22 is to document the industry best practices which do not strictly meet any of the existing Industrial Electrical design standards.
NFPA 79 – Electrical standard for industrial machinery
IEC 60204-1– Safety of machinery – Electrical equipment of machines –
NFPA 70 – National Electrical Code
UL 508A – Industrial Control Panels
Other conflictswith known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical
# and Title / Nature of Conflict with This Safety GuidelineSee above / See above
Participants and Contributors
Name / AffiliationChris Evanston / Salus Engineering, Inc.
Ed Guild / IBM
Alan Crockett / KLA-Tencor
Alan Rehder / UL
Bert Planting / ASML
Bill Howell / Semitool
Bill Petry / IBM
Brian Epstein / ENT Consulting
Carl Wong / AKT / AMAT
Charles Hoover / Rockwell
Chuck Mello / UL
Dave Deboer / ASML
David Bernardin / Cymer
David Sexton / TUV
Edward Karl / Applied Materials
Eric Sklar / Safety Guru
James Beasley / ISMI
James Oswalt / Mattson
Jeff Hamilton / Applied Materials
Jeff Hom / UL
John Freudenberg / Hypertherm
Keith Endow / KLA-Tencor
Kenji Sugihara / Panasonic
Larry Johnson / Estec
Lauren Crane / Applied Materials
Mark Krauss / EHS2
Marv Shilt / Rockwell
Mike Sherman / FSI
Nigusu Ergete / Intertek
Noguo Oi / Ulvac
Paul Kryska / Novellus
Sean Allen / IBM
Sean Larsen / Cymer
Steve Brody / Brooks Automation
Steve Roberge / Axcelis
Sunny Rai / Intertek
Supika Mashiro / Canon Anelva
T. Nishihara / DNS
Thomas Hoertig / Pilz Automation
Thomas Pilz / Pilz Automation
Tou Vang / Asyst Technologies
Udo Heinz / TUV
William Petry / IBM
Yoshiro Sugita / TUV
The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees.
1
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
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SEMI Draft Document 4605D
Line Item Revisions to SEMI S22-1110, SAFETY GUIDELINE FOR THE ELECTRICAL DESIGN OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Delayed Revisions on Multiple Topics
Line Item 1
DELAYED REVISIONS 1(Effective July 1, 2012)
Creepage and Clearance Clarification
NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the SEMI Environmental Health and Safety Committee, but is not immediately effective. The provisions of this material are not an authoritative part of the document until their effective date. The main body of SEMI S22-1110 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may be applied prior to the effective date, providing they do not conflict with portions of the authoritative version other than those that are to be revised or replaced as part of the deferred revision, and are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through.
D1-1 Revision to § 5 (Terminology) (OPTIONAL Before Effective Date)
D1-1.1 Delete ¶ ¶ 5.1.8, 5.1.9, 5.1.14 and § 5.1.53 as shown below
5.1.8 clearance distance — the shortest path between two conductive parts normally carrying current, or between a conductive part normally carrying current and a conductive part that is connected to the protective earthing system, measured through air.
5.1.9 Comparative Tracking Index (CTI) — the value obtained in accordance with Method A of IEC 60112 which determines the Material Group of a printed wiring board. Where the CTI or material group is not known, Material Group IIIb should be used.
5.1.14 creepage distance — the shortest path between two conductive parts normally carrying current or between a conductive part normally carrying current and a conductive part that is bonded to the protective earthing system, measured along the surface of the insulation
5.1.53 pollution degree — for the purpose of evaluating clearances the following two degrees of pollution in the microenvironment are recognized for use with this document:
5.1.53.1 pollution degree 1 — no pollution or only dry, non conductive pollution occurs. The pollution has no influence. Cleanroom Class 1000 or less.
NOTE 1: Cleanroom Class 1000 or less is pollution degree 1, however the pollution degree in a particular area in a given piece of equipment may exceed pollution degree 1, even if the equipment is installed in a cleanroom class 1000 or less.
5.1.53.2 pollution degree 2 — normally only non-conductive pollution occurs. Occasionally, however, a temporary conductivity caused by condensation is expected. Cleanroom Class greater than 1000.
