SEMI® International Standards Program
Gases and Liquid Chemicals Technical Committee
Tuesday October 8th2013 - SEMICON Europa - Dresden, Germany
10:00 – 11:30Precursors Task Force meeting
(Paul Williams – SAFC)
10:10 / SEMI Standards Overview and Legal Reminders (JM Collard)
10:15 / Ballot Review :
SEMI Draft Document 5496 :
Revision to SEMI C80 : GUIDE FOR tetrakis(dimethylamino)silane (TDMAS)
Draft documents :
SEMI Draft Document 5325 :
Guide For Dimethyl Dimethoxy Silane (DMDMOS)
SEMI Draft Document 5491 :
Guide for Titanium Tetrachloride (TiCl4)
SEMI Draft Document 5493 :
Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)
SEMI Draft Document 5494 :
Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS)
SEMI Draft Document XXXX :
Guide For Pentakis(dimethylamino)tantalum(PDMAT)
11:30 – 13:00Solvents in Advanced Processes Task Force meeting
(Gummaar De Vos – FFEM)
11:40 / SEMI Standards Overview and Legal Reminders (JM Collard)
11:45 / Ballot Review :
SEMI Draft Document 5324 :Guide for Cyclopentanone
SEMI Draft Document 5326 :Guide for Methyl Isobutyl Carbinol
Draft documents :
SEMI Draft Document 5492 :Guide for Ethylene Glycol
SEMI Draft Document 5495 : Guide for CycloHexanone
13:00 – 14:00LUNCH (not provided)
14:00 – 17:30Gases & Liquid Chemicals Committee meeting
Co-chairs:
- Gordon Ferrier, Air Products
- Gummaar De Vos, FFEM
- Jean-Marie Collard, Solvay
14:00 / Welcome and Self-Introductions (JM Collard)
14:10 / SEMI Standards Overview and Legal Remindersand SEMI Staff Report (SEMI Staff)
14:20 / Review of the minutes and action items from the previous meeting
(SEMI Staff)
14:25 / Gases Liaison reports from North America and Japan (SEMI Staff + JM Collard)
14:35 / Liquid Chemicals Liaison reports from North America and Japan
(SEMI Staff + JM Collard)
14:55 / ITRS update (Andreas Neuber, Applied Materials)
15:15 / Break
15:30 / Ballot Review :
SEMI Draft Document 5496 :
Revision to SEMI C80 : GUIDE FOR tetrakis(dimethylamino)silane (TDMAS)
SEMI Draft Document 5324 : Guide for Cyclopentanone
SEMI Draft Document 5326 : Guide for Methyl Isobutyl Carbinol
SEMI Draft Document 5635 : WITHDRAWAL OF SEMI C61-0707 SPECIFICATION FOR BAR CODE CONTAINER IDENTIFICATION
16:00
16:15 / Task Force Reports :
Precursors(P. Williams, SAFC)
Solvents in Advanced Processes (G. DEVOS, FFEM)
16:30 / ! TO BE CONFIRMED !
Permeation Tubes for Accurate Gas Standards
In the Absence of a True Zero Reference
J. J. (jim) McKinley
Kin-Tek Laboratories, Inc.
LaMarque, TX, USA
17:00 / Discussion related to the technical presentation regarding set up of a TF and drafting a standard in the field of traces water and oxygen determination in high purity gases
17:20 / New business :
5-year review :
SEMI F96 : Specification for Port Configuration of Canisters to Contain Liquid CVD Precursors
17:30 / Adjourn – Next meeting announcement (SEMI Staff + JM Collard)