Instructions start on page 8.

Region:

Ametek B.V.
Ringbaan Noord 103
P.O. Box 4144
5004JC Tilburg
The Netherlands
Tel: +31 13 536000
Fax: +31 13 535 6279

Preventive Maintenance Report

Date: / Report date
Customer:
EDAX Order Number (S#): / S######
Analyzer Serial Number: / ####
Ardexus Product Number:

March 16, 2016

Customer Information / System Information
Customer: / Analyzer Model: / S/N:
User: / Microscope Vendor:
Address: / Microscope Model:
Address: / EDAX Computer: / S/N:
Address: / Operating System: / Svc Pack:
City: / Printer: / S/N:
State: / Monitor: / S/N:
Zip code: / Order Number (S#): / S######
Country:
Phone:

System Configuration

EDS (Yes/No)? / YesNo / WDS (Yes/No)? / YesNo / EBSD (Yes/No)? / YesNo

(click on button to update configuration after filling out above)

Discuss system performance with the customer:

User Interface / Electrical
Check monitor function: / YesNoOKN/A / Check Mains supply: / YesNoOKN/A
Check Keyboard function: / YesNoOKN/A / Measured Input Voltage (in VAC):
Check Mouse function: / YesNoOKN/A / Line Frequency (in Hz):
Check / Set regional settings: / YesNoOKN/A / Check Ground/Earthing: / YesNoOKN/A
Analyzer / N/A / YesNoOKN/A
Check cooling fans in analyzer: / YesNoOKN/A / Check Hyperthreading is disabled: / YesNoOKN/A
Check HD Write-cache setting: / YesNoOKN/A / Check condition of all cables and connectors: / YesNoOKN/A
Check PCBs inside EDAX Analyzer (seated properly): / YesNoOKN/A
Imaging / Stage and Column Control
Check all software and hardware functions: / YesNoOKN/A / Stage Control: / YesNo
Check and adjust imaging option: / YesNoOKN/A / Column Control: / YesNoOKN/A
Imaging (+ imaging option): / YesNoOKN/A / DCOM Control (Yes/No): / YesNo
Mapping: / YesNoOKN/A / N/A:
Line Scan: / YesNoOKN/A / Microscope Software Version:
Line Measurements, Scan Extent: / Microscope Control notes:
X = / IP Address or Port
Y =
Use SG2 Shell program, print results (PDF + Printer): / YesNoOKN/A

Login Setup

Check Administrator and User logins with appropriate privileges: / YesNoOKN/A
Check Windows Login: / YesNoOKN/A
Check EDAX Software Login: / YesNoOKN/A

Software upgraded during PM (Yes/No)?

Comments / Notes

Complete pages: 1-3

PM Completion Date:
Customer:
User:
Signature:
Date:
EDAX Representative:
Date:

Contact information

For Service: / For Applications:
Phone # : / Phone #:
Email: / Email:
For Sales:
Phone #:
Email:

(click on this button to update fields in the form above)

Print - Based on configuration: Print pages: 1-3

File, Save As…. “#### PM.doc” or “#### PM.pdf”

EDAX Inc. / Ametek B.V. / Ametek Nordic AB
Ametek, Materials Analysis Division / Ringbaan Noord 103 / EDAX Business Unit
91 McKee Drive / P.O. Box 4144 / Krossgatan 36
Mahwah, NJ 07430 / 5004JC Tilburg / SE-162 50 Vällingby
USA / The Netherlands / Sweden
Tel: 201 529 4880 / Tel: +31 13 536000 / Tel: +46(0)8 519 060 31
Fax: 201 529 4760 / Fax: +31 13 535 6279 / Fax: +46(0)8 519 060 34
Mob: +46(0)73 367 0785
Ametek GMBH / EDAX Business Unit / Ametek Inc. Beijing
Geschäftsbereich EDAX / Ametek Co. Ltd / Representative Office
Rudolh-Diesel-Straße 16 / 3F, Shiba NBF Tower / Room 2202, 22/F Citic Building
64331 Weiterstadt (Germany) / 1-30 ShibaDaimon 1-chrome Minato-ku / 19 Jianguimenwai Dajie
Tokyo 105-0012 Japan / Beijing, 100004, P.R. China
Tel: +49 6150-543-1134 / Tel: +81 3 6809 2404 / Tel: +86 10 8526 2111-22
Fax: +81 3 6809 2410 / Fax: +86 10 8526 21414
EDAX Business Unit / EDAX Business Unit
Ametek Instruments India Pvt., Ltd / Ametek Singapore Pte Ltd
601, Raaj Chambers / No. 43 Changi South Avenue 2
Off Old Nagardas Road, Andheri (E) / #04-01 Singapore 486164
Mumbai – 4100 069 / Tel: +65-6484-2388
Tel: +91-22-6196-8200 / Fax: +65-6481-6588
Fax: +9122-2836-3613


