Vapor HF Manual

Eric, VDEC, Mita Lab, 2013/01/11

The etching rate of SiO2 vary a lot, but it is roughly 10m/hour.

Should be performed in draft for Acids (general) in CR2

When manipulate HF, be sure to switch on the draft ventilation andalways were protective wears:

  • Glasses or face shield
  • Apron,
  • Second pair of gloves. Glove's material choices are:

エフテロン: good protection but very thick andinconvenientfor manipulation

neoprene: good protection and convenient for manipulation

nitrile: lower protection then neoprene but better protection then latex (can protect for less then an hour if they receive HF projection) and convenient for manipulation

Gathered the needed equipment. They should be in the draft and/or in the black toolbox on the floor at the right side of the draft. They are the following:

Set-up the lamp
  • Put the Stand upside down into the outside container,
  • Put the HF container on the stand,
  • Put the sample holder on the HF container,
  • Set the lamp on the tap at about 5 cm over the top of the sample holder
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Pre-heating of HF
  • Take off the sample holder and the HF container from the stand,
  • Pour about 5g of HF50% (フッ化水素酸含有量50%) into the HF container. It covers about half of the bottom surface of the container,
  • Put the HF container on the stand,
  • Put the lid on the HF container
  • Put the whole under the lamp and wait 15min to heat the HF
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Set-up the sample and start etching
  • After 15min, take off the lid,
  • Put the sample into the support container,
  • Put the lid back on the support container,
  • Put the whole under the lamp,
  • When the etching time is over, put the cover in the support 1 and put the sample holder in the support 2 in order not to contaminate the surface of the draft,
  • You might want to check is etching is finish and do it again in case it is not.
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Clean up

  • Throw away the HF and the 3 following DI water rinse in the red tank,
  • Check if PH>5. If not do again the previous step,
  • Pour DI water in the lid and throw it away in the red tank,
  • Pour DI water in the support 1, with sample holder in it, and throw the water away in the red tank,
  • Pour DI water in the support 2 and throw it away in the red tank,
  • Rinse the stand
  • Put all the equipments in the outside container and rinse all with DI water (except the lamp...)
  • Clean up the place
  • Fill out the ipod log