Supplimentary Materials

SUPPLIMENTARY MATERIALS

FOR

Assembly of tantalum porous films with graded oxidation profile from size-selected nanoparticles

Vidyadhar Singh,1,* Panagiotis Grammatikopoulos,1 Cathal Cassidy,1 Maria Benelmekki,1 Murtaza Bohra,1 Zafer Hawash,1 Kenneth W Baughman,1 Mukhles Sowwan1,2,*

1Nanoparticles by Design Unit, Okinawa Institute of Science and Technology (OIST) Graduate University, 1919-1 Onna-Son, Okinawa, 904-0495, Japan.

2Nanotechnology Research Laboratory, Al-Quds University, East Jerusalem, P.O. Box 51000, Palestine

*Correspondence and requests for materials should be addressed to V. S. () and M. S. ()

List of supplementary figures:

Fig. S1 Average particle size as a function of deposition parameters (for Ar flow at fixed aggregation length of 125 mm and for aggregations lengths at fixed Ar flow of 30 standard cubic centimeters per minute at constant DC magnetron power on 54 W).

Fig. S2 EDS spectra of tantalum/tantalum oxide nanoparticles and between nanoparticles. EDS spectra indicate that the nanoparticle area (marked by red) contains Ta and O.

Fig. S3 Grazing angle X-ray diffraction pattern of a nanoporous film on a silicon substrate at a fixed grazing angle of 0.5o. No peaks given for tantalum and tantalum oxide phases can be observed, except for a broad diffuse peak, which is typically the signature of amorphous nanoparticle films.

Fig. S1 Average particle size as a function of deposition parameters (for Ar flow at fixed aggregation length of 125 mm and for aggregations lengths at fixed Ar flow of 30 standard cubic centimeters per minute at constant DC magnetron power on 54 W).

Fig. S2 EDS spectra of tantalum/tantalum oxide nanoparticles and between nanoparticles. EDS spectra indicate that the nanoparticle area (marked by red) contains Ta and O.

Fig. S3 Grazing angle X-ray diffraction pattern of a nanoporous film on a silicon substrate at a fixed grazing angle of 0.5o. No peaks given for tantalum and tantalum oxide phases can be observed, except for a broad diffuse peak, which is typically the signature of amorphous nanoparticle films.

1