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EDS Information

Detector Model: / Apollo XFApollo XLTApollo XLTWApollo XLT2Apollo XLT2 WElementOctane EliteOctane PlusOctane PrimeOctane ProOctane SuperOctane T Ultra WOctane UltraOctane T Optima-30Octane T Optima-60Octane T PlusApollo 10 / XVApollo 40Apollo XApollo XLApollo XPPSiLi / S/N:
Detector Part Number: / Motorized Slide (Yes/No)? / YesNo
EDAX Software (select): / TEAMGenesisGenesis + TEAMTEAM PrimeGenesis Prime / eDPP:
N/A
EDAX Sales Order Number (S#): / S###### / Ardexus Product Number:

(click on button after updating EDS information above)

EDS Detector

Adjust mechanical setup of the detector: / YesNoOKN/A
Adjust the hard stops of the detector: / YesNoOKN/A
Verify the vacuum integrity of the microscope: / YesNoOKN/A
Use Shell program, calibrate all Amp Times using Al and Cu: / YesNoOKN/A
Make SEC calibration, document results: / YesNoOKN/A
Use Shell program, print results (PDF + Printer): / YesNoOKN/A
Record MnKα resolution (eV):
Check Support Box LEDs: / YesNoOKN/A
N/A / YesNoOKN/A
Verify detector cool down: / YesNoOKN/A
N/A / YesNoOKN/A
N/A / YesNoOKN/A
N/A / YesNoOKN/A

Comments / Notes:

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Detector Performance

Resolution / Check
MnKα resolution / eV / YesNoOKN/A
BKα resolution / eV / YesNoOKN/A
CKα resolution / eV / YesNoOKN/A
NKα resolution / eV / YesNoOKN/A
OKα resolution / eV / YesNoOKN/A
FKα resolution / eV / YesNoOKN/A
Check Peak shift between 20% and 40% Dead Time / eV / YesNoOKN/A
Check low energy efficiency at 20kV using Cu (Net Int. CuLα/CuKα) / YesNoOKN/A

SEC Factor Correction

Element / Sample / HV / Wt% / Wt% / Peak pos. / Exp. SEC / Meas.SEC / Check
BKα / CaB6 / 10kV / B=61.81 / Ca=38.19 / 0.2-4 / YesNoOKN/A
CKα / SiC / 5kV / C=29.95 / Si=70.05 / 0.4-2 / YesNoOKN/A
NKα / CrN / 15kV / N=21.22 / Cr=78.78 / 0.1-1 / YesNoOKN/A
OKα / Fe203 / 15kV / O=30.06 / Fe=69.94 / 0.2-1 / YesNoOKN/A
FKα / CaF2 / 10kV / F=48.66 / Ca=51.33 / 0.2-1 / YesNoOKN/A


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EBSD Information

EBSD Model Number: / S/N:
EBSD Part Number:
EDAX Software (select): / TEAMOIM + TEAMOIM
TEAM Software version:
N/A
EDAX Sales Order Number (S#): / S###### / Ardexus Product Number:

(click on button after updating EBSD information)