NOTE 12: Cleanroom Class greater than 1000 is pollution degree 2, however the pollution degree in a particular area in a given piece of equipment may exceed pollution degree 2, even if the equipment is installed in a cleanroom greater than 1000.
D1-2 Revision to § 10 (Protection Against Electrical Shock) (OPTIONAL Before Effective Date)
D1-2.1 Modify ¶ 10.2.2 as shown below
10.2.2 Spacing between uninsulated energized parts and conductive enclosures should be maintained in compliance with creepage and clearance criteria of an applicable standard (e.g., ANSI/IEC 61010-1, ANSI/IEC 60950-1), Appendix 3 Tables A3-1 and A3-2 or determined to be adequate by dielectric testing in accordance with § 22.
NOTE XX: Related Information 4 has guidance information on creepage and clearance.
D1-3 Revision to § 15 (Electrical Enclosures) (OPTIONAL Before Effective Date)
D1-3.1 Modify ¶ 15.3.6 as shown below
15.3.6 Creepage and clearances should meet the criteria of basic insulation between primary parts and the earthed electrical enclosure for the working voltages involved. See Appendix 3 Tables A3-1 and A3-2creepage and clearance criteria in an applicable standard (e.g., ANSI/IEC 61010-1, ANSI/IEC 60950-1).
NOTE XX: Related Information 4 provides guidance and explanatory material on creepage and clearance values as well.
D1-4 Revision to Appendix 1 (Ampacity Tables) (OPTIONAL Before Effective Date)
D1-4.1 Modify Table Note #1 of Table A7-1 as shown below.
#1 Refer toTable A4-1See an applicable standard such as ANSI/IEC 61010-1 or ANSI/IEC 60950-1for creepage and clearance distances between non-insulated busbars.
NOTE XX: Related Information 4 can be used for guidance.
D1-5 Delete Appendix 4 (Creepage and Clearance Tables) (OPTIONAL Before Effective Date)
D1-5.1 Delete Appendix 4 as shown below.
APPENDIX 4
(Creepage and Clearance Tables)
Table A4-1 Table A4-1 Creepage and Clearance in Class 1000 or Less Cleanroom
Basic/Supplementary (mm) / Double/Reinforced (mm)Installation Category / Working Voltage / Clearance / Creepage / Test Voltage, Vrms / Clearance / Creepage / Test Voltage, Vrms3
Category 1 / 50 / 0.1 / 0.18 / 230 / 0.10 / 0.35 / 400
100 / 0.1 / 0.25 / 350 / 0.12 / 0.50 / 510
150 / 0.1 / 0.30 / 490 / 0.40 / 0.60 / 740
300 / 0.5 / 0.70 / 820 / 1.60 / 1.60 / 1400
600 / 1.5 / 1.70 / 1350 / 3.30 / 3.40 / 2300
1000 / 3.0 / 3.20 / 2200 / 6.50 / 6.50 / 3700
Category 2 / 50 / 0.1 / 0.18 / 350 / 0.12 / 0.35 / 510
100 / 0.1 / 0.25 / 490 / 0.40 / 0.50 / 740
150 / 0.5 / 0.50 / 820 / 1.60 / 1.60 / 1400
300 / 1.5 / 1.50 / 1350 / 3.30 / 3.30 / 2300
600 / 3.0 / 3.00 / 2200 / 6.50 / 6.50 / 3700
1000 / 5.5 / 5.50 / 3250 / 11.50 / 11.50 / 5550
Category 3 / 50 / 0.1 / 0.18 / 490 / 0.4 / 0.4 / 740
100 / 0.5 / 0.50 / 820 / 1.6 / 1.6 / 1400
150 / 1.5 / 1.50 / 1350 / 3.3 / 3.3 / 2300
300 / 3.0 / 3.00 / 2200 / 6.5 / 6.5 / 3700
600 / 5.5 / 5.50 / 3250 / 11.5 / 11.5 / 5550
1000 / 8.0 / 8.00 / 4350 / 16.0 / 16.0 / 7400
#1 Specified creepage distances less than 0.70 mm may be reduced on uncoated printed wiring boards according to the following table.
