V. Summary of Editorial Changes

Note: Original section number and at least one full sentence are required in “FROM” and “TO” fields.

1 / FROM: Section 6.1.3
Design of the adapter plate should conform to good engineering practices and relevant national and international standards and equipment safety codes for process equipment design, installation and safety.
TO: Section 6.1.3
Design of the adapter plate should conform to good engineering practices and relevant national and international standards and equipment codes for process equipment design, installation and safety.
Justification: To be consistent. The term "safety" was an editorial miss as codes are referenced throughout the document and TF forgot to remove the word "safety" from this paragraph.
2 / FROM: Section 6.5.1
Segregation of utility types should be considered and employed where practical; e.g., grouping of electrical connectors together and segregation of electrical from mechanical connectors. When segregating utility types, the designer should consider relevant national and international standards, codes and end user requirements.
TO: Section 6.5.1
Segregation of utility types should be considered and employed where practical; e.g., grouping of electrical connectors together and segregation of electrical from fluid connectors. When segregating utility types, the designer should consider relevant national and international standards, codes and end user requirements.
Justification: For clarification
33 / Add Note 12 after section 7.2.2.1
NOTE 12: During the design of the equipment and its associated adapter plate, it is important for equipment suppliers to understand and request information from end users regarding floor tile dimensions (eg, 610mm X 610mm) and its characteristics, depth available under tile (305mm to 457mm), any possible horizontal clearance issues, as well as floor plate locations the equipment could be installed on.
Justification: For clarification
4 / FROM: NOTE 13
Note 13: Floor systems and manufacturers may employ different methods of installation, such as mounting on stanchions or struts or using shims. If required by the end user, adapter plates should have adequate guards to prevent damage from traffic and moving items (e.g., carts, people). Adapter plates should have the flexibility to attach to a variety of floor systems (different manufacturers), supports, pedestals, tripods, or reinforced systems. Any adapter plate that interfaces with the floor should meet end-user requirements for deflection and strength or have a cover that can be employed as needed (e.g., for process equipment move in, fab maintenance). Adapter plates should minimize their contribution to trip hazards.
TO: NOTE 13:
Examples of additional provisions the equipment supplier should consider are as follows. Floor systems and manufacturers may employ different methods of installation, such as mounting on stanchions or struts or using shims. If required by the end user, adapter plates should have adequate guards to prevent damage from traffic and moving items (e.g., carts, people). Adapter plates should have the flexibility to attach to a variety of floor systems (different manufacturers), supports, pedestals, tripods, or reinforced systems. Any adapter plate that interfaces with the floor should meet end-user requirements for deflection and strength or have a cover that can be employed as needed (e.g., for process equipment move in, fab maintenance). Adapter plates should minimize their contribution to trip hazards.
Justification: For clarification
5 / FROM: Section 5.2.33
template — a dimensional outline of the equipment footprint including overall dimensions, equipment datum point, utility connector/penetration locations, equipment interconnect/penetration locations, maintenance and access spaces, and wafer load/unload stations. It can be made from any cleanroom compatible material.
TO: Section 5.2.33
template — a dimensional outline of the equipment footprint including overall dimensions, equipment datum point, utility connector/penetration locations, equipment interconnection/penetration locations, maintenance and access spaces, and wafer load/unload stations. It can be made from any cleanroom compatible material.
6 / From: Section 6.2.1
For example, adapter plate could be designed…
To: Section 6.2.1
For example, an adapter plate could be designed…
7 / FROM: Section 6.5.2
Consideration should be given for grouping utility types to near or same POC. Manifolding internal to the process equipment, with minimal facility connections, should be considered.
To: Section 6.5.2
Consideration should be given for grouping utility types to near or same POC to grouping utility types to POCs close to each other. Manifolding internal to the process equipment, with minimal facility connections, should be considered.
Justification: For clarification
8 / From: Section 7.3.2.2
The location should be a pass through on the adapter plate and not physically connected to the adapter plate.
To: Section 7.3.2.2
The location should be a passthrough on the adapter plate and not physically connected to the adapter plate.
9 / In Related Information
Delete the entire section
R1-7.5 The layout of equipment connectors should allow spacing and clearances for fastening tools, milling and welding heads.
Justification: Related information is not part of the document. This section is a duplicate of section 6.4.3.