EBSD Detector

Check
Check Phosphor screen for damage / YesNoOKN/A
Check Hard Stop adjustment / YesNoOKN/A
Check Touch Alarm sensor / YesNoOKN/A
Check Motion control / YesNoOKN/A
Check / Adjust Analyze Scale settings / mm / YesNoOKN/A
Check SEM vacuum during interface I/O movement / YesNoOKN/A
Check Camera Focus and Centering. Adjust video if required / YesNoOKN/A
Verify Top/Bottom orientation of Camera / YesNoOKN/A

System Calibration

Calibrate on Ni Sample at center of image at specified optimal WD

Check
Calibrate on Ni sample at center of image / Fit < 1.0 / CI > 0.8 / YesNoOKN/A
SEM calibration (in Beam Setting Panel) / Width: / Height: / YesNoOKN/A
Check Beam Control
Pixels/µm / X= / Y= / Z= / YesNoOKN/A
Accessory: Forward Scatter Detector (FSD) / YesNoOKN/A

System Performance for EBSD

On Standard TSL Ni Sample / Check
PC Values saved in software (Z = ~7 % nominal)
Pattern center (PC) calibration performed / YesNoOKN/A
WD=(-4mm) / X= / Y= / Z= / YesNoOKN/A
WD=(-2mm) / X= / Y= / Z= / YesNoOKN/A
WD=(Spec.) / X= / Y= / Z= / YesNoOKN/A
WD=(+2mm) / X= / Y= / Z= / YesNoOKN/A
WD=(+4mm) / X= / Y= / Z= / YesNoOKN/A
WD=(+6mm) / X= / Y= / Z= / YesNoOKN/A
WD=(+8mm) / X= / Y= / Z= / YesNoOKN/A
Check values in .ini file / YesNoOKN/A
Check image of Nickel sample / YesNoOKN/A
Software indexed patterns (CI > 0.100) on standard TSL Ni sample / YesNoOKN/A
Check software scans and indexes 500 x 500 µm grid at 10 µm step / YesNoOKN/A
Comments/Notes:


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WDS Information

WDS Model Number: / S/N:
WDS Part Number:
EDAX Software (select): / TEAMGenesisGenesis + TEAM / TEXS or LEXS ? LEXSTEXS
TEAM Software version:
N/A
EDAX Sales Order Number (S#): / S###### / Ardexus Product Number:

(click on button after updating EBSD information)

P10 Gas

Check Regulator pressure (0.14-0.28 Bar / 2.03-4.06 PSI) / YesNoOKN/A
Check P10 Gas Flow (Max 2 liter / hour) / YesNoOKN/A

Specimen Current Check

Check Specimen Current Meter / YesNoOKN/A
Check RS232 Communication / YesNoOKN/A
Compare read out between Meter and Current Monitor / YesNoOKN/A

This section does not apply to LEXS

Power / YesNoOKN/A
USB / YesNoOKN/A
X Motor / YesNoOKN/A
Y Motor / YesNoOKN/A
Z Motor / YesNoOKN/A
X Encoder / YesNoOKN/A
Y Encoder / YesNoOKN/A
Z Encoder / YesNoOKN/A
FPGA / YesNoOKN/A
Check optimal settings for Horizontal (H) / YesNoOKN/A
Check optimal settings for Vertical (V) / YesNoOKN/A
Check optimal settings for Length (L) / YesNoOKN/A

WDS Performance Test

Use WDS Shell program + Test Certificate (LEXS 10 kV / TEXS 20 kV)
Calibrate Diffractor 1 using B Kα (LEXS) / YesNoOKN/A
Calibrate Diffractor 1 using Cu Kα (TEXS) / YesNoOKN/A
Calibrate Diffractor 2 using C Kα (LEXS + TEXS) / YesNoOKN/A
Calibrate Diffractor 2 using N Kα (LEXS + TEXS) / YesNoOKN/A
Calibrate Diffractor 3 using O Kα (LEXS + TEXS) / YesNoOKN/A
Calibrate Diffractor 3 using Cu Kα (LEXS + TEXS) / YesNoOKN/A
Calibrate Diffractor 4 using AL Kα (LEXS + TEXS) / YesNoOKN/A
Calibrate Diffractor 5 using Si Kα (LEXS + TEXS) / YesNoOKN/A

