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Background Statement for SEMI Draft Document 4663
REVISION TO SEMI E19.1, PORT STANDARD FOR MECHANICAL INTERFACE OF WAFER CASSETTE TRANSFER, 100 mm (4 inch) PORT
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background
This standard failed 5-year review at the NARSC meeting in Dallas in April 2008, on the grounds that the formatting now deviated significantly from the SEMI Standards Style Manual, and this should be corrected.
This proposed revision adds the mandatory Purpose, Scope, Requirements, and References sections to the Standard. It also changes the title to make it clear that this is a SMIF port standard.
The technical content of the Standard is not changed
The results of this ballot will be discussed at the next NA PIC committee meeting on November 12, 2008 in conjunction withthe NA Standards Fall 2008 meetingsin San Jose, California
SEMI Draft Document 4663
REVISION TO SEMI E19.1, PORT STANDARD FOR MECHANICAL INTERFACE OF WAFER CASSETTE TRANSFER, 100 mm (4 inch) PORT
SEMI E19.1-0697 (Reapproved 0702)
STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR
100 mm (4 inch) PORT
PORT STANDARD FOR MECHANICAL INTERFACE OF WAFER CASSETTE TRANSFER, 100 mm (4 inch) PORT
This standard was technically approved by the Global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition approved by the North American Regional Standards Committee on March 17, 2002. Initially available at June 2002, to be published July 2002. Originally published in 1991; previously published June 1997.
The complete specification for this interface includes all general requirements of SEMI E19.
1 Purpose
1.1 The purpose of this document is to quantify the requirements for a 100 mm (4 inch) cassette SMIF interface
2 Scope
2.1 This specification provides the 100 mm (4 inch)-specific values of all alpha-numeric variables (e.g.: A1) defined in SEMI E19
3 Requirements
3.1 The complete specification of this interface includes all the general requirements of SEMI E19. Table 1 provides the specific values for 100 mm (4 inch) cassette SMIF ports.
4 Referenced Standards
4.1 SEMI E19 ---- Standard Mechanical Interface (SMIF)
Table 1 Port Dimensions for 100 mm (4 in.) Wafer Cassette
Port Door / A1 / 73.02 mm ± 0.13 mm / (2.875 in. ± 0.005 in.)A2 / 73.02 mm ± 0.13 mm / (2.875 in. ± 0.005 in.)
A3 / 9.53 mm ± 0.25 mm / (0.375 in. ± 0.010 in.)
Guide Rails / B1 / 90.17 mm ± 0.13 mm / (3.550 in. ± 0.005 in.)
B2 / 82.55 mm ± 0.13 mm / (3.250 in. ± 0.005 in.)
B3 / 6.35 mm ± 0.25 mm / (0.250 in. ± 0.010 in.)
B4 / 6.35 mm ± 0.25 mm / (0.250 in. ± 0.010 in.)
B5 / 17.78 mm (0.700 in.) / maximum
B6 / 12.70 mm (0.500 in.) / minimum
B7
B8 / 3.18 mm ± 0.25 mm / minimum
B9 / 6.35 mm (0.250 in.) / maximum radius
Latch Pins / C1 / 81.25 mm ± 0.13 mm / (3.200 in. ± 0.005 in.)
C2 / 6.35 mm ± 0.13 mm / (0.250 in. ± 0.005 in.)
C3
C4
C5 / 3.18 mm ± 0.05 mm / (0.125 in. ± 0.002 in.)
C6 / 6.35 mm ± 0.25 mm / (0.250 in. ± 0.010 in.)
C7 / Full spherical radius
C8 / 4.44 mm (0.175 in.) / minimum
Registration Pins / D1 / 101.60 mm ± 0.13 mm / (4.000 in. ± 0.005 in.)
D2 / 50.80 mm ± 0.13 mm / (2.000 in. ± 0.005 in.)
D3 / 114.30 mm ± 0.13 mm / (4.500 in. ± 0.005 in.)
D4 / 57.15 mm ± 0.13 mm / (2.250 in. ± 0.005 in.)
D5 / 6.35 mm ± 0.08 mm / (0.250 in. ± 0.003 in.)
D6 / 10.16 mm ± 0.25 mm / (0.400 in. ± 0.010 in.)
D7 / Full spherical radius
Latch Pin Force each / F1 / 1.36 kg (3 lb) / minimum
F2 / 1.36 kg (3 lb) / minimum
Position of Cassette / G1 / 12.70 mm ± 0.25 mm / (0.500 in. ± 0.010 in.)
G2 / 0.50 mm (0.020 in.) / maximum
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the responsibility of the user of these standards to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any particular application. The determination of the suitability of the standard is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their own responsibility.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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