NA Facilities & Gases TechnicalCommittee

NA Standards Spring 2014 Meetings

Tuesday, April1, 2014

09:00 am - 12:00 pm

SEMI Headquarters in San Jose, California

AGENDA

1.0Welcome / Call to Order

1.1Introductions

1.1.1New SEMI Staff supporting the NA Facilities and Gases Committee

1.2MeetingsReminders (Membership Requirement, Antitrust and Intellectual Property Reminders, Effective Meeting Guidelines)

1.3Agenda Review

2.0Review and Approval of Previous Meeting Minutes (Fall 2013)

3.0Liaison Report[Michael Tran]

3.1European Committee

3.2JapanCommittee

3.3Korea Committee

4.0Staff Report[Michael Tran]

5.0Ballot Review

5.1Doc. 5671, Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality

5.2Doc. 5672, Revision of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% Quality

5.3Doc. 5673, Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality

5.4Doc. 5674, Revision of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% Quality

5.5Doc. 5668, Withdrawal of SEMI E52-1213, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers

5.6Doc. 5669, Line Item Revisions of:

  • SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation
  • SEMI E54.18-1106 (Reapproved 1211), Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
  • SEMI E54.22-0613, Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
  • SEMI F79-0710, Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
  • SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems
  • Line Item 1: Change all instances of SEMI E52 to AUX030 as noticed.

6.0Subcommittee & Task Force Reports

6.1Components Activities

6.1.1Heater Jacket TF/David Colquhoun

6.1.2Mass Flow Controller TF/Mohamed Saleem

6.1.3Pressure Measurement TF/Justin Hough, David Colquhoun

6.1.4Surface Mount Sandwich Component Dimensions TF/ Matt Milburn

6.2Contamination Activities

6.2.1Filters and Purifiers TF/ Mohamed Saleem

6.3Materials and Processes Activities

6.3.1Materials of Construction of Gas Delivery Systems TF/Tim Volin

6.4Gases SpecificationTF/Mark Ripkowski

7.0Facilities Task Force Reports

7.1F51 Elastometric Sealing Revision TF/Dalia Vernikovsky

7.2BIM TF/Ben Bruce

8.0Old Business

9.0New Business

9.1Publication Improvement Proposal form for Document 5571A

9.25 Year Reapproval Ballot Submission

10.0Action Item Review [Michael Tran]

10.1Open Action Items

10.2New Action Items

11.0Next Meeting and Adjournment

The next meeting of the NA Facilities & Gases committeesis scheduled at NA Standards SEMICON West 2014 Meetings on July 8th in San Francisco, California.

NA Facilities & Gases Committee1April 1, 2014

AgendaSEMI Headquarters

San Jose, California