EDAX Genesis Spectral Mapping
1.Focus the SEM to a working distance between 12-12.5 mm.
2.Set up scope for “Analysis” operating mode in the “Column” setup menu.
3.Start with Condenser Lens 1 at 5, in the “Column” set up menu, go to a smaller number if the counts per second on the EDS system are too low.
4.Find area of interest in Low Mag mode. Use arrows, mouse or the track ball to move the stage. Then go to High Mag mode in the SEM,EDS cannot be done in Low Mag mode, and close the chamber scope.
5.Turn on the “Analysis” menu in the S4700, to select normal area.
6.Open the EDAX Genesis icon on the desktop of the EDS computer.
7.Select the Maps/Line Tab at the top left of the data window. Above screen is for imaging or the multi-function window view.
8.To take and image:
1 Right mouse click on the text to the right of the collection button. Select a matrix size and the desired number of reads
2Click on the “Collect Image” button
3Use the auto look up table button (LUT) to adjust the contrast and brightness if desired
4Click on the save button and select a file name and either .bmp or .tif
5Print the Image file
9.To start map collection:
1Preseta time for spectrum collection.
2 Select an appropriate Amp Timeto obtain a dead time between 20 and 40 percent.
3Collect an image.
4Collect a Spectrum.
5 Identify the peaks.
6Select Maps then select the Map type, select Live and Spc,
7Select a Matrix size, Dwell and the Data Type, right click and enter values, Spc will have a minum of 200.
8Collect Maps. A dialogue box will open to select a file name and location to save the maps.
10.To stop map collecting click Collect Maps, select either Immediate or at the end of current raster.
11.Select a map by clicking on it.
12.Click Retrieve Spectra From Map, first icon above Collect Maps.
13.Select Hand drawn or Reduced Scanfrom the toolbar icon, click and draw on the image to review the average spectrum from the selected area.
14.Do an HPD to fit the spectra from the selected area.
15.Q, quantify the spectra. The results will appear to the right of the selected map. Can save the spectra as raw data at this time.
16.Go to Edit and Screen Capture, select the parts of the window to save and print out, the outline will go from black to blue. Print and/or Save the data set as a .bmp or .tiff.
March 25, 2010