DQX Adjustments

Calibrate Diffractor 1 using B Kα (LEXS) / YesNoOKN/A
Calibrate Diffractor 1 using Cr Kα + Cu Kα (TEXS) / YesNoOKN/A
Calibrate Diffractor 2 using C Kα + N Kα / YesNoOKN/A
Calibrate Diffractor 3 using O Kα + Cu Lα / YesNoOKN/A
Calibrate Diffractor 4 using Al Kα + Cu Lα / YesNoOKN/A
Calibrate Diffractor 5 using Si Kα + Mo Lα / YesNoOKN/A
Print and attach Acceptance Test Certificate (2x) to report / YesNoOKN/A
Comments / Notes:

Instructions

Entering Data

The PM report is made with fields that should be filled out electronically. Because of different regional requirements and configurations, some fields will change based on region and configurations. Always start at the top and work down.

Filling out the form automatically populates some fields later in the form, such as Customer and Sales numbers.

Fill in the shaded fields with information. You can use the mouse to move from field-to-field. Do NOT use [Enter].

In many cases, a pull down selection can be made to make data entry easy.

The [DEL] key in a field clears the entry.

Security

This document uses macros to work properly. Be sure to Enable Macros in Trust Center settings.

Select View, then Edit in Word 2013 to allow the document to be edited.

Update – There are update buttons used to configure the form and populate some fields. Click on these when sections are filled, or whenever fields seem confusing.

Help

Some help on some of the entries can be found by clicking on the underlined heading. Hover the mouse over a subject to see if it links to Help. For example, ctrl-click on Customer Information on Page 2. Otherwise, scroll through the instructions, or use the Search function. Use the Service Manuals for installation, test and adjustment procedures.

Using pull-down choices

Select OK when a check of a section is completed successfully to acknowledge it is done.

Select Yes to confirm a configuration.

Select No if the check is not done, or not successful.

Select N/A if the check does not apply to the configuration, or can not be done for some reason.

Page 1

Selecting a Region

Selecting the region will affect the report. Be sure to start the report with the correct region.

If the region you need is not one of the available selections, you can add a region on page 14. Then select Other region. The Region information will update after a region is selected and the next field is selected. Or click the Update button on page 2.

Date of Report

The date field on page 1 should be the date the report is filled out.

Customer, EDAX Order #, Analyzer serial number

These are needed to identify the system.

The customer name should be the name of the Company where the system is installed.

The EDAX Order # (Sales Number or S#), can be found on the Shipping paper work, or in the About window from the TEAM or Genesis software.

***The Ardexus Product number can be obtained from the local Sales/Service office.

Page 2

Customer Information – Fill out as required. If all of the address fields are not needed, enter a [-] in the empty field. The Customer field will be automatically carried over from Page 1.

System information – Enter the information as available.

The Analyzer Model in many cases will be the EDAX Computer, such as an “X1” or “X2”. Serial number can be found on the system label on the back or top of the unit.

Enter the rest of the information as configured. If a printer is not supplied, enter “Not supplied”.

The EDAX Order Number will be carried over from Page 1.

System Configuration – Fill out as configured

If the system has an EDS detector, select Yes, otherwise select No.

If the system has an WDS detector, select Yes, otherwise select No.

If the system has an EBSD detector, select Yes, otherwise select No.

The Update buttons on the report, run a macro that updates the fields throughout the form to populate fields, and configure the form to the specific configuration.

Discuss system with the customer. This is to understand if any specific items need to be serviced during the PM.

Hyperthreading

To check if hyperthreading is enabled

Type wmic in run box

Type cpu Get NumberofCores,NumberofLogicalProcessors /Format:List in the window

If the Number of Logical Processors is greater than Cores, then hyperthreading is enabled

Type exit to quit

Hard Disk Write-cache buffer flushing: It is recommended that you turn off the Windows write-cache buffer flushing option, leaving it on can slow down the system response times. This setting is in the Windows Device Managers – Disk Drives – Policies tab.

Electrical

Check the Mains Supply. Measure the actual input voltage where the EDAX system plugs into.