Mechanistic studies for depositing highly dispersed Pt nanoparticles on carbon by atomic layer deposition (ALD)
Journal of Nanoparticle Research
Alia M. Lubers, Christopher L. Muhich, Kelly M. Anderson, Alan W. Weimer*
Department of Chemical and Biological Engineering, University of Colorado Boulder, Boulder, Colorado 80309
*Corresponding author email: ; phone: (303) 492-3759
Supplemental information:
Fig. SI1: Analog scans are processed first through qualitative inspection then percent difference graphing to determine individual species generated from reactions during each time point. The gray graphs are the subtracted background.
Fig. SI2: BET surface area of plain and functionalized carbon.
Initial XC72 BET SA:214 m2/gr / BET SA (m2/gr) / % decrease from plain
9 hr functionalized carbon / ground / 77 / 64.0
Fig. SI3: P vs T mass spectra for oxygen doses where (a) substrate oxidation is not occurring; and (b) substrate oxidation is occurring.
Fig. SI4: platinum deposited as a function of cycle, Pt dose time after breakthrough and second precursor, which displays not-self-limiting behavior.
Fig. SI5: The following figures are converted mass spec measurements based on relative calibration gas concentration for methane, ethane, propane and carbon dioxide for each ALD condition.
Fig. SI6: The following figures estimate variation of species generation between experiments with the same conditions:
species / Average generation in Pt dose (ppm) / Error (ppm)Methane (15) / 226,293 / 126,712
Ethane (30) / 11,548 / 9,576
Propane (42) / 6,645 / 3,536
Carbon Dioxide (22) / 3,319 / 5,088
Fig. SI7: all important species during platinum dose for first and second cycle:
All important species generated during the second precursor dose, either oxygen or hydrogen: