In-line SEM(線上型電子顯微鏡)-技術資料

HITACHI S-6280H CD SEM

System Specification

item / specification /
performance
wafer size / 150mm(6 inch) with primary flat edge
Wafers automatically transferred with auto loader
primary flat edge / 57.5 mm
Measuring system / Cursor and line profile system
Measuring range / 0.1 to 100 μm
Reproducibility / ± 1% or 0.010μm, whichever larger
Throughput / 8 wafers/hour with cassette auto loader
Image resolution / 6nm(at 1 kV accelerating voltage, using resolution test specimen)
Magnification / low magnification mode：100~450X
high magnification mode：500~150,000X

Specimen Stage

Moving range / X,Y traverse; 0 to 200 mm
Drive / Pulse motor
Control speed / 20 mm/sec max. controlled by computer
Loader
Transfer from loader chamber to stage / Automatic loading, wafer chucking and orientation flat setting following automatic evacuation
From cassette to loader chamber / Via cassette-to-cassette auto loader
Cassette-to-cassette Auto Loader
System / Random access using one cassette
Chucking / Vacuum chucking from wafer rear surface
Orientation flat setting / Automatic
Electron Optics
Electron gun / Cold field emission type
(high brightness, long life)
Accelerating voltage / 700 to 1300 V (variable in 10 V steps)
Lens system / 3-stage electromagnetic lens reduction
Objective lens aperture / Heatable and movable aperture (4 openings selectable and alignable outside vacuum), fine adjustment possible
Scanning coil / 2-stage electromagnetic type
Stigmator coil / 8-pole electromagnetic type (X, Y)
Control & Display System
Viewing CRT / 12”, pattern processing image display
Control CRT / For operation via dialogue with computer, display of water map, measured values, etc
Scanning mode / TV scan, raster rotation (± 5°), auto brightness/contrast
Observation mode / Standard mode (FCM OFF)
FCM mode
Recording / Photographing device
Safety device / Emergency cutoff switch provided
Measured Data Processing System
File storage processing
Data processing
Printout / Average, standard deviation, maximum and minimum values
Vacuum System
System / Full automatic dry & clean evacuation system (with slow evacuation/slow leak mechanism)
Vacuum pumps / Ion pump (3 sets), turbo molecular pump (2 sets), rotary pump (with foreline trap, 2 sets) power failure/vacuum degree safety device equipped