Titanium Dioxide (Tio2) Thin Films Were Deposited on Stainless Steel Sheet (304SS) by RF

Investigation and Evaluation of StructuralColor

of TiO2 Coating on Stainless Steel

J. H. Lee1*, Y. H. Jun2

1Department of MaterialsEngineering, K University, Seoul, 136-791, Korea

2Electronic Materials Laboratory, Korea Institute of Science and Technology, Seoul, 136-791, Korea

+Corresponding author. Tel: +82-2-xxx-xxx;Fax: +82-2-xxx-xxx

E-mail address:

Abstract

Titanium dioxide (TiO2) thin films were deposited on the stainless steel substrates by RF magnetron sputtering.In order to prevent film delamination and cracking caused by thermal mismatch between the stainless steeland TiO2 thin film,Ti thin filmwas initially deposited on the stainless steel as buffer layer.The experimental results have indicated that optical characteristicin the visible region were strongly influenced by the thickness of TiO2thin film.In order to estimate and compare with the experimental results, the simulation program, the Essential Macleod Program was adopted. Based on the simulation results, 4 different colors such as dark goldenrod, medium orchid, medium blue and dark green were fabricated with various deposition time respectively. The color of the multilayer filmindicating (L*, a*,b*)=(52.93, -40.69, 7.69) deposited for 209nm thickness was visually observedas darkgreen color with the maximumpeak of 31.54% spectral reflectanceat a wavelength of 510nm,corresponding to thesimulation results . It was found that the simulated results are relatively well matched with the experimental ones.

Keywords : TiO2, Optical properties, Films, Reflectance

1. Introduction

Ceramiccoatings are very attractive to protect metals from corrosion becausethey possess good thermal and electrical properties, and also more resistant to oxidation, corrosion, erosion and wearthan metals in high temperature environments.Among many ceramic materials, TiO2is perhaps one of the most widely studied oxides because it exhibits high chemical and mechanical stability [1].

Shen et al. [2]synthesized the316 L stainless steel by uniform TiO2nano-particulate coatings and claimed that the TiO2 coatings exhibited very good corrosionresistance by acting as a protective barrier on the steel surface.AdditionallyTiO2coated surface can show a wide range of functionality with a colorful appearance because of its high refractive index and the optical transmittance in the visible range[3-5].

So far a number of experimental researches have been successfully conducted in the area of the structural and optical properties of TiO2 films, influenced bydeposition conditions such as substrate temperature, working pressure, and oxygen partial pressure[6,7].However, not many works have been undertaken toestimate the optical propertieswithsimulation program in advance.

The overall objective of this study is to understand and evaluate the phenomenon of coloring on TiO2thin films.In order to estimate and compare with the experimental results, the simulation program, the Essential Macleod Program (EMP)[8], was adopted. For this purpose, TiO2 thin films were deposited on stainless steel substrates by RF magnetron sputtering method and optical characteristics in terms of different film thickness were systematically investigated.

2. Experimental

2.1 Films Preparation

The cut stainless steel sheets(304SS, 10×10×0.2㎣) were ultrasonically cleaned with acetone, absolute ethyl alcohol, and de-ionized water for 30 minutes. Before deposition of TiO2 thin film, Tithin film was initially deposited on the stainless steel substratesusing DC magnetron sputteringmethodto reduce the thermal stress caused by thermal expansion mismatch between the stainless steel and TiO2 film. It was known that the thermal expansion coefficients of the stainless, Ti and TiO2 thin films are 16.0×10-6/℃, 8.6×10-6/℃and 7.14×10-6/℃respectively [9,10]. Thefilm thickness of Ti was 200 nm. Following that, TiO2 thin films were deposited on Ti thin film using RF magnetron sputtering method.

All the films were deposited under the following parameters: 50sccmin Ar flow rate, 12mTorrin working pressure, 100Wattin RF sputtering power for TiO2 target and 120Wattin DC sputtering power for Ti target atroom temperature.These deposition conditions were remained constant while deposition time was varied.The deposition rate of TiO2 thin film was 2.9nm/min..

2.2 Simulation

For optical characterization, the Essential Macleod Program (EMP)was adopted and the calculated results were compared with measured optical properties. EMPis a comprehensive software package for the design, analysis, manufacture and trouble shooting of thin film optical coatings[8,11]. The EMP simulation method was processed through the following steps; First, construction parameters such asrefractive index and extinction coefficient of Ti and TiO2, which were calculated by using ellipsometry measurement,were input. Second, simulation with variable parameters such as wavelength ranges (380 - 780 nm) and number of layers[304SS|Ti|TiO2|Air]was designed. Finally, analysis ofeach layer effect with a variable thickness of Ti and TiO2thin filmsfrom 10nm to 300nm respectively was performed for optical properties whether it is appropriated for optimal simulation with system modification.

2.3 Characterizations

The film thicknesses were measured using a surface profiler meter (α-step, TENCOR P-2). To examinethe surface morphologies of TiO2 thin films Scanning probe microscope (SPM, Nanoscope Ⅲa) was used.The refractive index nand the extinction coefficient kwereevaluated by ellipsometry measurement using ellipsometer (Elli-SE) in the visible range from 380 to 780 nm with a step width of 5 nm. The color and lightness of the TiO2 thin films were estimated using a spectrophotometer(CM-3600d) with a light source of D65 according to the 1931norm of the Commission International de l’Eclairage(CIE). The angle of incidence was 8°. Color properties for the TiO2 thin film can be described using the L*a*b* scale: L*attributes the lightness, a*axis points the red (positive) to green (negative) and b*points the yellow (positive)to blue (negative). And white point is positioned on the center (a*,b*)=(0,0). The quantity of color is measured usingthe chromaticity[12]. The spectral reflectance was calculated with the same apparatus.

3. Results and discussion

3.1 Simulation

EMP was adopted in order to analysis optical properties of [304SS|Ti|TiO2|air] multi-layers in advance. To extract an accurate analysis from EMP simulation, the refractive indexand the extinction coefficient are necessary. Fig. 1 shows the refractive indexn and extinction coefficientkof each film as a function of the wavelength in the visible range, which were obtained by the ellipsometry measurement.The measuredvalue of TiO2 thin film were n=2.1053 andk=0.0086,which were slightly different from the theoretical value of n=2.2789 andk=0.0002 at a wavelength of 633nm[8]. Thedifferencebetween the refractive index and extinction coefficient in simulation and experiment can be explained in terms of the oxygen vacancy and packing density.TiO2 thinfilms have a known character that they are apt to loseoxygen in some conditions and exhibit suboxides [13].

TiO2→TiO2-x + O2↑(1)

As oxygen gas was not flowed into the chamber during TiO2 deposition, TiO2 thin films showed a bit of oxygen vacancy. It was known that a large number of vacancies and voids can be incorporated into thin films during the deposition processes so that the films are generally porous. The presence of excess vacancies and voids greatly influences the physical properties[14-16].

Ti thin film showed the experimental value of n=2.97118, k=2.58534 and the theoretical value of n=2.93792, k=3.59569. The difference between extinction coefficients might be due to the change of the density inTi thin film.

Fig. 2 shows the investigation on the trace of CIE 1931 chromaticity with different filmthickness of TiO2 thin films. As shown in Fig. 2,the value of CIE 1931 chromaticity diagram was sensitively changed from orangecolor (0.45, 0.37) for 40nm thicknessto dark-violet color(0.36, 0.23) for 170nm thickness by increasing the thickness of TiO2 thin film. On the other hand, the valuesof chromaticity x, y wereelliptically shifted (x=0.34-0.48, y=0.19-0.47) over 170nm thickness of TiO2 thin film and the colors were also changed rotationally.However, Ti thin film was not shown any optical changes with a variable thickness in the simulation program.

Clearly to distinguish from other colors of the experimental result, different 4 colors such as gold, purple, blue and greenwere selected.Fig. 3 represents the simulated total hemispherical reflectance in terms of the thickness of TiO2 thin films. It is seen that the reflectance was strongly influenced by the thickness of TiO2 thin film whilegeneral parameters such as refractive index and packing density are remained constant.In addition, the maximum peak intensities of TiO2 thin films show around 32%spectral reflectance in the visible range of 380-780nm at normal incidence. The peak position determines the color of the multilayer film. As shown in Fig. 3(d), green color visually observed from simulationdemonstratedthe maximumpeak of 31.90 % at a wavelength of 510nm, which is corresponded to green color that has wavelength range of 500~570nm in the visible spectrum. Moreover, blue color observed from simulation program showed the maximum peak of 31.49 % at a wavelength of 470 nm, which is good agreement with blue color pattern indicating wavelength range of 450 - 500 nm.

3.2 Optical Characteristics

The photographsof TiO2 thin films deposited on the stainless steel prepared by RF magnetron sputtering displayed in Fig. 4. The TiO2 thin filmsexhibited different 4 colors such as (a) dark goldenrod, (b) medium orchid, (c) medium blue and (d) dark green,which were fabricated with various deposition times for 120, 174, 189 and 209 nm respectively. The observed colorsin Fig. 4 can be expressed with the maximum reflectance curve in the visual wavelength range sincethe peak position determines the color of the multilayer film.Fig. 5 represented the spectral reflectance with differentthicknessof TiO2 thin films. From Fig. 5(d), the prominent peak intensity was observed near the wavelength of 510nm corresponding to green color.

However, the maximum reflectance of around 27-30% across the entire wavelength range in Fig. 5 seems slightly smaller than the simulated value showing around 32% spectral reflectance at normal incidence. Fig. 6demonstratesgold and green patternsfor TiO2 thin film to compare the simulated spectral reflectance with the experimental one.In Fig. 6(d), the maximumpeakpositioned at a wavelength of 510 nmwas 31.54 %,corresponded well to the simulated value of 31.90 % respectively. This result was well-matched as compared with the one shown in Fig. 7(d). Another feature seen in Fig. 6(a), gold color pattern slightly decreased about 3.26% at the maximum peak.

L*a*b* values for TiO2 thin film are shown in Table 1.Table 1 indicated that the simulated lightness values were higher than experimental ones. Generally it was known that the color reproduction on display system is not equal to original images [17]. Therefore, all of the experimental results were visually observed darker than simulated one. TiO2 thin film with209 nmthickness was visually observed as dark-green while the film with189 nm thicknesswas shown as dark goldenrod.Distribution of chromaticity indices indicating the chromaticity value of 41.41 in Fig. 7(d) wasalmost the same asthe simulated value of 42.73 in Fig. 7(d´). Normally green color pattern has wide wavelength range from 500 to 570 nm on the CIE 1931 chromaticityso thathuman eyes are more sensitive to green than other colors[12].For this reason, the experimental green color which has a*=-40.69 and b*=7.69 was corresponded well with simulated a*=-42.45 and b*= 4.91.

The golden color of the sample observed in the simulated images from the display changed into dark-goldenrod in the measured L*a*b* scale. This difference also can be explained by color gamut on the displayand the sensitivity of the eye [18].As seen in Fig. 7(a),the experimentally measuredchromaticity value of 36.78 is smaller than the simulated value of 50.78. This is attributed to the fact that yellow color pattern has narrow wavelength range of 570-590 nm so that its chromaticity could be deduced by the influence of the lightness value [19].

4. Conclusions

The present study showed that optical simulations provide numerous important implications on theperformance for the experimental optical characteristics of TiO2 thin films such as the spectral reflectance, color and chromaticity.Different 4 colors such as dark goldenrod, medium orchid, medium blue and dark green were fabricated based on the simulation results. The maximum peak positioned at a wavelength of 510 nm was 31.54 %in the experimentally measured spectral reflectance,which is a good agreementwith the simulated value of 31.90 % for green color patterncorresponding wavelength range from 500 - 570 nm.The maximum peak which determines the color was positioned at a wavelength of 510 nm, corresponding to the experimental chromaticity value of (a*,b*)=(-40.69, 7.69) and simulated value of(a*,b*)=(-42.45, 4.91).The optical properties with experimental result were relatively well matched with simulated one. It can be concluded that the experimental optical properties of thin film were extracted the required information from the simulation results in advance.

Acknowledgements

This research was supported by a grant from 'Center for Nanostructured Materials Technology' under '21st Century Frontier R&D Programs' of the Ministry of Education, Science and Technology, Korea.

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Table caption

Table 1

A comparison of color images between experimental and simulated TiO2 thin film visually observed according to the L*a*b* scale.

Tables

Figure captions

Fig. 1. (a)The refractive index n and (b)extinction coefficient kwith TiO2 and Ti thin film in the visible ranges using the ellipsometry