#2 Cleanroom Class 1000 or less is pollution degree 1, however the pollution degree in a particular area in a given piece of equipment may exceed pollution degree 1, even if the equipment is installed in a cleanroom class 1000 or less.
Equipment Creepage Distance, mm / PWB Creepage DistanceBasic or Supple- mentary Insulation / Double or Reinforced
Category 1 / Category 2 / Category 3
0.18 / 0.1 / No reduction / No reduction
0.25 / 0.1
0.30 / 0.2
0.35 / 0.10 / 0.12
0.50 / 0.5 / 0.20 / 0.40
0.60 / 0.45
#1 If necessary to test using DC voltage, increase specified test voltage by 42%.
Table A4-2 Table A4-3 Creepage and Clearance in Greater than Class 1000 Cleanroom
Basic or Supplementary Insulation / Double or Reinforced InsulationInstallation Category / Working Voltage / Clearance Distance / Creepage Distance / Test Voltage, rms1 / Clearance Distance / Creepage Distance / Test Voltage, rms1
CTI > 600 / CTI > 400 / CTI > 100 / Printed Wiring Board CTI > 175 / CTI > 600 / CTI > 400 / CTI > 100 / Printed Wiring Board CTI > 175
Category 1 / 50 / 0.2 / 0.6 / 0.85 / 1.2 / 0.20 / 230 / 0.2 / 1.2 / 1.7 / 2.4 / 0.4 / 400
100 / 0.2 / 0.7 / 1.00 / 1.4 / 0.20 / 350 / 0.2 / 1.4 / 2.0 / 2.8 / 0.4 / 510
150 / 0.2 / 0.8 / 1.10 / 1.6 / 0.35 / 490 / 0.4 / 1.6 / 2.2 / 3.2 / 0.7 / 740
300 / 0.5 / 1.5 / 2.10 / 3.0 / 1.40 / 820 / 1.6 / 3.0 / 4.2 / 6.0 / 2.8 / 1400
600 / 1.5 / 3.0 / 4.30 / 6.0 / 3.00 / 1350 / 3.3 / 6.0 / 8.5 / 12.0 / 6.0 / 2300
1000 / 3.0 / 5.0 / 7.00 / 7.0 / 5.00 / 2200 / 6.5 / 10.0 / 14.0 / 20.0 / 10.0 / 3700
Category 2 / 50 / 0.2 / 0.6 / 0.85 / 1.2 / 0.2 / 350 / 0.2 / 1.2 / 1.7 / 2.4 / 0.4 / 510
100 / 0.2 / 0.7 / 1.00 / 1.4 / 0.2 / 490 / 0.2 / 1.4 / 2.0 / 2.8 / 0.4 / 740
150 / 0.5 / 0.8 / 1.10 / 1.6 / 0.5 / 820 / 1.6 / 1.6 / 2.2 / 3.2 / 1.6 / 1950
300 / 1.5 / 1.5 / 2.10 / 3.0 / 1.5 / 1350 / 3.3 / 3.3 / 4.2 / 6.0 / 3.3 / 3250
600 / 3.0 / 3.0 / 4.30 / 6.0 / 3.0 / 2200 / 6.5 / 6.5 / 8.5 / 12.0 / 6.5 / 5250
1000 / 5.5 / 5.5 / 7.00 / 10.0 / 5.5 / 3250 / 11.5 / 11.5 / 14.0 / 24.0 / 11.5 / 7850
Category 3 / 50 / 0.2 / 0.6 / 0.85 / 1.2 / 0.2 / 490 / 0.4 / 1.2 / 1.7 / 2.4 / 0.4 / 740
100 / 0.5 / 0.7 / 1.00 / 1.4 / 0.5 / 820 / 1.6 / 1.6 / 2.0 / 2.8 / 1.6 / 1950
150 / 1.5 / 1.5 / 1.50 / 1.6 / 1.5 / 1350 / 3.3 / 3.3 / 3.3 / 3.3 / 3.3 / 3250
300 / 3.0 / 3.0 / 3.00 / 3.0 / 3.0 / 2200 / 6.5 / 6.5 / 6.5 / 6.5 / 6.5 / 5250
600 / 5.5 / 5.5 / 5.50 / 6.0 / 5.5 / 3250 / 11.5 / 11.5 / 11.5 / 12.0 / 11.5 / 7850
1000 / 8.0 / 8.0 / 8.00 / 10.0 / 8.0 / 4350 / 16.0 / 16.0 / 16.0 / 20.0 / 16.0 / 10450
#1 If necessary to test using DC voltage, increase specified test voltage by 42%.
