Wisconsin Center for Applied Microelectronics

1550 Engineering Drive

Madison, WI 53706

Phone: 608/262-6877

Fax: 608/265-2614

Nikon IC Inspection Microscope eclipse L200

Imaging Station

10/23/2018

Material Restrictions

Materials Allowed

/

Materials Not Allowed

Silicon / Acids
Silicon oxide / Bases
Silicon nitride / Solvents
Polysilicon
Quartz
Sodium Glass
III-V Semiconductors
Metals
Gold
Carbon
Photoresists
SU8
Organic Polymers
Plastics
Spin on dopant
Polyimide tape
Polyimide
Polystryene

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Steps To Focusing A Microscope

Start-Up -- Nikon L200

  1. Logging into CRESS turns on the microscope light.
  1. A dial on the lower left front panel of the microscope base controls the light intensity. The two buttons directly above the dial change the objective lenses in one direction or another. Note that going from the lowest powered objective directly to the highest powered objective is now allowed. “EPI” stands for episcopic and refers to the mode where light is reflected off the sample (mostly used for semiconductor and other opaque samples.) “DIA” stands for diascopic and is the mode where light goes through the transparent sample. The two buttons on the right side control the episcopic aperture.
  1. Use the course focus knob on left to lower the stage.
  1. Select the type of field for view. BF -- bright field, or DF -- dark field (useful for defect/particle imaging or counting)
  1. Position the sample on stage. The knobs extending down on the right side make Stage X and Y movement. There is also a larger handle (with a position lock on it) for faster (Coarser) movement of the stage. Do not force the stage to move without unlocking the brake.
  1. Select the desired objective -- 5x, 10x, 20x, 50x, 100x or 150x -- by turning the nosepiece dial or turret, or by using the buttons on the base. DO NOT PUSH ON THE OBJECTIVES TO TURN THE NOSEPIECE.
  1. While viewing the objective and sample, use the course focus to raise the stage with sample close to the objective close but not touching the objective. Do not crash the sample into the objective. This action will damage the objective.
  1. While viewing the sample, adjust the inter-pupillary distance of the eyepieces for your best viewing.
  1. Adjust the course focus by turn the inner dial on the left. The stage will be moving away from the objective and the sample will gradually come into focus. The working distance of each objective is listed and ranges from a long working distance of 8.8 mm for the 2.5x objective to 0.51 mm for the 100x objective (and probably smaller for the 150x objective).
  1. Use the fine focus knob to sharpen the view. You may use the outer dioptic adjustment ring to adjust focus for each eye separately if necessary. The fine focus knobs move the stage 100 microns for each revolution. The stage can vertically move 29.0 mm over the full range.
  1. To change magnification, rotate the objectives by turn the nosepiece dial or turret, or by pressing the buttons on the base front panel. Note that the microscope will not let you move directly from the 2.5x objective to the 150x objective.
  1. The objectives are "par focal" so you should only need to adjust the fine focus slightly to sharpen the new view.
  1. On the left side of the microscope, there are multiple filters including a Neutral Color Balancing filter (NCB), a Neutral density filter with a transmission of 6% (ND16), and a green interference filter (GIF) for contrast adjustment. On the right side of the microscope, there is also a polarization slider, an analyzer slider, a pinhole slider (useful at high magnifications), and a DIC or Nomarski slider. The DIC slider has two positions, A and B, and the correct position is determined by the letter on the objective lens (see page 19 of manual for more details).

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