1.A) IEEE/ASME J. Microelectromechanical Systems

EE290G/EE245September 15, 1999

Homework 1Loren Bentley

1.A) IEEE/ASME J. Microelectromechanical Systems

1) Call letters: TK153.J6

2) Recent issues: 4th shelf from bottom in the middle of north wall of reading room on 1st floor.

3) Bound issues: Top floor, north side of library. 11 stack.

4) Editor in Chief: R.S. Muller, UCB.

Sr. Editors: S. Senturia and Kensall Wise

5) Berkeley members of editorial board:R. Howe, Ed. Emeritus A. Pisano

B) Sensors and Actuators A (Physical)

1) Call letters: TJ223.T7 S44

2) Recent issues: 3rd shelf from bottom in the front on north wall of reading room on 1st floor.

3) Bound issues: Top floor, north side of library, 4th stack, near the wall.

4) Editor in Chief: S. Middelhoek

5) Berkeley members of editorial board:R.T. Howe, R.S. Muller

1. A). IEEE Journal of Solid State Physics

1) Call letters: TK7871.A1 I14

2) Recent issues: 2nd shelf from bottom in middle of south shelves of reading room on 1st floor.

3) Bound issues: Top floor, North side of library, 5th stack

4) Editor: S.H. Lewis, Prof. Of Electrical and Computer Engineering, U.C. Davis

5) Berkeley members of editorial board:B. Boser

3.A) Greg Kovacs

Education:B.A. Sc in Electrical Engineering, University of British Columbia, 1984. M.S. in Bioengineering, U.C. Berkeley, 1985. Ph.D. in Electrical Engineering, Stanford University, 1990. M.D. Stanford University, 1992

Current Employment:Professor of Electrical Engineering, Stanford University

Cofounder, Cepheid Inc.

B)Kensall Wise

Education:B.S. in Electrical Engineering, Purdue University, 1963. M.S. in Electrical Engineering, Stanford University, 1964. Ph.D. in Electrical Engineering, Stanford University, 1969

Current Employment: University of Michigan. Professor of Electrical Engineering and Computer Science. Professor of Manufacturing Technology. Director, Center for Integrated Microsystems

C) Steve Senturia

Education: B.A. in Physics, Harvard University, 1961. Ph.D. in Physics, Harvard University, 1966

Current Employment:Professor of Electrical Engineering, MIT

D) Hiroyuki Fujita

Education:B.S. in Electrical Engineering, University of Tokyo, 1975. M.S. in Electrical Engineering, University of Tokyo, 1977. Ph.D. in Electrical Engineering, University of Tokyo, 1980

Current Employment:Professor at the Institute of Industrial Science, University of Tokyo

4. Judy, J.W.; Muller, R.S.; Zappe, H.H. Magnetic microactuation of polysilicon flexure structures. Journal of

Microelectromechanical Systems, vol.4, (no.4), IEEE, Dec. 1995. p.162-9.

Summary: A magnetically actuated polysilicon hinge structure was batch fabricated by integrating magnetic microfabriction techniques with electrical and mechanical structure fabrication techniques. An electroplated nickel iron alloy was added after all of the polysilicon surface micro machining steps were completed, and only the release step remained. The resulting cantilevered beam structure could be moved through a range of over 180 degrees with a force of .185 nNm, through application of an external magnetic field.

5. Favorite article:Suh, J.W.; Glander, S.F.; Darling, R.B.; Storment, C.W.; Kovacs, G.T.A. Organic thermal and electrostatic ciliary microactuator array for object manipulation. Sensors and Actuators A (Physical), vol. A58, (no.1), Jan. 1997. p. 51-60

6. Favorite place to read: one of the desks behind stacks on second floor against the walls where it’s quiet.