#2 Cleanroom Class greater than 1000 is pollution degree 2, however the pollution degree in a particular area in a given piece of equipment may exceed pollution degree 2, even if the equipment is installed in a cleanroom greater than 1000.
D1-6 Add RI-4 () (OPTIONAL Before Effective Date)
D1-6.1 Create new RI-4 as shown below.
RELATED INFORMATION 4
Creepage and Clearance
NOTICE: This related information is not an official part of SEMI S22 and was derived from the work of the global Environmental Health and Safety Committee. This related information was approved for publication by full letter ballot procedures.
R4-1 Introduction
R4-1.1 This RI is a primer on creepage and clearance. Fully addressing this issue requires working through the many documents that are referenced and the methods used within those documents. This RI is meant as a brief introduction to the topic and includes many references to additional information.
R4-1.2 Although creepage and clearance evaluations and dielectric withstand testing are often considered equivalent methods of demonstrating adequate spacing in the design of electrical assemblies, they address the concern from different viewpoints. The primary benefit of creepage and clearance evaluations is that they provide design guidance on required spacing before the design is completed and hardware is built. A dielectric withstand test can provide feedback on the design adequacy only after the prototype has been built.
R4-2 Terminology
R4-2.1 clearance distance — the shortest path, measured through air, between two conductive parts that normally carry current, or between a conductive part that normally carriescurrent and a conductive part that is connected to the protective earthing system
R4-2.2 creepage distance — the shortest path,measured along the surface of insulating parts, between two conductive parts that normally carry current or between a conductive part that normally carriescurrent and a conductive part that is bonded to the protective earthing system
R4-2.3 CTI — comparative tracking index — the value obtained in accordance with Method A of IEC 60112 which determines the Material Group of a printed wiring board. Where the CTI or material group is not known, Material Group IIIb is recommended to be used.
R4-2.4 installation category— A group, based on the maximum transient voltages it is reasonably foreseen to experience, of electrical equipment. In this document, four categories are described, but design guidance is provided for only three. The values and notes in table R4-1 can be used as guidance in determining the installation category of a piece of electrical equipment.
R4-2.5 pollution degree — the level of particle concentration and condensation risk:
R4-2.5.1 pollution degree 1 — no pollution or only dry, non conductive pollution occurs. The pollution has no influence.
R4-2.5.2 pollution degree 2 — normally only non-conductive pollution occurs. Occasionally, however, a temporary conductivity caused by condensation is expected.
R4-2.6 tracking — a process that produces a partially conductive path of localized deterioration on the surface of an insulating material due to the electric discharges on or close to the surface
R4-3 Installation Category
R4-3.1 Installation categorization is a method of grouping electrical equipment based on the maximum transient voltages it is reasonably foreseen to experience. Four categories are provided as guidance below for equipment design. The values in Table R4-1and descriptions below can be used as guidance in determining the Installation Category of a piece of electrical equipment.
R4-3.1.1 Typically, Category I circuits are composed of signal level devices and are protected to limit transients. Category 1 circuits may include circuits supplied from power supplies or highly filtered mains AC voltages.
R4-3.1.2 Typically, Category 2 circuits experience switching transients from devices located in the same SME but are protected from switching transients of neighboring SME, and overvoltages caused by lightning. Category 2 circuits may include AC power distribution circuits within SME.
R4-3.1.3 Typically Category 3 circuits are sourced from a main facility transformer and experience switching transients of neighboring SME and overvoltages caused by lightning. Category 3 circuits may include the main power supply to SME.
R4-3.1.4 Category 4 circuits are typically considered to be the power distribution equipment and generally end at the facility transformers. Category 4 is generally not applied to SME.
Table R4-1 Installation Category of a Circuit.
For Working Voltages (rms or DC) up to / Circuit category according to maximum, reasonably foreseeable, transient overvoltage (V peak)#1Transient overvoltages#2 no higher than
Category 1 / Category 2 / Category 3
50 / 330 / 500 / 800
100 / 500 / 800 / 1500
150 / 800 / 1500 / 2500
300 / 1500 / 2500 / 4000
600 / 2500 / 4000 / 6000
1000 / 4000 / 6000 / 8000
#1 This information is based on IEC 60664-1:2007
#2 Overvoltage is the voltage imposed in addition to the working voltage.
R4-4 Creepage and Clearance in Class 6 or Less Cleanroom
R4-4.1 Cleanroom Class 6 (per ISO 14644-1 which is equivalent to Class 1000 of FED-STD-209E) or less (class 1 through class 5) is pollution degree 1, however the pollution degree in a particular area in a given piece of equipment may exceed pollution degree 1, even if the equipment is installed in a cleanroom class 6 or less.
NOTE 1: FED-STD-209E has been made obsolete by the General Services Administration and they now reference ISO 14664. The reference to the obsolete standard is provided because the class 1000 designation is still commonly understood.
R4-4.2 Table R4-2 provides guidance on appropriate creepage and clearance values for Class 6 or less cleanroom environment.
R4-4.2.1 If the geometry of a subassembly is complex or difficult to access, the test voltage can be used to verify adequate spacing is maintained within a portion of the assembly similar to a dielectric withstand test (see § 22).
NOTE 2: The test voltages specified for creepage and clearance are often different from the usual test voltages specified for dielectric withstand testing. While creepage and clearance evaluations and dielectric withstand testing are often considered equivalent means of demonstrating adequate spacing in the design of electrical assemblies, the two methods address the concern differently.
R4-4.3 Table R4-3 provides guidance on creepage distances less than 0.70 mm for uncoated printed wiring boards.
Table R4-2 Creepage and Clearance in Class 6 or Less Cleanroom
Basic/Supplementary (mm) / Double/Reinforced (mm)Installation Category#1 / Working Voltage, V / Clearance, mm / Creepage, mm / Test Voltage, Vrms#2 / Clearance, mm / Creepage, mm / Test Voltage, Vrms#2
Category 1 / 50 / 0.1 / 0.18 / 230 / 0.10 / 0.35 / 400
100 / 0.1 / 0.25 / 350 / 0.12 / 0.50 / 510
150 / 0.1 / 0.30 / 490 / 0.40 / 0.60 / 740
300 / 0.5 / 0.70 / 820 / 1.60 / 1.60 / 1400
600 / 1.5 / 1.70 / 1350 / 3.30 / 3.40 / 2300
1000 / 3.0 / 3.20 / 2200 / 6.50 / 6.50 / 3700
Category 2 / 50 / 0.1 / 0.18 / 350 / 0.12 / 0.35 / 510
100 / 0.1 / 0.25 / 490 / 0.40 / 0.50 / 740
150 / 0.5 / 0.50 / 820 / 1.60 / 1.60 / 1400
300 / 1.5 / 1.50 / 1350 / 3.30 / 3.30 / 2300
600 / 3.0 / 3.00 / 2200 / 6.50 / 6.50 / 3700
1000 / 5.5 / 5.50 / 3250 / 11.50 / 11.50 / 5550
Category 3 / 50 / 0.1 / 0.18 / 490 / 0.4 / 0.4 / 740
100 / 0.5 / 0.50 / 820 / 1.6 / 1.6 / 1400
150 / 1.5 / 1.50 / 1350 / 3.3 / 3.3 / 2300
300 / 3.0 / 3.00 / 2200 / 6.5 / 6.5 / 3700
600 / 5.5 / 5.50 / 3250 / 11.5 / 11.5 / 5550
1000 / 8.0 / 8.00 / 4350 / 16.0 / 16.0 / 7400
#1 Installation Category guidance is provided in Table R4-1